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The new Thermo Scientific Helios 5 DualBeam builds on the high-performance imaging and analysis capabilities of the industry-leading Helios DualBeam family. It is carefully designed to meet the needs of materials science researchers and engineers for the widest range of FIB-SEM use cases – even on the most challenging samples.

The Helios 5 DualBeam redefines the standard in high-resolution imaging with highest materials contrast; fastest, easiest and most precise high-quality sample preparation for S/TEM imaging and Atom Probe Tomography (APT) as well as the highest-quality subsurface and 3D characterization. Building on the proven capabilities of the Helios DualBeam family, additional advancements to the new Helios 5 DualBeam were designed to ensure the system is optimized for a variety of manual or automated workflows. Those improvements include:

  • Greater ease-of-use: Helios 5 is the most accessible DualBeam for users of all experience levels. Operator training may be reduced from months to days and the system design is helping all operators to achieve consistent, repeatable results on a wide variety of advanced applications. 
  • Increased productivity: Advanced automation capabilities, increased robustness and stability enhancements in the Helios 5 and AutoTEM 5 software can significantly increase the sample preparation throughput by allowing unattended and even overnight operation. 
  • Improved time to results: The Helios 5 DualBeam now includes FLASH, a new concept of tuning the image. With conventional microscopes, each time an operator needs to acquire an image, the microscope has to be carefully tuned by iterative alignments. With the Helios 5 DualBeam, a simple gesture across the screen will activate FLASH, which automatically adjusts these parameters. The automatic adjustments can significantly improve throughput, data quality, and simplify the acquisition of high-quality images.

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Applications

Highest-quality, ultra-thin S/TEM sample preparation

Sample preparation for S/TEM analysis is still considered to be one of the most critical but challenging and time-consuming tasks in materials characterization labs. The latest technological innovations of Helios 5 DualBeam, in combination with the easiest to use, most automated AutoTEM 5 Software and Thermo Fisher Scientific application expertise, allow users of all experience levels to achieve the fastest and easiest preparation of site-specific, ultra-thin HR-S/TEM samples for a wide range of materials. AutoTEM 5 Software enables unattended, fully automated TEM sample preparation workflow and supports various use cases, including top-down, inverted and planar geometries.

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60kV HR-STEM image of highest-quality, ultra-thin lamella (<100> SrTiO3) produced with Helios 5 UX DualBeam.

Highest quality subsurface and 3D characterization

Subsurface or three-dimensional characterization is often required to better understand the structure and properties of a sample. Helios 5 DualBeam with optional Thermo Scientific™ Auto Slice & View™ 4 Software allows for the highest-quality, fully automated acquisition of multi-modal 3D datasets, including, among others, BSE imaging for maximum materials contrast, energy dispersive spectroscopy (EDS) for compositional information, and electron backscatter diffraction (EBSD) for microstructural and crystallographic information. Combined with Thermo Scientific™ Avizo™ Software, it delivers a unique workflow solution for highest-resolution, advanced 3D characterization and analysis at the nanometer scale.

High-quality, high resolution 3D characterization of a ceramic sample acquired with a Helios DualBeam and reconstructed using Avizo Software. Data is segmented to analyze the distribution of different phases in the sample. Sample courtesy of KAIST.

3D Nanoprototyping

Devices and structures made on a nanoscale have numerous real-world applications, and the potential for further development and uptake is still growing. However, converting the latest ideas and designs into something real for research, testing and prototyping can pose a significant technical barrier. Designed for the most challenging electron microscopy tasks in materials science, the Helios 5 DualBeam provides the capability for rapid, precise milling and deposition of the most varied and intricate structures, whether it’s devices with critical dimensions of less than 10 nm or multiple patterns written over a large area.

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Nano-fluidic system made with a multi-layer pattern using a Helios DualBeam and NanoBuilder Software. Here deposition of a platinum heating strip and milling of nano-fluidic channel have been made with one single automated process.

