Shop All DualBeam FIB-SEM Microscopes

Helios G4 UC DualBeam for Semiconductors Thermo Scientific™

Scientists and engineers constantly face new challenges that require highly localized characterization of increasingly complex samples with ever smaller features. The latest technological innovations of the Thermo Scientific™ Helios™ G4 UC DualBeam™ microscope, in combination with the easiest to use, most comprehensive software and Thermo Fisher Scientific’s application expertise, allow for the fastest and easiest preparation of HR-S/TEM samples for a wide range of materials.

Helios™ NanoLab™ 1200AT DualBeam™ for Semiconductors Thermo Scientific™

Thermo Scientific™ Helios™ NanoLab 1200AT DualBeam™ can create site-specific transmission electron microscope (TEM) samples thin enough to capture a single transistor at the 10nm node, from wafers up to 300mm in diameter. An optional Automated FOUP Loader (AFL) allows the system to be located inside the semiconductor wafer fab, where it can deliver critical information up to three times faster than laboratory-based analysis.

Aquilos™ Cryo-FIB for Life Sciences Thermo Scientific™

The Thermo Scientific™ Aquilos™ Cryo-FIB is the first cryo-DualBeam™ (focused ion beam/scanning electron microscope) system dedicated to preparation of frozen, thin lamella samples from biological specimens for high-resolution tomographic imaging in a cryo-transmission electron microscope (cryo-TEM). Cryo-electron tomography’s ability to visualize structures in their native context allows researchers to observe functional relationships and interactions with other components in the cellular environment. This technique promises to become an important tool for scientists seeking a better understanding of living systems at the molecular level.

Helios 5 CX DualBeam for Materials Science Thermo Scientific™

The Thermo Scientific™ Helios™ 5 CX DualBeam is part of the fifth generation of the industry-leading Helios DualBeam family. It is carefully designed to meet the needs of scientists and engineers, combining the innovative Elstar™ electron column for ultra high-resolution imaging and the highest materials contrast with the superior Thermo Scientific™ Tomahawk HT Focused Ion Beam (FIB) Column for the fastest, easiest and most precise high-quality sample preparation. In addition to the most advanced electron and ion optics, the Helios 5 CX DualBeam incorporates a suite of state of-the-art technologies that enables simple and consistent high resolution S/TEM and Atom Probe Tomography (APT) sample preparation, as well as the highest-quality subsurface and 3D characterization, even on the most challenging samples.

Helios G4 UX DualBeam for Semiconductors Thermo Scientific™

The latest technological innovations of the Thermo Scientific™ Helios™ G4 DualBeam™, in combination with the easiest to use, most comprehensive software and Thermo Fisher Scientific's application expertise, allow for the fastest and easiest preparation of site-specific, ultra-thin HR-S/TEM samples for a wide range of materials. In order to achieve the highest quality results, final polishing with very low energy ions is required to minimize surface damage on the sample. Thermo Scientific's most advanced Phoenix Focused Ion Beam (FIB) column not only delivers high-resolution imaging and milling at high voltages, but it now extends unmatched FIB performance down to accelerating voltages as low as 500V, enabling the creation of ultra-thin TEM lamella with sub-nm damage layers.

Helios Hydra CX DualBeam Thermo Scientific™

The Thermo Scientific™ Helios™ Hydra CX DualBeam combines the new, innovative multiple ion species PFIB column with the monochromated Thermo Scientific™ Elstar™ SEM Column to provide the most advanced focused ion- and electron-beam performance. Intuitive software and an unprecedented level of automation and ease-of-use allow observation and analysis of relevant subsurface volumes.

Helios 5 UC DualBeam for Materials Science Thermo Scientific™

The Thermo Scientific™ Helios™ 5 UC DualBeam is part of the fifth generation of the industry-leading Helios DualBeam family. It is carefully designed to meet the needs of scientists and engineers, combining the innovative Elstar™ electron column with high-current UC+ technology for extreme high-resolution imaging and the highest materials contrast with the superior Thermo Scientific Tomahawk HT Focused Ion Beam (FIB) Column for the fastest, easiest and most precise high-quality sample preparation. In addition to the most advanced electron and ion optics, the Helios 5 UC DualBeam incorporates a suite of state of-the-art technologies that enables simple and consistent high resolution S/TEM and Atom Probe Tomography (APT) sample preparation, as well as the highest-quality subsurface and 3D characterization, even on the most challenging samples.

Scios™ DualBeam for Life Sciences Thermo Scientific™

With its unique, flexible detection scheme, the Thermo Scientific™ Scios™ DualBeam™ offers simultaneous detection of all information with excellent contrast at high acquisition speeds and high resolution at low kV. This makes it ideal for imaging a wide range of samples, including very sensitive materials. Fully automated column alignments limit the need for highly trained operators, while predefined use cases for common conditions give instant productivity to everyone, which is especially relevant to multi-user facilities.

