An efficient desktop scanning electron microscope with a large SEM stage

The Thermo Scientific Phenom XL G3 Desktop SEM offers a range of features to help you work more efficiently. From streamlined day-to-day operation to more predictable maintenance, it’s designed to help you focus on your work.


Cerium hexaboride (CeB6) crystals as thermionic electron sources for exceptional image quality

Cerium hexaboride (CeB6) crystals serve as thermionic electron sources, providing exceptional image quality with improved resolution and contrast. These durable electron sources significantly outlast traditional tungsten filaments, with a lifespan exceeding 30 times longer. Unlike tungsten filaments, CeB6 sources degrade gradually rather than experiencing sudden failures, so you can plan replacements during regular maintenance.

Mineral sample captured on a Phenom XL G3 Desktop SEM equipped with long-lasting thermionic electron source.

Analyze more samples more efficiently with the extra-large stage

This system expands your research horizons thanks to a larger stage that can accommodate samples up to 100 mm x 100 mm. In fact, it can accept large samples and multiple samples all in one fast load, helping you maintain sample integrity by eliminating the need to move your samples between different instruments. 

The Phenom XL G3 Desktop SEM enables large material sample imaging.

Built-in automation that does the heavy lifting for you

Automation is built into all Thermo Scientific SEMs, and the Phenom XL G3 Desktop SEM is no different. It automates various stages of your routine workflow, delivering accurate, reproduceable results with an average time to image of 60 seconds. It’s a proven way to streamline your operations and recoup valuable time. 

The Phenom XL G3 Desktop SEM reduces analysis time with automated imaging.

Reliable analysis of both routine and highly volatile samples

The Phenom XL G3 Desktop SEM is optimized for both routine analysis and quality control sampling. Its non-reactive environment helps you study a wide range of reactive materials, including highly volatile samples like solid-state lithium batteries and steel. 

The Phenom XL G3 Desktop SEM’s non-reactive chamber environment allows imaging of various reactive materials like pharmaceutical powders.

Built for your biggest needs

We know the importance of ensuring consistent quality at an affordable price in industrial research and analysis. That’s why the Phenom XL G3 Desktop SEM was designed to provide the insights and information you need to discover failures earlier and adjust your production processes faster.

Image captured on a Phenom XL G3 Desktop SEM.

Phenom XL G3 Desktop SEM technical specifications

  Phenom XL G3 Desktop SEM

Sample size

  • Up to 100 mm x 100 mm (up to 36 x 12 mm pin stubs)
  • Up to 40 mm height (optional up to 65 mm)
Source type Cerium hexaboride (CeB6)
Max. resolution <10 nm_
Detectors and signals
  • Backscattered electron detector (standard)
  • Energy-dispersive X-ray (EDS) detector (optional)
  • Everhart-Thornley (ETD) SE detector (optional)

Software options and accessories

  • ChemiSEM Technology
  • PPI/PPA
  • ProSuite
  • Maps 3 Software
  • Avizo Software
  • Avizo Trueput Software
Footprint 93 (w) x 293 (d) x 290 (h) mm, 82 kg
Acceleration voltage range

2 kV 5 kV to 20 kV.
Advanced mode: adjustable range between 4.8 and 20.5 kV imaging and analyses mode

The low vac range is 0.1 Pa – 10 Pa  – 60 Pa

Low vacuum mode (stating pressure ranges) 0.1 Pa – 1 Pa – 60 Pa  

For Research Use Only. Not for use in diagnostic procedures.