3D Reconstruction

With the Thermo Scientific™ 3D Roughness Reconstruction application, the Thermo Scientific™ Phenom™ Desktop SEM systems are able to generate three-dimensional images and submicrometer roughness measurements.

3D imaging helps to interpret sample characteristics and makes images understandable for a larger group of users. It is often difficult to identify e.g. dents, scratches, and burrs from flat 2D images. Measuring the average roughness (Ra) and the roughness height (Rz) is critical for controlling and understanding production processes. By using SEM imaging for data collection, a much better resolution can be achieved than by using traditional (indirect) methods.

Key Benefits​

• Intuitive user interface, maximum employability
• Intuitive fully automated user interface
• Based on 'shape from shading' technology, no stage tilt required
• Fast reconstruction