Helios Hydra PFIB-SEM Techniques

Plasma FIB and SEM imaging techniques enabled by the Helios Hydra PFIB-SEM

With multiple, selectable ion species to match material challenges, optimized maximum milling currents, and ultra-high-resolution analysis, the Thermo Scientific Helios Hydra PFIB-SEM (plasma focused ion beam scanning electron microscope) is truly a comprehensive sample preparation platform. Find out how each technique using multi-species plasma-FIB and powerful SEM imaging can deliver the critical insights you need for your processes and research questions.

(S)TEM sample preparation

Preparation of high-quality, thin samples for (S)TEM analysis is possible, even in sensitive materials, with Ga-free lamella preparation workflows using multi-species plasma-FIB. Thanks to advanced automation, users with any experience level can obtain expert-level results for a wide range of materials. Learn how the new Thermo Scientific AutoTEM 5 Software  for Helios 5+ PFIB-SEMs can provide trusted results and reliability.

Plasma FIB cross-sectioning

Cross sectioning provides insight by revealing sub-surface information. Helios Hydra PFIB-SEM instruments feature advanced focused ion beam columns for high-quality cross sectioning with multiple ion species. With automation, unattended high-throughput processing of samples is also possible. Leverage Extreme Milling with the Helios Hydra 5+ PFIB-SEM to supercharge maximum currents by 1.5× for remarkable and rapid processing.

3D analysis and characterization

Revealing and characterizing buried faults and the development of advanced materials often require multi-scale 3D analysis. Helios Hydra PFIB-SEMs help enable extremely efficient and precise serial sectioning of large volumes with subsequent SEM imaging at nanometer scale, which can be processed using Thermo Scientific Avizo Software into high-quality 3D reconstructions of the structures and defects of interest.

Device deprocessing

Shrinking feature size, along with advanced design and architecture, results in increasingly challenging failure analysis for semiconductors. Damage-free delayering of devices is a critical technique for the detection of buried electrical faults and failures. The Helios Hydra 5+ PFIB-SEM introduces Damage-Free Delayering using ultra-low-energy SEM inspection with marathon beam stability and process automation.

Cryo lamella preparation and volume EM

Cryo-fixation allows biological specimens to be imaged in a hydrated state, which avoids artifacts commonly associated with classic EM sample preparation. 3D volumetric data can be captured with the Helios Hydra PFIB-SEM at cryogenic temperatures to reveal the cellular complexity in near-native state.

 

For higher resolution imaging, cryo-lamellae can be generated and then lifted out for subsequent cryo-electron tomography (cryo-ET) to reveal proteins and biomolecular complexes in situ in the cell.

Spin Mill Method

Polish a wide range of materials and gain fast access to sub-surface regions hundreds of microns wide,  allowing collection of multimodal information with nanometer  resolution. A precise delayering workflow is possible with thick metal removal by Spin Mill Method, followed by layer-by-layer deprocessing with gas-assisted PFIB milling.

 

Compared to BIB polishing, the Helios Hydra PFIB-SEM performs both  milling and imaging at the same location, which reduces sample  transfer steps and provides high accuracy for locating regions of  interest on the sample. The system is equipped with multiple ion species to  match material challenges and speed up the milling process with  remarkable efficiency.

Achieve up to a 1 mm region of analytical-quality polished surface

APT sample preparation

Atom probe tomography (APT) provides atomic-resolution 3D  compositional analysis of materials. Focused ion beam (FIB)  microscopy is an essential technique for high-quality, orientation, and  site-specific sample preparation for APT characterization. The Helios  Hydra PFIB-SEM enhances preparation quality by providing Ga-free sample  preparation, preserving material structure and composition.

For Research Use Only. Not for use in diagnostic procedures.