Secondary ion mass spectrometry (SIMS) is an analytical technique typically available as a standalone system. Recent advances in instrumentation allowed to make the SIMS detectors much more compact, which in turn, enables them to be integrated on a FIB-SEM system. Compared to a dedicated SIMS system, this integration provides much higher lateral resolution (down to tens of nanometers) and enables fast and easy correlation with other data modalities, such as SEM imaging, EDS, and EBSD mapping. It also allows you to prepare a sample for SIMS analysis in the DualBeam™ instrument; for example, to clean the surface with FIB or make a cross-section followed by the SIMS analysis, which is possible without breaking the vacuum for sample transfer.

Watch our recorded webinar to learn about the integration of a ToF-SIMS detector on a DualBeam system and discover its applications for materials science research using Ga+ FIB or multi-ion species Plasma FIB (Xe+, Ar+, O+).


Speaker biography

Chengge Jiao, Staff Scientist, Applications Development, Thermo Fisher Scientific.

Chengge Jiao is a staff scientist for application development at Thermo Fisher Scientific. He joined the company as a FIB application engineer in late 2001 after leaving from a post-doctoral researcher position at the University of Bristol (UK) where he worked on TEM electron holography for GaN materials. Chengge is a highly experienced electron microscopist with in-depth knowledge of microscopy and materials science. His current interest is to apply FIB-SIMS for material science applications. Chengge received his PhD in materials science from the University of Birmingham, UK supervised by professors Ian Jones and Mark Aindow.