Our highest performing scanning electron microscope with sub-nanometer resolution and high material contrast

With the Thermo Scientific Verios 5 XHR SEM, we are pushing the boundaries of what a scanning electron microscope can achieve. So, if you are working at the forefront of scientific research and discovery, this system enables you to reach exceptional levels of insight. Why not join us?

 

Primarily, this system delivers a valuable combination of sub-nanometer resolution over the full 1 keV to 30 keV energy range; coupled with high-contrast imaging and two precision piezo stages as standard for excellent stability and consistent, measurable results.

 

But it also enables you and your team to achieve this characterization faster and more productively through advanced automation. For example, our SmartAlign technology eliminates the need for any user alignments of the electron column.

 

Accessible and easy to use, the Verios 5 XHR SEM truly makes sky-high SEM performance a reality.


Verios 5 XHR SEM overview

Remarkably high resolution for challenging nanoscale applications

Achieve sub-nanometer performance and high contrast down to 20 eV landing energy with a unique triple detection system and below-the-lens detectors.

Automated efficiency for faster throughput and greater productivity

Tool maintenance and alignments are made easy with automated functionalities and settings to provide high performance for any user.

Comprehensive range of detectors for advanced materials analysis

It’s easy to achieve low-dose operation and optimal contrast selection using this system’s advanced suite of detectors.

Built for your biggest needs

Accelerating your scientific discoveries through powerful data analysis solutions, with minimal effort and intervention.

Verios 5 XHR SEM resources

Would you like to know more about the Verios 5 XHR SEM? Dive into a wealth of resources, from eBooks to datasheets.

Materials Science Learning Center

Learn more about materials characterization and analysis with our collection of application notes, videos, webinars, and other helpful resources.

For Research Use Only. Not for use in diagnostic procedures.