Thermo Scientific™

Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System

Collect angle-resolved spectra without the need to tilt the sample to nondestructively characterize ultra-thin layers using the Thermo Scientific™ Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System.

New and emerging technologies rely on the engineering of the near-surface region of a solid surface. For this type of material, including self-assembled monolayers, surface modified polymers and semiconductor devices, it is essential that the composition of the first few nanometers is known with confidence. The Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System provides this information using parallel angle resolved XPS (PARXPS) and the advanced software of the Avantage data system, which produces accurate and precise answers.
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The Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System Features:
  • Patented technology provides the unique ability to collect angle-resolved XPS spectra over a 60° angular range in parallel
  • X-ray monochromator features a user-selectable spot size in the range 15 to 400µm
  • System is able to handle large or multiple samples
  • CCD sample alignment microscope is perpendicular to the sample surface
Lens, Analyzer and Detector
  • Radian lens collects photoelectrons with an electrostatic lens having a large angular acceptance (60°)
  • Large angle maximizes sensitivity and allows a large angular range to be collected in PARXPS measurements
  • Lens axis is 50° from the sample normal, so electrons are collected 20 to 80° (relative to the sample normal)
  • The 180° spherical sector analyzer is fitted with a two-dimensional detector in the output plane
  • Two-dimensional detector provides multi-channel detection, up to 112 energy channels and up to 96 angular channels
  • Lens can be operated in two modes: conventional mode or angle-resolving
X-ray Source
  • Fitted with a micro-focusing monochromator
  • X-ray spot size ranges from 15 - 400µm
Depth Profiling
  • Digitally-controlled EX05 ion gun can be used to provide depth profiles even when using low energy ions
  • Azimuthal sample rotation available for depth profiling
Sample Handling
  • Fully motorized stage capable of five axes of movement
  • Stage can accommodate large samples—movement range in X and Y is 70 mm and 25 mm in Z (height)
Vacuum System
  • 5mm thick mu-metal analysis chamber maximizes efficiency of magnetic shielding
  • Increased effectiveness compared to shielding methods that use internal or external shields
Avantage Data System
  • Integrates all aspects of the analysis, including instrument control, data acquisition, data processing and reporting
  • Allows remote control and easy interfacing to third-party software such as Microsoft Word
  • Manages total analysis process from sample to report