Thermo Scientific™

Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System

Catalog number: IQLAADGAAFFAFLMAMC
Thermo Scientific™

Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System

Catalog number: IQLAADGAAFFAFLMAMC
Collect angle-resolved spectra without the need to tilt the sample to nondestructively characterize ultra-thin layers using the Thermo Scientific™ Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System.

New and emerging technologies rely on the engineering of the near-surface region of a solid surface. For this type of material, including self-assembled monolayers, surface modified polymers and semiconductor devices, it is essential that the composition of the first few nanometers is known with confidence. The Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System provides this information using parallel angle resolved XPS (PARXPS) and the advanced software of the Avantage data system, which produces accurate and precise answers.
 
Catalog Number
IQLAADGAAFFAFLMAMC
Unit Size
Each
Analyzer Type
180° double-focusing, hemispherical analyzer with two-dimensional PARXPS detector
X-Ray Spot Size
15 to 400 μm
X-Ray Source Type
Monochromated, Micro-focused Al K-Alpha
Price (USD)
Full specifications
Sampling Area70 x 70 mm
X-Ray Spot Size15 to 400 μm
Technique OptionsUPS, Auger
Analyzer Type180° double-focusing, hemispherical analyzer with two-dimensional PARXPS detector
X-Ray MonochromatorMicrofocusing
Depth ProfilingEX05
X-Ray Source TypeMonochromated, Micro-focused Al K-Alpha
Optional AccessoriesMAGCIS, UV lamp for UPS, field emission electron source for AES/SEM, Twin anode non-monochromated X-ray source, Platter camera
Item DescriptionTheta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System
Sample Preparation OptionsTilt and rotate sample holder, rotate sample holder, heated sample holder, cooled sample holder, additional preploc chamber, bakeable 3-gas admission manifold, fracture stage, high pressure gas cell
Thickness (Metric) Max. Sample25 mm
Unit SizeEach
Showing 1 of 1
Catalog NumberSpecificationsUnit SizeAnalyzer TypeX-Ray Spot SizeX-Ray Source TypePrice (USD)
IQLAADGAAFFAFLMAMCFull specifications
Each180° double-focusing, hemispherical analyzer with two-dimensional PARXPS detector15 to 400 μmMonochromated, Micro-focused Al K-AlphaRequest A Quote
Sampling Area70 x 70 mm
X-Ray Spot Size15 to 400 μm
Technique OptionsUPS, Auger
Analyzer Type180° double-focusing, hemispherical analyzer with two-dimensional PARXPS detector
X-Ray MonochromatorMicrofocusing
Depth ProfilingEX05
X-Ray Source TypeMonochromated, Micro-focused Al K-Alpha
Optional AccessoriesMAGCIS, UV lamp for UPS, field emission electron source for AES/SEM, Twin anode non-monochromated X-ray source, Platter camera
Item DescriptionTheta Probe Angle-Resolved X-ray Photoelectron Spectrometer (ARXPS) System
Sample Preparation OptionsTilt and rotate sample holder, rotate sample holder, heated sample holder, cooled sample holder, additional preploc chamber, bakeable 3-gas admission manifold, fracture stage, high pressure gas cell
Thickness (Metric) Max. Sample25 mm
Unit SizeEach
Showing 1 of 1
The Theta Probe Angle-Resolved X-ray Photoelectron Spectrometer System Features:
  • Patented technology provides the unique ability to collect angle-resolved XPS spectra over a 60° angular range in parallel
  • X-ray monochromator features a user-selectable spot size in the range 15 to 400µm
  • System is able to handle large or multiple samples
  • CCD sample alignment microscope is perpendicular to the sample surface
Lens, Analyzer and Detector
  • Radian lens collects photoelectrons with an electrostatic lens having a large angular acceptance (60°)
  • Large angle maximizes sensitivity and allows a large angular range to be collected in PARXPS measurements
  • Lens axis is 50° from the sample normal, so electrons are collected 20 to 80° (relative to the sample normal)
  • The 180° spherical sector analyzer is fitted with a two-dimensional detector in the output plane
  • Two-dimensional detector provides multi-channel detection, up to 112 energy channels and up to 96 angular channels
  • Lens can be operated in two modes: conventional mode or angle-resolving
X-ray Source
  • Fitted with a micro-focusing monochromator
  • X-ray spot size ranges from 15 - 400µm
Depth Profiling
  • Digitally-controlled EX05 ion gun can be used to provide depth profiles even when using low energy ions
  • Azimuthal sample rotation available for depth profiling
Sample Handling
  • Fully motorized stage capable of five axes of movement
  • Stage can accommodate large samples—movement range in X and Y is 70 mm and 25 mm in Z (height)
Vacuum System
  • 5mm thick mu-metal analysis chamber maximizes efficiency of magnetic shielding
  • Increased effectiveness compared to shielding methods that use internal or external shields
Avantage Data System
  • Integrates all aspects of the analysis, including instrument control, data acquisition, data processing and reporting
  • Allows remote control and easy interfacing to third-party software such as Microsoft Word
  • Manages total analysis process from sample to report

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Frequently asked questions (FAQs)

Citations & References