Aquilos 2 Cryo-FIB

Find additional information here: Thermo Scientific™ Aquilos™ 2 Cryo-FIB




The Thermo Scientific™ Aquilos™ 2 Cryo-FIB is the latest generation of our cryo-DualBeam system. It is dedicated to the preparation of thin, electron-transparent lamellas for high-resolution cryo-electron tomography or MicroED of micro-crystals.

Helios™ G4 FX DualBeam™ for Semiconductors Thermo Scientific™

The Thermo Scientific™ Helios™ G4 FX DualBeam™ microscope is Thermo Fisher Scientific's most advanced failure analysis DualBeam platform, capable of creating high-quality, ultra-thin TEM lamellae for 7nm process development and ramp. Containing the all-new, high-performance Phoenix focused ion beam (FIB) column, the Helios G4 FX DualBeam allows operators to quickly and efficiently create ultra-thin lamellae with minimal damage and maximum cut fidelity. Combining the highest-resolution Elstar+UC scanning electron microscope (SEM) column and the EasyLift Nanomanipulator, the Helios G4 FX DualBeam makes endpointing and in-situ sample lift-out easier than ever. Thermo Scientific's unique MultiChem Gas Delivery System provides optimized beam-assisted deposition and etching capabilities. In addition to simplifying the process for advanced failure analysis and TEM sample preparation, EasyLift and MultiChem improve operator confidence and consistency, reducing overall system Cost of Ownership. The Helios G4 FX DualBeam is also the first DualBeam system to include sub 3Å-resolution STEM imaging, providing advanced Pathfinding Labs with much shorter turnaround times to high quality data. The ability to quickly produce high-quality, actionable 30kV STEM images within the DualBeam provides a clear advantage to FA labs and process developers.

Scios™ 2 DualBeam™ for Materials Science Thermo Scientific™

The Thermo Scientific™ Scios™ 2 DualBeam™ is an ultra-high-resolution analytical FIB-SEM system that provides outstanding sample preparation and 3D characterization performance for the widest range of samples, including magnetic and non-conductive materials. With innovative features designed to increase throughput, precision, and ease of use, the Scios 2 DualBeam is an ideal solution to meet the needs of scientists and engineers in advanced research and analysis across academic, government, and industrial research environments.

Helios™ G4 PFIB HXe DualBeam™ for Semiconductors Thermo Scientific™

The Thermo Scientific™ Helios™ G4 PFIB HXe DualBeam System provides unique capabilities to enable damage-free delayering of 10nm semiconductor devices and advanced failure analysis of 3D packages, in addition to a wide range of other large area FIB processing applications.

Helios Hydra UX DualBeam Thermo Scientific™

The Thermo Scientific™ Helios™ Hydra UX DualBeam combines the new, innovative multiple ion species PFIB column with the monochromated Thermo Scientific™ Elstar™ SEM Column to provide the most advanced focused ion- and electron-beam performance. Intuitive software and an unprecedented level of automation and ease-of-use allow observation and analysis of relevant subsurface volumes.

Helios G4 CX DualBeam for Semiconductors Thermo Scientific™

Subsurface or three-dimensional characterization is often required to better understand the structure and properties of a sample. The latest technological innovations of the Thermo Scientific™ Helios™ G4 CX DualBeam™ microscope, in combination with the easiest to use, most comprehensive software and Thermo Fisher Scientific's application expertise, allow the Helios G4 CX DualBeam with optional AS&V4 software for the highest-quality, fully automated acquisition of multi-modal 3D datasets. Combined with Avizo visualization software, it delivers a unique workflow solution for highest-resolution, advanced 3D characterization and analysis at nanometer scale.

Helios™ G4 HX DualBeam™ for Semiconductors Thermo Scientific™

The Thermo Scientific™ Helios™ G4 HX DualBeam™ microscope replaces the highly successful Helios 460HP as the industry’s highest throughput, dedicated transmission electron microscope (TEM) lamella preparation platform. The Helios G4 HX DualBeam utilizes a patented inverted TEM sample preparation method to create high-quality lamellas for the most advanced semiconductor nodes. Integrating EasyLift EX Nanomanipulator, new Automated QuickFlip shuttle, and iFast automation software platform, the Helios G4 HX DualBeam provides unmatched value to Failure Analysis labs by means of a fully integrated, automated solution. Improved materials contrast enabled by low-loss in-lens detectors, along with extreme high-resolution SEM imaging at low-kV, ensures accurate endpointing, which results in increased yield during final thinning of the TEM sample.
Results per page
    spinner