Shop All Electron Microscopes

MAPS Thermo Scientific™

Maps is a modular software application for automated acquisition of high resolution images from large areas, that converts your instrument into a high throughput image data production device.

Themis™ S S/TEM for Semiconductors Thermo Scientific™

The Thermo Scientific™ Themis™ S S/TEM is an 80–200kV scanning / transmission electron microscope (S/TEM) designed for high-speed imaging and analysis of semiconductor devices. As the latest member of the industry-standard Themis family, the Themis S TEM inherits a unique combination of the best spatial resolution and the most efficient chemical analysis.

Talos™ F200S TEM for Materials Science Thermo Scientific™

The Thermo Scientific™ Talos™ F200S scanning/transmission electron microscope(S/TEM) combines outstanding high-resolution S/TEM and TEM imaging with industry-leading energy dispersive x-ray spectroscopy (EDS). The Talos F200S S/TEM features the greatest versatility and the highest throughput in STEM imaging. It allows for the most precise EDS analysis and the best HRTEM for dynamic microscopy. The Talos F200S S/TEM does all this while also providing the highest stability and longest uptime.

Selectris and Selectris X Imaging Filters Thermo Scientific™

The Thermo Scientific™ Selectris and Selectris X Imaging Filters are post-column imaging filters that improve the contrast of TEM images, resulting in high-resolution structures up to atomic resolution. The zero-loss filtering of the Selectris Filters removes noise caused by inelastically scattered electrons, producing an increased signal-to-noise ratio (SNR) and better contrast. Designed for high stability, the zero-loss peak position of the Selectris Filters is insensitive to temperature variations in the environment, eliminating the need for frequent tuning.

Paired with the latest generation Thermo Scientific Falcon 4 Direct Electron Detector, Selectris Filters enable you to obtain high-resolution structures quickly, revealing new biological insights. To further increase the productivity and ease-of-use of your cryo-electron microscopy (cryo-EM) workflows for single particle analysis and cryo-electron tomography, these filters are fully integrated into Thermo Scientific EPU Software, Thermo Scientific Tomography Software, and our instrument operation software.

The Selectris and Selectris X Imaging Filters are available on Thermo Scientific Krios and Glacios Cryo-TEMs.

Krios G4 Cryo-TEM for Life Sciences

Find additional information here: Thermo Scientific™ Krios™ G4 Cryo Transmission Electron Microscope (Cryo-TEM)



The new Thermo Scientific™ Krios™ G4 Cryo Transmission Electron Microscope (Cryo-TEM) enables you to unravel life at the molecular level—easier, faster and more reliably than ever before. The most compact TEM in its class, the Krios G4 Cryo-TEM consists of a highly stable 300 kV TEM platform and the industry-leading Autoloader (cryogenic sample manipulation robot), making it ideally suited for automated applications such as single particle analysis (SPA), cryo-electron tomography (cryoET) and micro electron diffraction (MicroED). Through a thorough redesign of the mechanical base frame and system enclosure, the microscope height has been reduced to below 3 meters, which allows for instrument installation in labs with a ceiling height below 3.04m (~10 ft), thereby avoiding costly room renovations. Designed-in connectivity ensures a robust and risk-free pathway throughout the entire workflow, from sample preparation and optimization to image acquisition and data processing.

Helios™ G4 HX DualBeam™ for Semiconductors Thermo Scientific™

The Thermo Scientific™ Helios™ G4 HX DualBeam™ microscope replaces the highly successful Helios 460HP as the industry’s highest throughput, dedicated transmission electron microscope (TEM) lamella preparation platform. The Helios G4 HX DualBeam utilizes a patented inverted TEM sample preparation method to create high-quality lamellas for the most advanced semiconductor nodes. Integrating EasyLift EX Nanomanipulator, new Automated QuickFlip shuttle, and iFast automation software platform, the Helios G4 HX DualBeam provides unmatched value to Failure Analysis labs by means of a fully integrated, automated solution. Improved materials contrast enabled by low-loss in-lens detectors, along with extreme high-resolution SEM imaging at low-kV, ensures accurate endpointing, which results in increased yield during final thinning of the TEM sample.

V400ACE™ Focused Ion Beam for Semiconductors Thermo Scientific™

The Thermo Scientific™ V400ACE™ Focused Ion Beam (FIB) system is specifically designed to meet the challenges of advanced designs and processes: smaller geometries, higher circuit densities, exotic materials, and complex interconnect structures. The V400ACE FIB can be configured for backside editing with an optional IR microscope and bulk silicon trenching package. Thermo Scientific™ Tomahawk™ Ion Column delivers unrivalled capability and flexibility with seamless operation from 30 kV to 2 kV. High current density milling at 30 kV ensures rapid material removal and increased throughput, while low-kV operation is useful for selective etching of copper. FIB circuit editing tools use controlled amounts of specific gases, injected near the beam at the sample surface, to enhance the speed and selectivity of the milling process and to deposit conductive and insulating materials in precisely controlled patterns.

