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flexProber System for Semiconductors
The Thermo Scientific™ flexProber™ is our newest SEM-based nanoprobing platform, providing electrical characterization and fault isolation capabilities for process development, device design debug, and failure analysis. flexProber’s Thermo Scientific™ SteadFast™ nano-manipulators, along with the Thermo Scientific™ LEEN™ high-resolution scanning electron microscope column and advanced control software, allow for precise, repeatable, and stable probe placement on critical level features.
Platform stability: Fast, repeatable probe motion control and low drift rates for stable electrical measurements.
Integrated system operation: Guided workflows and software control of measurements and SEM setup for efficient operation.
SEM column designed for nanoprobing: High resolution at low landing energies with a large field of view (FOV).
EM Services for Semiconductors
Whether you are based in San Jose or Shanghai, our strategically located spare part warehouses allow field service engineers to immediately access the parts needed to keep your system running optimally