Thermo Scientific AutoTEM 5 Software is a unique solution for DualBeam (focused ion beam scanning electron microscopy, FIB-SEM) systems, supporting fully automated, in situ transmission electron microscopy (TEM) sample preparation for a wide range of materials science samples. It provides fast, reliable, and repeatable results for users with any experience level.

Key Features

High quality

High quality S/TEM sample preparation for users of any experience level in less than one hour.

Complete workflow

Complete in situ S/TEM sample preparation workflow, including automated chunking, user guided lift-out and automated final thinning.

Automated in-situ sample preparation

Fully automated in-situ sample preparation using different geometries: top down, plan view and inverted.

Robust results

Robust, predictable results for a wide range of material science samples

High throughput

High throughput with fully automated, unattended multi-site in-situ and ex-situ lift out and auto cross-section capabilities.

Highly configurable workflow

Highly configurable workflow to enable preparation of challenging samples.


Specifications

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Manual preparation

AutoTEM 5 Software

Materials

Metals and alloys
(diff. mill rates, roughness)

   

Semiconductors

   

Polymers and ceramics
(charging, beam sensitive)

   

Process coverage

Chunk milling

Manual

Fully automated or interactive

Lift-out process

Manual

Final thinning

Manual

Low-energy polishing

Manual

Specifications

Throughput

60 – 120 mins

< 45 mins

High quality

User dependent

Protocol dependent

Repeatability

-  

Overnight runs

-  

User

Experience level

Expert

Beginner

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Applications

Fundamental Materials Research_R&amp;D_Thumb_274x180_144DPI

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

Process Control_Thumb_274x180_144DPI

Process Control
 

Modern industry demands high throughput with superior quality, a balance that is maintained through robust process control. SEM and TEM tools with dedicated automation software provide rapid, multi-scale information for process monitoring and improvement.

 

Quality Control_Thumb_274x180_144DPI

Quality Control
 

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

 

(S)TEM Sample Preparation

DualBeam microscopes enable the preparation of high-quality, ultra-thin samples for (S)TEM analysis. Thanks to advanced automation, users with any experience level can obtain expert-level results for a wide range of materials.

Learn more ›

Cross-sectioning

Cross sectioning provides extra insight by revealing sub-surface information. DualBeam instruments feature superior focused ion beam columns for high-quality cross sectioning. With automation, unattended high-throughput processing of samples is possible.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

(S)TEM Sample Preparation

DualBeam microscopes enable the preparation of high-quality, ultra-thin samples for (S)TEM analysis. Thanks to advanced automation, users with any experience level can obtain expert-level results for a wide range of materials.

Learn more ›

Cross-sectioning

Cross sectioning provides extra insight by revealing sub-surface information. DualBeam instruments feature superior focused ion beam columns for high-quality cross sectioning. With automation, unattended high-throughput processing of samples is possible.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Documents

Datasheets


Contact us

Electron microscopy services for
the materials science

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

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