Thermo Scientific™

Helios G4 CX DualBeam for Semiconductors

Catalog number: HELIOSG4CXEL
Thermo Scientific™

Helios G4 CX DualBeam for Semiconductors

Catalog number: HELIOSG4CXEL
Subsurface or three-dimensional characterization is often required to better understand the structure and properties of a sample. The latest technological innovations of the Thermo Scientific™ Helios™ G4 CX DualBeam™ microscope, in combination with the easiest to use, most comprehensive software and Thermo Fisher Scientific's application expertise, allow the Helios G4 CX DualBeam with optional AS&V4 software for the highest-quality, fully automated acquisition of multi-modal 3D datasets. Combined with Avizo visualization software, it delivers a unique workflow solution for highest-resolution, advanced 3D characterization and analysis at nanometer scale.
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Experience the Advantages of the Helios G4 CX DualBeam

  • Fastest and easiest preparation of high-quality, site-specific TEM and APT samples using the Tomahawk ion column
  • Shortest time to nanoscale information using best-in-class Elstar™ electron column
  • The most complete sample information with sharp, refined, and charge-free contrast obtained from up to 7 integrated in-column and below-the-lens detectors.
  • The highest quality, multi-modal subsurface and 3D information with the most precise targeting of the region of interest using optional Auto Slice & View™ 4 (AS&V4) software.
  • Fast, accurate, and precise milling and deposition of complex structures with critical dimensions of less than 10 nm
  • Precise sample navigation tailored to individual application needs thanks to the high flexibility 110 mm stage and in-chamber Nav-Cam
  • Artifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan™

Featured Document

Helios G4 CX DualBeam Datasheet

Helios G4 CX is part of the fourth generation of the industry-leading Helios DualBeam™ family. It is carefully designed to meet the needs of scientists and engineers, combining the innovative Elstar electron column for ultra-high-resolution imaging and highest materials contrast with the superior Tomahawk ion column for the fastest, easiest, and most precise high-quality sample preparation and 3D characterization, even on the most challenging samples.


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Citations & References