before and after Thermo Scientific ChemiSEM application.
EDS analysis
EDS analysis (energy-dispersive X-ray spectroscopy, also known as EDX analysis) is a powerful technique for the study of micro-scale chemical composition. Combined with scanning electron microscopy (SEM), EDS derives compositional information from the X-rays that are emitted when the electron beam scans over a sample. The range of elements that this technique can detect spans almost the entire periodic table. The data provided by EDS is essential for a range of applications, from process/quality control to failure analysis and fundamental research. As a result, almost every SEM is equipped with an EDS system.
SEM EDS analysis with ChemiSEM Technology
Thermo Scientific ChemiSEM Technology offers a leap forward in usability, convenience, and speed of analysis. It integrates state-of-the-art elemental analysis with the electron image in real time. Within one software interface, you can:
- View the sample image from any electron detector
- See areas of different chemical composition on the sample surface
- View point and area compositional analyses with a single click
- Chart compositional changes across the sample
- Create maps of elemental or phase distribution across the sample
ChemiSEM Technology has revolutionized EDS analysis, providing elemental information much more quickly and easily. Fully integrated within the user interface of the SEM, elemental information is displayed as color in the live image. ChemiSEM Technology is based on live quantification and builds on decades of our expertise in EDS analysis, guaranteeing reliable results. Since ChemiSEM Technology is always on, it does not just dramatically shorten time to results. It also shows features that would have previously gone unnoticed, giving you more complete information and more reliable results.
Benefits of SEM EDS analysis with ChemiSEM Technology
Fast time to data
ChemiSEM Technology combines novel data segmentation approaches based on machine learning, ultrafast signal processing, and the tightest possible SEM EDS. This means that ChemiSEM Technology gives you access to elemental information 2–4 times faster than conventional techniques.
Reliable
ChemiSEM Technology is the culmination of many decades of expertise, bringing accurate qualification and quantification over the widest range of operating conditions.
Complete information
ChemiSEM Technology provides the most comprehensive micro-scale elemental composition possible. Immediate color results allow you to see the big picture, revealing defects or imperfections you might have otherwise missed.
Always on
The integration of color imaging and elemental analysis means you no longer need to move from SEM imaging to EDS analysis for each sample, thereby decreasing the time spent developing color images.
Ease of use
With exceptional ease of use and immediate color results, ChemiSEM Technology makes elemental information accessible to everyone. Multi-user labs can readily increase the number of scientists or engineers who can use their facilities.
ChemiSEM Technology is always on and enables any user to acquire elemental data—you will have more access to complete information than ever before. See just a few examples of the utility of simultaneous EDS and SEM analysis in the videos below.
Elemental information in the blink of an eye
This video is taken on the Thermo Scientific Prisma E SEM equipped with a 30 mm2 EDS detector. We demonstrate the speed of ChemiSEM Technology with composition automatically identified (AutoID) and easy selection of elements of interest.
Highlight contrast that would otherwise go unnoticed
ChemiSEM Technology is always on – you no longer have to switch applications when you need elemental information; instead live results are shown in the SEM user interface. This video highlights several forms of elemental information (point and area).
Reliable results
Elemental information is useless when it is not reliable. This video shows how ChemiSEM Technology is capable of dealing with X-ray peak overlap and deconvolution – making sure that your elemental information is correct and relevant, even in live color imaging.
Want to learn more?Download our ChemiSEM Technology brochure for more information ›
View our on-demand webinar to:
- See how ChemiSEM enables you to see the most complete sample information and detect defects or imperfections you might have missed before.
- Learn how always-on, integrated color imaging and elemental analysis helps decrease the time spent developing color images.
- Discover how ChemiSEM technology gives you access to elemental information 2-4 times quicker than conventional techniques.
Documents
Download our ebook, SEM and EDS Analysis in Industry, to learn more about:
- How the joint application of SEM and EDS analysis supports in-depth material characterization for industrial applications
- How our unique Thermo Scientific ChemiSEM Technology integrates these two techniques into a single, fast, easy-to-use package, which is accessible and valuable to novices and experts alike
View our on-demand webinar to:
- See how ChemiSEM enables you to see the most complete sample information and detect defects or imperfections you might have missed before.
- Learn how always-on, integrated color imaging and elemental analysis helps decrease the time spent developing color images.
- Discover how ChemiSEM technology gives you access to elemental information 2-4 times quicker than conventional techniques.
Documents
Download our ebook, SEM and EDS Analysis in Industry, to learn more about:
- How the joint application of SEM and EDS analysis supports in-depth material characterization for industrial applications
- How our unique Thermo Scientific ChemiSEM Technology integrates these two techniques into a single, fast, easy-to-use package, which is accessible and valuable to novices and experts alike
Quality control and failure analysis
Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.
Fundamental Materials Research
Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.
Battery Research
Battery development is enabled by multi-scale analysis with microCT, SEM and TEM, Raman spectroscopy, XPS, and digital 3D visualization and analysis. Learn how this approach provides the structural and chemical information needed to build better batteries.
Polymers Research
Polymer microstructure dictates the material’s bulk characteristics and performance. Electron microscopy enables comprehensive microscale analysis of polymer morphology and composition for R&D and quality control applications.
Metals Research
Effective production of metals requires precise control of inclusions and precipitates. Our automated tools can perform a variety of tasks critical for metal analysis including; nanoparticle counting, EDS chemical analysis and TEM sample preparation.
Forensics
Micro-traces of crime scene evidence can be analyzed and compared using electron microscopy as part of a forensic investigation. Compatible samples include glass and paint fragments, tool marks, drugs, explosives, and GSR (gunshot residue).
Oil and Gas
As the demand for oil and gas continues, there is an ongoing need for efficient and effective extraction of hydrocarbons. Thermo Fisher Scientific offers a range of microscopy and spectroscopy solutions for a variety of petroleum science applications.
Geological Research
Geoscience relies on consistent and accurate multi-scale observation of features within rock samples. SEM-EDS, combined with automation software, enables direct, large-scale analysis of texture and mineral composition for petrology and mineralogy research.
Automotive Materials Testing
Every component in a modern vehicle is designed for safety, efficiency, and performance. Detailed characterization of automotive materials with electron microscopy and spectroscopy informs critical process decisions, product improvements, and new materials.
Fibers and Filters
The diameter, morphology and density of synthetic fibers are key parameters that determine the lifetime and functionality of a filter. Scanning electron microscopy (SEM) is the ideal technique for quickly and easily investigating these features.

Electron microscopy services for
the materials science
To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.
