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Accuros FIB-SEM
Thermo Scientific™

Accuros FIB-SEM

Optimize HDD manufacturing with Accuros FIB-SEM with high-throughput, automated cross-section SEM metrology designed for HAMR process control and fab integration.
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Catalog number ACCUROS-FIB-SEM
Price (BRL)
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Precise cross-sectional SEM metrology is essential for process development and manufacturing in the hard disk drive (HDD) industry, especially with the emergence of heat-assisted magnetic recording (HAMR). The Thermo Scientific Accuros FIB-SEM provides fast, fully automated, and precise metrology directly in the fab to support high-volume production readiness. With in-line wafer processing, fab host connectivity, and tool matching, the Accuros FIB-SEM is designed for seamless integration into HDD production environments.

Key features

  • Precise cut placement with closed loop feedback using Osprey FIB and Elstar UC+ SEM with accurate SEM metrology.
  • New automation software available for wafer navigation, cross-sectional SEM metrology, and slice and view.
  • Thermo Scientific MultiChem™ Gas Delivery System provides advanced capabilities for electron and ion beaminduced deposition.
  • Standard dual-load port EFEM allows automated handling of 150 mm and 200 mm HDD wafers.
  • New high-precision, low-maintenance stage with X, Y, Z, R, T movement.
  • Optional OCR for reading wafer ID.
  • Tool readiness automated alignments.
  • Optical microscope with bright-field and dark-field modes for navigation.
Specifications
Resolution1.0 nm @ 15 kV
TypePFIB Wafer DualBeam
Unit SizeEach