Simplify EBSD workflows with the TruePix EBSD Detector

The Thermo Scientific TruePix EBSD Detector enables integration with SEM and EDS, delivering streamlined analysis for crystal structure characterization. As a one-vendor solution for SEM analytics, the TruePix Detector simplifies complex workflows, reduces the learning curve, and makes this advanced analytical technique accessible to users of all experience levels, from seasoned professionals to first-time operators.

 

The optimized chamber view with an overlay of the final detector position eliminates several layers of complexity and helps prevent unnecessary collisions that could slow down data collection.

SEM chamber view of the sample and TruePix EBSD detector position

An optional dedicated sample holder further enhances both speed and quality of the results. Three pre-tilted (70°) positions allow multiple samples to be mounted directly in their final orientation, facing the inserted detector, for increased throughput.

 

When using the standard multipurpose sample holder, dedicated routines integrated into the microscope’s user interface help you precisely position samples. These routines maximize the integration between imaging and EBSD characterization while also simplifying setup, especially for novice users. These routines are directly linked to the implementation of comprehensive collision models, providing an added layer of safety and peace of mind during operation.

Dedicated sample holder with multiple pre-tilted positions to boost productivity

How does the TruePix EBSD Detector work for advanced material analysis?

The TruePix Detector addresses the detailed needs of materials characterization. It helps researchers understand the phase composition, texture, and structure of advanced materials while delivering faster insights and improved data correlation with SEM and EDS analyses. With the TruePix Detector, you can effortlessly obtain reliable results and access comprehensive data.

 

The TruePix Detector is based on hybrid pixelated detector technology. Unlike traditional detectors that first convert incoming electrons into photons, the TruePix Detector directly captures all the electrons. This avoids signal loss from absorption and scattering due to complex optical coupling, providing very clear Kikuchi patterns for all sample types and improving spatial resolution. 

Benefits of the TruePix Detector

High sensitivity and throughput

The TruePix Detector delivers single-electron sensitivity and over 3,000 patterns per second per nanoampere (pps/nA), enabling rapid, high-quality data acquisition at low beam currents.

Superior low-kV performance and improved spatial resolution

Optimized for low accelerating voltages, the TruePix Detector minimizes interaction volume to support high-resolution analysis of fine structures and beam-sensitive materials.

On-chip electron energy filtering

Integrated energy filtering on the detector chip reduces the contribution of low-energy electrons, enhancing pattern contrast and indexing accuracy without additional hardware.

Seamless integration

Developed alongside the SEM platform, the detector natively integrates EBSD and SEM operations, including coordinated beam control, built-in collision models, and fully interoperable user interfaces that enable easy setup and reliable results.


TruePix EBSD Detector for high-speed or beam-sensitive materials analysis

Designed to deliver high performance across a wide range of applications, the TruePix EBSD Detector combines advanced technology with user-centric features. Whether you're working with beam-sensitive materials or require high-speed data acquisition, this detector offers the flexibility and precision needed for cutting-edge materials analysis.

 

The TruePix Detector provides:

  • Exceptionally high detector sensitivity for analyzing beam-sensitive materials
    • Greater than 3,000 pps/nA at 20 keV
    • Greater than 300 pps/nA at 5 keV
  • Single electron counting for precise dose control
  • High throughput capable of more than 2,000 patterns per second without binning
  • Exceptional low-kV performance allows for analysis with a smaller interaction volume and therefore higher spatial resolution
  • Automated pattern center calibration and pattern background removal streamline the workflow
  • Comprehensive data analysis supports multiple phases, kinematic simulation, and overlay of EDS maps, providing detailed insights into your samples

TruePix EBSD Detector with xTalView Software gives you access to complete information

Thermo Scientific xTalView Software provides a wide range of information that is easily accessible through a user-friendly and intuitive interface. Designed to support you throughout the entire workflow—from parameter setting to data acquisition, pattern indexing, and map reprocessing and denoising—xTalView Software delivers an outstanding experience.

