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The Thermo Scientific™ μPolisher system is a unique solution for in situ, very low energy, local surface modification, including polishing and cleaning of bulk samples. The system uses static beam of gaseous Ar+ ions with adjustable energies and a wide range of ion currents to ensure gentle surface polishing on a large variety of applications.
Key Benefits
- Unique solution with potential to enable large number of novel, unexplored applications
- Very low energy milling with a static ion beam (20 - 500eV) for the most gentle surface polishing
- In situ SEM/DualBeam solution, allowing for experimentation after cleaning without the need to break the vacuum
- Small spot size for precise local surface treatment without re-deposition
- Wide range of operating conditions, for large variety of applications
- Fully integrated in the microscope user interface, providing easy and intuitive operation
Potential applications
- Low damage milling
- Removal of oxidation layer
- Cleaning of surface from hydrocarbons
- Removal of Ga contamination
- Reduction of damage layer after FIB processing
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