nProber

Isolate subtle electrical issues that affect yield, performance, or reliability

Shrinking technologies, new materials and more complex structures are driving defectivity, especially where the circuit design is particularly sensitive to process variation. Our electrical analysis instruments are used by semiconductor manufacturers to isolate subtle electrical issues that affect, yield or performance.

Popular products
flexProber
Meridian 7
Hyperion
flexProber

The flexProber is a SEM-based nanoprobing platform, providing electrical characterization and fault isolation capabilities for process development, device design debug, and failure analysis. flexProber’s SteadFast nano-manipulators, along with the LEEN high-resolution scanning electron microscope column and advanced control software, allow for precise, repeatable, and stable probe placement on critical level features.

Available for: Semiconductors Research

Meridian 7 785nm SIL imaging and dynamic LSM analysis. 5um sample preparation.

The new  Thermo Scientific Meridian 7 system provides visible laser voltage imaging and probing and dynamic laser stimulation on sub-10nm devices. By avoiding a requirement for ultra-thin substrates, it preserves the integrity and functionality of the device under test to provide a reliable and practical production solution. It offers a 25 percent optical resolution enhancement over the previous-generation system and has a smaller spot size for better fault localization. In addition, the new Meridian 7 system offers more certainty in navigation and computer-aided design (CAD) overlay, less cross-talk and higher waveform signal-to-noise.

Available for: Semiconductors Research

Hyperion

Hyperion system offers fast, accurate transistor probing for electrical characterization and fault localization in support of semiconductor technology development, yield engineering and device reliability improvement. The unparalleled stability of the Hyperion system enables nanoprobing down to the 10nm technology node and beyond.

Available for: Semiconductors Research

nProber III Eight probes enable butterfly, DC bit cell and bit cell pulsing applications on advanced node devices.

The Thermo Scientific nProber III system allows users to characterize individual transistor performance down to the 7nm node. nProber III system can also be used to localize a wide variety of electrical faults prior to extracting thin sectional samples for physical failure analysis in a transmission electron microscope (TEM). The high accuracy fault localization provided by the nProber III system can dramatically increase TEM fault imaging success rates. nProber III system productivity and ease of use make it an ideal solution for optimized failure analysis workflows.

Available for: Semiconductors Research

Meridian WS-DP Laser voltage imaging (LVI), shows the physical locations of transistors that are active at a specific frequency on the Meridian-IV.

Meridian WS-DP system enables faster defect localization by using production testers, load boards, and probe cards.

Available for: Semiconductors Research

Meridian IV

Meridian-IV system is the preferred choice for developers of advanced, low-voltage, high-density semiconductor devices requiring best-in-class performance and the ability to diagnose wide ranging failure modes, including parametric failures and those resulting from design-process marginalities.

Available for: Semiconductors Research

Meridian V

The Meridian V System provides visible laser voltage imaging and probing and dynamic laser stimulation on 14nm devices. By avoiding a requirement for ultra-thin substrates, it preserves the integrity and functionality of the device under test to provide a reliable and practical production solution. Optimized for use in the lab, with easy mobility and ATE docking, the Meridian V System is able to diagnose wide-ranging failure modes, including parametric failures and those resulting from design-process marginalities.

Available for: Semiconductors Research

Meridian M

Meridian M system system uses high sensitivity broadband DBX photon emission and Static Laser Stimulation techniques to pinpoint the location of electrical faults. Given results from wafer sort / chip probe, the Meridian M system delivers localization suitable for nanoprobing or imaging techniques such as SEM or TEM. 

Available for: Semiconductors Research