Apreo™ 2 SEM for Materials Science Thermo Scientific™

The new Thermo Scientific™ Apreo™ 2 SEM expands access to high-performance imaging and analytics to all levels of microscopy expertise. With Thermo Scientific™ ColorSEM Technology, a unique live elemental imaging capability, compositional information is always available, through the most intuitive interface. Eliminating all the hassle associated with typical EDS implementations, ColorSEM Technology offers unprecedented time to result and ease of use.

Talos™ Arctica™ TEM for Life Sciences Thermo Scientific™

Find additional information here: Thermo Scientific™ Talos™ Arctica™ is a 200kV FEG transmission and scanning electron microscope (S/TEM)



The Thermo Scientific™ Talos™ Arctica™ is a 200kV FEG transmission and scanning electron microscope (S/TEM). It is a powerful, stable, and versatile system for delivering high-resolution 3D characterization of biological and biomaterials samples in cell biology, structural biology, and nanotechnology research. The Talos S/TEM enables scientists to quickly obtain better insight and understanding of macromolecular structures, cellular components, cells, and tissues in three dimensions.

Helios G4 CX DualBeam for Semiconductors Thermo Scientific™

Subsurface or three-dimensional characterization is often required to better understand the structure and properties of a sample. The latest technological innovations of the Thermo Scientific™ Helios™ G4 CX DualBeam™ microscope, in combination with the easiest to use, most comprehensive software and Thermo Fisher Scientific's application expertise, allow the Helios G4 CX DualBeam with optional AS&V4 software for the highest-quality, fully automated acquisition of multi-modal 3D datasets. Combined with Avizo visualization software, it delivers a unique workflow solution for highest-resolution, advanced 3D characterization and analysis at nanometer scale.

flexProber System for Semiconductors Thermo Scientific™

The Thermo Scientific™ flexProber™ is our newest SEM-based nanoprobing platform, providing electrical characterization and fault isolation capabilities for process development, device design debug, and failure analysis. flexProber’s Thermo Scientific™ SteadFast™ nano-manipulators, along with the Thermo Scientific™ LEEN™ high-resolution scanning electron microscope column and advanced control software, allow for precise, repeatable, and stable probe placement on critical level features.

Talos™ F200X TEM for Materials Science Thermo Scientific™

The Thermo Scientific™ Talos™ F200X scanning/transmission electron microscope (S/TEM) combines outstanding high-resolution S/TEM and TEM imaging with industry-leading energy dispersive x-ray spectroscopy (EDS) signal detection and 3D chemical characterization with compositional mapping. The Talos F200X S/TEM allows for the fastest and most precise EDS analysis in all dimensions (1D-4D), along with the best HRTEM imaging with fast navigation for dynamic microscopy. The Talos F200X S/TEM does all this while also providing the highest stability and longest uptime.

Prisma™ E SEM for Materials Science Thermo Scientific™

The most complete SEM for multi-user laboratories requiring all-around performance and ease-of-use. The Thermo Scientific™ Prisma™ E SEM is the first SEM with unique ColorSEM™ technology for the most intuitive elemental analysis. Combined with a unique environmental mode (ESEM) and a full range of accessories it is the most complete tungsten SEM available. It is ideal for industrial R&D, quality control, and failure analysis applications that require high resolution, sample flexibility, and an easy-to-use operator interface. Prisma E succeeds the highly successful Thermo Scientific™ Quanta™ SEM.

Meridian™ WS-DP System for Semiconductors Thermo Scientific™

With time-to-yield being critical to profitability, it is too costly for advanced foundries, integrated device manufacturers and fabless companies to wait until after dicing and packaging to identify the source of electrical faults. The Thermo Scientific™ Meridian™ WS-DP system enables faster defect localization by using production testers, load boards, and probe cards. All diagnostic options from the Meridian product line are available for the Meridian WS-DP, including: LVx, emission, LADA, and OBIRCH.

Elemental Mapping Thermo Scientific™

The Thermo Scientific™ Elemental Mapping Software is an option within the EID software package (that comes default with the Thermo Scientific™ Phenom™ EDX solution). Elemental mapping reveals the distribution of elements within the sample. Here the previously selected elements for the spot analysis can be mapped at a user-specified pixel resolution and acquisition time. The real-time mapping algorithm shows the live build-up of the selected element maps while storing spectra of each pixel. This allows elements to be added or removed at any time during or after the mapping process.
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