Advanced logic and memory manufacturing processes are becoming more reliant on fast turnaround of precise structural and analytical data to be able to quickly calibrate tool sets, diagnose yield excursions, and optimize process yields. At technology nodes below 28nm, especially in cases where non-planar device designs are being implemented, conventional SEM or optical-based analysis and inspection tools cannot provide useful data. The Thermo Scientific™ Metrios™ transmission electron microscope (TEM) is the first TEM dedicated to providing the fast, precise measurements that semiconductor manufacturers need to develop and control their wafer fabrication processes.
The Thermo Scientific™ Velox™ user interface with its integrated design combines the comprehensive access to the microscope optics and detectors to provide superior experimental control for the highest reproducibility, yield and best support for quantitative S/TEM studies in material science. The Thermo Scientific Velox software includes a unique software package for XEDS applications in combination with SuperX and DualX detector systems. A robust mapping engine combines multiple techniques optimized for transmission electron microscopy. On the fly drift correction, recursive mapping, indpendent channel readout, unique absorption correction with holder compensation: these techniques ensure that best in class EDS spectrum images can be acquired with the highest yield.
The Thermo Scientific™ μHeater holder is a high vacuum compatible ultra-fast heating stage for in situ sample heating up to 1200 °C.
The Thermo Scientifc™ Phenom™ Desktop SEM with Thermo Scientific™ PoroMetric™ software allows easy generation and analysis of SEM images. The integrated PoroMetric software allows the user to gather data on distribution of pores, and pore parameters like pore size and aspect ratio.
The Thermo Scientific™ Phenom™ Pharos is a desktop SEM with an FEG source that makes crisp, high-brightness images and the benefits of an FEG source accessible to everyone. It is also easy to operate, from the initial installation to the actual usage, thanks to its intuitive and compact design.
The advanced hardware design and detectors enable a fast time to image and easy, foolproof handling.
The Verios 5 XHR SEM offers subnanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level.
The latest technological innovations of the Thermo Scientific™ Helios™ G4 DualBeam™, in combination with the easiest to use, most comprehensive software and Thermo Fisher Scientific's application expertise, allow for the fastest and easiest preparation of site-specific, ultra-thin HR-S/TEM samples for a wide range of materials. In order to achieve the highest quality results, final polishing with very low energy ions is required to minimize surface damage on the sample. Thermo Scientific's most advanced Phoenix Focused Ion Beam (FIB) column not only delivers high-resolution imaging and milling at high voltages, but it now extends unmatched FIB performance down to accelerating voltages as low as 500V, enabling the creation of ultra-thin TEM lamella with sub-nm damage layers.
The Thermo Scientific™ Centrios™ Advanced Circuit Edit System enables rapid prototyping and first silicon debug and repair for 14 nm and above design rule devices. It enables advanced front and backside edits with unparalleled editing control and precision. Using an innovative simultaneous dual nozzle gas delivery system, with the broadest portfolio of chemistries and the latest FIB technology, the Centrios System offers fast, efficient, and cost-effective editing on advanced integrated circuits for reduced time to market.
Fastest high-quality sub-surface and 3D characterization at millimeter scale with nanometers resolution. The Thermo Scientific™ Helios™ 5 Laser PFIB delivers unmatched capabilities for extreme large-volume 3D analysis, Ga-free sample preparation, and precise micromachining. Featuring an innovative, fully integrated femtosecond laser, it offers the fastest material removal rate with the highest cut face quality.
The sixth-generation of Thermo Scientific™ Phenom™ Pro G6 Desktop SEM fills the gap between light microscopy and floor-model SEM analysis, thus expanding the capabilities of research facilities. Fast and easy to use, the Phenom Pro G6 Desktop SEM can be used to relieve the burden of routine analysis for common samples from floor-model SEM instruments. Instrument configuration and the sample loading mechanism ensure quick imaging with minimal time spent tuning between experiments.
Find additional information here: Thermo Scientific™ Falcon™ 4 Direct Electron Detector
The Thermo Scientific™ Falcon™ 4 Direct Electron Detector is the ideal solution for your single particle analysis and cryo electron tomography needs. By combining a 10x shorter exposure time (as compared to the Falcon 3 Detector) with an improved detector quantum efficiency (DQE) over the entire spatial frequency range, the Falcon 4 Detector has a significantly increased internal framerate (250 fps), allowing you to collect the best quality images with the highest throughput possible. In fact, the unsurpassed DQE at low frequencies makes it ideally suited for small or difficult to detect proteins.
The best possible low-kV SEM resolution and materials contrast. The Thermo Scientific™ Verios G4 scanning electron microscope (SEM) is geared toward increasing publishable results from your lab. The Verios SEM enables new insights by extending sub-nanometer resolution over the full 1 keV to 30 keV energy range to novel materials, such as catalyst particles, nanotubes, porosities, interfaces, biological objects, and other nanoscale structures. High-resolution, high-contrast images are obtained without the need to transition to TEM or other imaging techniques. The Verios SEM offers the flexibility required for research applications to accommodate large specimens like full wafers or metallurgical samples. You can perform fast analysis thanks to its high current mode or work on precise prototyping applications such as electron beam-induced direct deposition of materials or lithography.
The Thermo Scientific™ Talos L120C TEM is a 20-120 kV thermionic (scanning) transmission electron microscope uniquely designed for performance and productivity across a wide range of samples and applications, such as 2D and 3D imaging of cells, cell organelles, asbestos, polymers, and soft materials, both at ambient and cryogenic temperatures. The Talos L120C TEM is designed from the ground up to allow users at any skill level to acquire high-quality results with minimal effort. Fast, sophisticated automation and advanced 3D imaging workflows allow applied researchers to focus on scientific questions rather than microscope operation.
The Thermo Scientific Velox user interface with its integrated design combines the comprehensive access to the microscope optics and detectors to provide superior experimental control for the highest reproducibility, yield and best support for quantitative S/TEM studies in material science. The Thermo Scientific Velox software includes a unique software package for XEDS applications in combination with SuperX and DualX detector systems. A robust mapping engine combines multiple techniques optimized for transmission electron microscopy. On the fly drift correction, recursive mapping, indpendent channel readout, unique absorption correction with holder compensation: these techniques ensure that best in class EDS spectrum images can be acquired with the highest yield.
Thermo Scientific™ Helios™ G4 PFIB delivers unmatched capabilities for large volume 3D characterization, Ga+free sample preparation and precise micromachining. Helios G4 PFIB UXe is part of the fourth generation of the industry-leading Helios DualBeam family. It combines the new PFIB 2.0 column and the Thermo Scientific™ Monochromated Elstar™ SEM column to deliver the most advanced focused ion- and electron beam performance. Intuitive software and an unprecedented level of automation and ease-of-use provide observation and analysis of relevant subsurface volumes by scientists and engineers.