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Remarkably high resolution for challenging nanoscale applications
The Thermo Scientific Verios 5 XHR SEM delivers high contrast on sensitive materials, with excellent performance down to 20 eV landing energy thanks to high-sensitivity, in-column, and below-the-lens detectors.
With a next-generation UC+ monochromated electron source, the Verios 5 XHR SEM gives you remarkably high resolution for sub-nanometer performance from 1 keV up to 30 keV acceleration voltage, thanks to its well-known, high-stability Elstar electron column.
Additionally, signal filtering options allow for low-dose imaging and optimal contrast selection.
Mesoporous silica imaged with through-lens (TLD) detector, at 500 V.
Graphene imaged at 50 V with the mirror detector (MD).
Gallium arsenide nanowires imaged, respectively, with the retractable backscattered detector (on the left) and the through-lens (TLD) detector, at 2 keV. Both images show a clear surface nano roughness.
Automated nanoscale information with SmartAlign and FLASH technologies
The Verios 5 XHR SEM delivers reduced time-to-nanoscale information for any user with some experience using the Elstar electron column featuring SmartAlign and FLASH technologies.
In fact, this system is ideally suited to lab-based metrology applications and can calibrate to a NIST-certified standard at high magnification.
SmartAlign minimizes the need for user alignments of the column by automating them, thus increasing labs productivity. FLASH provides an alignment sequence of focusing, lens centering, and stigmation that provides the operator with the best imaging conditions with minimal effort. Furthermore, the Verios 5 XHR SEM can be operated completely unattended, with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface (API).
Complete and advanced triple detectors with SE and BSE imaging capability
Equipped with immersion mode and a unique triple detection system integrated within the column, the Verios 5 XHR SEM enables simultaneous acquisition of angular- and energy-selective secondary electron (SE) and backscattered electron (BSE) images.
Additional below-the-lens detectors, combined with electron beam deceleration mode, allow for rapid and efficient signal collection, capturing even the finest surface or cross-sectional features of materials.
The system offers a comprehensive suite of detectors. Alongside the conventional Everhart-Thornley detector (ETD) and the retractable below-the-lens detector (DBS), the Verios 5 SEM includes a through-lens detector (TLD) that collects both SE and BSE signals. It is further equipped with two detectors specifically optimized for BSE imaging: the in-lens mirror detector (MD) and the in-column detector (ICD). Positioned progressively higher in the column, these detectors enhance atomic number contrast (Z-contrast), making them ideal for differentiating between materials in complex samples.
Nanowires imaged with mirror-detector (MD) and through-lens detector (TLD). The combination of these versatile detectors allows to extract various information such as the presence of the gold precursors, highlighted in the left image, or the presence of a nanometer-sized coating around the nanowire, highlighted in the right image.
Set of TLD, MD and ICD images acquired on a palladium nanoparticles loaded ceria catalyst. This dataset shows the versatility of the triple detection as the images bring completely different information: i.e. from the left, TLD image provides the morphology of the ceria support, in the middle the MD image shows both support’s morphology and compositional contrast from the particles, while the ICD image shows pure Z contrast.
TLD SE and TLD BSE images from CuCeNb particles. Being a photomultiplier-tube based detector, the TLD detector is capable of detecting SEs or BSEs. The electrical potential of the mirror electrode and the suction tube can be adjusted to alter the detection characteristic of the TLD, providing extremely different information for a more complete characterization of the materials of interest.
Additionally, the system can be configured with an 11-segment STEM detector (STEM3+), enabling high-resolution transmission imaging and advanced angular contrast analysis for thin samples.
Set of bright field (BF), dark field (DF1, DF3) and high angle annular dark field (HAADF) images acquired at 30 keV, in STEM mode, from a cross section of a silver-kesterite solar cell. Sample courtesy of ICFO - Institut de Ciencies Fotoniques.
A scanning electron microscope built for your greatest challenges
Towards the higher end of scientific analysis and exploration, we understand the need to support data gathering through a variety of research methods and techniques. The Verios 5 XHR SEM was created to solve this challenge by accelerating your scientific discoveries through powerful data analysis solutions—with minimal effort and intervention.
Verios 5 XHR SEM technical specifications
For Research Use Only. Not for use in diagnostic procedures.