Thermo Scientific™

Helios Hydra CX DualBeam

The Thermo Scientific™ Helios™ Hydra CX DualBeam combines the new, innovative multiple ion species PFIB column with the monochromated Thermo Scientific™ Elstar™ SEM Column to provide the most advanced focused ion- and electron-beam performance. Intuitive software and an unprecedented level of automation and ease-of-use allow observation and analysis of relevant subsurface volumes.

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Description

Key Benefits:

The Helios Hydra CX DualBeam provides:

  • Largest application space with unique ion source delivering four fast, switchable ion species: Xe, Ar, O, N.
  • Highest throughput and quality statistically relevant 3D characterization, cross sectioning and micromachining using next-generation 2.5 μA Plasma FIB column.
  • Access to high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional Auto Slice & View 4 (AS&V4) Software.
  • Highest quality Ga+ free TEM sample preparation with Xe or Ar due to the guided TEM sample preparation workflow and the PFIB’s superior performance at all operating conditions.
  • Finest details using the best-in-class Elstar Electron Column with high-current UC+ monochromator technology, enabling sub-nanometer performance at low energies.
  • Most complete sample information with sharp, refined and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors.
  • Most advanced capabilities for electron and ion beam-induced deposition and etching on DualBeam systems with optional MultiChem or GIS Gas Delivery Systems.
  • Precise sample navigation tailored to individual application needs, thanks to the high-flexibility 110 mm stage and optional in-chamber Nav-Cam Camera.
  • Artifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan and DCFI Modes.


Documents

Manuals & protocols