Helios 5 DualBeam Products

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Helios 5 CX

  • Tomahawk HT FIB with 100nA
  • Elstar NG SEM
  • Highly flexible 110 mm stage

Helios-5-UC-product-image

Helios 5 UC

  • Tomahawk HT FIB with 100nA
  • Elstar UC+ SEM for improved low kV SEM extreme high-resolution imaging of beam sensitive materials
  • Highly stable & accurate 150 mm Piezo stage

Helios-5-UX-product-image

Helios 5 UX

  • Phoenix FIB with superior performance at lowest energy for fastest and easiest high-quality sample preparation
  • Elstar UC+ SEM for improved low kV SEM extreme high-resolution imaging of beam sensitive materials
  • Highly stable & accurate 150 mm Piezo stage
  • ICE detector

Applications

Highest-quality, ultra-thin S/TEM sample preparation

Sample preparation for S/TEM analysis is still considered to be one of the most critical but challenging and time-consuming tasks in materials characterization labs. The latest technological innovations of Helios 5 DualBeam, in combination with the easiest to use, most automated AutoTEM 5 Software and Thermo Fisher Scientific application expertise, allow users of all experience levels to achieve the fastest and easiest preparation of site-specific, ultra-thin HR-S/TEM samples for a wide range of materials. AutoTEM 5 Software enables unattended, fully automated TEM sample preparation workflow and supports various use cases, including top-down, inverted and planar geometries.

Helios5-appimage-1

60kV HR-STEM image of highest-quality, ultra-thin lamella (<100> SrTiO3) produced with Helios 5 UX DualBeam.

Highest quality subsurface and 3D characterization

Subsurface or three-dimensional characterization is often required to better understand the structure and properties of a sample. Helios 5 DualBeam with optional Thermo Scientific™ Auto Slice & View™ 4 Software allows for the highest-quality, fully automated acquisition of multi-modal 3D datasets, including, among others, BSE imaging for maximum materials contrast, energy dispersive spectroscopy (EDS) for compositional information, and electron backscatter diffraction (EBSD) for microstructural and crystallographic information. Combined with Thermo Scientific™ Avizo™ Software, it delivers a unique workflow solution for highest-resolution, advanced 3D characterization and analysis at the nanometer scale.

High-quality, high resolution 3D characterization of a ceramic sample acquired with a Helios DualBeam and reconstructed using Avizo Software. Data is segmented to analyze the distribution of different phases in the sample. Sample courtesy of KAIST.

3D Nanoprototyping

Devices and structures made on a nanoscale have numerous real-world applications, and the potential for further development and uptake is still growing. However, converting the latest ideas and designs into something real for research, testing and prototyping can pose a significant technical barrier. Designed for the most challenging electron microscopy tasks in materials science, the Helios 5 DualBeam provides the capability for rapid, precise milling and deposition of the most varied and intricate structures, whether it’s devices with critical dimensions of less than 10 nm or multiple patterns written over a large area.

Helios5-appimage-2

Nano-fluidic system made with a multi-layer pattern using a Helios DualBeam and NanoBuilder Software. Here deposition of a platinum heating strip and milling of nano-fluidic channel have been made with one single automated process.

Helios 5 DualBeam Products

Helios5-CX-product-image

Helios 5 CX

  • Tomahawk HT FIB with 100nA
  • Elstar NG SEM
  • Highly flexible 110 mm stage

Helios-5-UC-product-image

Helios 5 UC

  • Tomahawk HT FIB with 100nA
  • Elstar UC+ SEM for improved low kV SEM extreme high-resolution imaging of beam sensitive materials
  • Highly stable & accurate 150 mm Piezo stage

Helios-5-UX-product-image

Helios 5 UX

  • Phoenix FIB with superior performance at lowest energy for fastest and easiest high-quality sample preparation
  • Elstar UC+ SEM for improved low kV SEM extreme high-resolution imaging of beam sensitive materials
  • Highly stable & accurate 150 mm Piezo stage
  • ICE detector