The Verios 5 XHR SEM offers subnanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level.

Experience the advantages offered by the Verios XHR SEM:

  • High resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV.
  • High contrast on sensitive materials with excellent performance down to 20 eV landing energy and high-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.
  • Greatly reduced time to nanoscale information for users with any experience level using the best-in-class Elstar electron column featuring SmartAlign and FLASH technologies.
  • Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages.
  • Flexibility for accessories with a large chamber.
  • Unattended SEM operation with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface. 

Key Features

SmartAlign technology

SmartAlign technology eliminates the need for any user alignments of the electron column, which not only minimizes maintenance, but also increases your productivity.

Innovative electron optics

Including Thermo Scientific’s patented UC+ gun (monochromator), ConstantPower lenses and electrostatic scanning for accurate and stable imaging.

Sub-nanometer resolution

Best-in-class Elstar Schottky monochromated (UC+) FESEM technology and performance with sub-nanometer resolution from 1 to 30 keV.

Consistent measurement results

With the ability to calibrate to a NIST certified standard at high magnification.

Low dose operation and optimal contrast selection

Advanced suite of high-sensitivity, in-column & below-the-lens detectors and signal filtering for low dose operation and optimal contrast selection.

Easy access to beam landing energies

As low as 20 eV with very high resolution for true surface characterization.

Unattended SEM operation

With AutoScript 4 Software, an optional Python-based application programming interface (API).

Large chamber

With a choice of two precise and stable piezo-driven stages.


Specifications

Style Sheet for Products Table Specifications

Electron beam resolution

  • 0.6 nm at 30 kV STEM (optional)
  • 0.6 nm at 2-15 kV
  • 0.7 nm at 1 kV
  • 1.0 nm at 500 V

Standard detectors

ETD, TLD, MD, ICD, beam current measurement, Nav-Cam+, IR-camera

Optional detectors

Optional detectors | EDS, EBSD, RGB cathodoluminescence, Raman, WDS, and more

Stage bias (beam deceleration, optional)

Up to -4000 V, included as standard

Sample cleaning

Integrated plasma cleaner, included as standard

Sample manipulation

Verios 5 UC

  • 5-axis motorized eucentric stage, with XYR axes piezo driven.
  • XY range 150 x 150 mm2, 70° tilt range.
  • Loading through the door.

Verios 5 HP

  • Chamber mounted, ultra-stable 5 axis all piezo motorized stage.
  • XY range 100 x 100 mm2, 70° tilt range.
  • Loading via automated load lock.

 

Chamber

379 mm inside width, 21 ports

Software options

  • Maps for automatic large area acquisition using tiling and stitching; correlative work
  • AutoScript 4; a Python-based application programming interface
  • Pattern generation software
  • TopoMaps for image colorization, image analysis and 3D surface reconstruction
Style Sheet for Techniques (LONG VERSION) and Media Gallery Tab

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.

Applications

Fundamental Materials Research_R&D_Thumb_274x180_144DPI

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Contact us

Electron microscopy services for
the materials science

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

Learn more ›

Style Sheet for Support and Service footer
Style Sheet for Fonts
Style Sheet for Cards