EBSD grain maps

Grain maps visualize the boundaries between grains based on orientation differences, typically highlighting areas where misorientation exceeds a set threshold. Grain maps offer insights into grain size, uniformity, distribution, and morphology, which are important for understanding mechanical properties and processing history.

Example of a grain map obtained from a nickel-based superalloy from the family of Hastelloy (landing energy 20 keV, map resolution 1,451 x 968 pixels).

EBSD grain boundaries

Example of grain boundaries less than 5° in red over a median electron count map (MEC) (landing energy 10 keV, map resolution 1,500 x 1,000 pixels).

Grain boundaries reveal how grains relate to one another. R&D scientists use this information to engineer boundary properties and develop advanced materials. EBSD is instrumental in analyzing features such as twinning, special boundaries, and grain disorientation—essential for modeling grain growth.

Inverse pole figures

Inverse pole figure (IPF X, Y, Z) maps show the crystallographic orientation of grains relative to the sample's coordinate axes—X (horizontal), Y (vertical), and Z (normal to the surface). These maps help visualize texture and grain orientation distributions, which are important for understanding anisotropy in materials.

Example of an IPF Y map of boride-coated hardened steel (landing energy 10 keV, map resolution 2,000 x 2,000 pixels).

Euler maps

Example of a Euler map from a TiAl alloy sample (landing energy 10 keV, map resolution 1,000 x 650 pixels).

Euler maps display the crystallographic orientation of each grain using a set of three Euler angles (φ1, Φ, φ2), which describe the rotation needed to align the crystal lattice with the sample coordinate system. Each combination of these angles is assigned a color, allowing visualization of orientation differences between grains. Euler maps are useful for detailed orientation analysis and for detecting sub-grain structures.

EBSD phase maps

Phase maps identify and display the different crystalline phases present in a sample by assigning each phase a unique color. These maps are generated by comparing the acquired diffraction patterns to reference patterns for known phases.

Example of phase map acquired on a cast iron cross section.

Kernel average misorientation

Example of a kernel average misorientation acquired on a deformed high entropy alloy (HEA) (landing energy 10 keV, map resolution 1,500 x 1,500 pixels).

A kernel average misorientation (KAM) map provides information about accumulated deformation, dislocations, and residual strain. The KAM shown in the picture comes from a high-entropy alloy, which is commonly used in failure analysis to study strain around a crack tip or to identify the presence and distribution of dislocations.


xTalView Software for online and offline EBSD analysis

xTalView Software guides you through the entire process, from setting up parameters to acquiring and processing data.

xTalView Software is a comprehensive software suite designed for both online and offline EBSD analysis, offering fast and reliable indexing across all crystal systems. Its robust post-processing capabilities support in-depth data interpretation, making it a valuable tool for materials characterization.

 

xTalView Software supports indexing of all seven crystal systems and 11 Laue groups, and it can simultaneously index multiple phases. It utilizes metrics such as band contrast, index quality, and hit rate to assess pattern quality, and it offers features like automatic pattern center calibration and kinematic simulation overlays. The software includes access to extensive structural databases, including Thermo Fisher Scientific's expert-validated database of 30,000 materials and the American Mineralogist Database, with the ability to import .cif files from any source.

Fully integrated with the microscope user interface, xTalView Software supports all stages of analysis, from setting up the microscope and acquisition parameters to data processing, enhancing usability and eliminating communication issues between separate software platforms. 


TruePix EBSD Detector technical specifications

TruePix EBSD Detector parameters
Size
256 x 256 pixels (55 micrometer pixel size)
Readout Zero readout noise, high signal-to-noise ratio
Distortion Zero distortion due to optical couplingor phosphor
Sensitivity
Equivalent >3,000 pps/nA on Ni
Throughput > 2,000 points/second
Spatial resolution < 20 nm
Additional specs Detector insertion in less than 20 seconds
Microscope parameters
Working distance Between 5 mm and 40 mm
Probe current Down to < 0.1 nA
Accelerating voltage 5 keV – 30 keV

For Research Use Only. Not for use in diagnostic procedures.