3D imaging helps to interpret sample characteristics and makes images understandable for a larger group of users. It is often difficult to identify e.g. dents, scratches, and burrs from flat 2D images. Measuring the average roughness (Ra) and the roughness height (Rz) is critical for controlling and understanding production processes. By using SEM imaging for data collection, a much better resolution can be achieved than by using traditional (indirect) methods.