Employed as a Chemical Vapor Deposition (CVD) precursor to germanium oxide thin films.
This Thermo Scientific Chemicals brand product was originally part of the Alfa Aesar product portfolio. Some documentation and label information may refer to the legacy brand. The original Alfa Aesar product / item code or SKU reference has not changed as a part of the brand transition to Thermo Scientific Chemicals.
Aplicaciones
se usa como precursor de la deposición química de vapor (CVD) de las películas delgadas de óxido de germanio.
Solubilidad
no miscible o difícil de mezclar en agua.
Notas
almacénese lejos de los agentes oxidantes. Mantenga el recipiente bien sellado y guárdelo en un lugar fresco y seco con buena ventilación.
RUO – Research Use Only
General References:
- M Gazicki.; R Ledzion.; R Mazurczyk.; S Pawłowski. Deposition and properties of germanium/carbon films deposited from tetramethylgermanium in a parallel plate RF discharge.Thin Solid Films.,1998,322(1-2), 123-131.
- Tetsuya Hattori.; Shigeru Semura and Nobuhiro Akasaka. Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition of SiO2 and GeO2?SiO2 Films for Optical Waveguides Using Tetraethylorthosilicate and Tetramethylgermanium.The Japan Society of Applied Physics.,1999,38(5A).