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SEM EDS elemental analysis

Experience the next level of EDS analysis with Thermo Scientific™ ChemiSEM™ Technology, a game-changing integration of SEM and EDS functions in a single, seamless user interface. Unleash the power of elemental information with speed, accuracy, and unparalleled simplicity.

ChemiSEM Technology user interface

What is ChemiSEM Technology?

ChemiSEM™ Technology, is an advanced and revolutionary solution designed to address the complex needs of customers in material characterization. It caters to the curious minds seeking to understand the composition of intricate materials, unravel the secrets of their samples, and detect even the tiniest impurities.

ChemiSEM brings together live quantification and decades of EDS analysis expertise to deliver elemental information quickly and effortlessly. With ChemiSEM™, you get reliable results, uncover hidden features, and access complete data, all at your fingertips.

ChemiSEM EDS elemental analysis
ChemiPhase image of a refractory material (brown fused alumina) employed in steel production. The phase analysis shows the location of the alumina (light blue) but also the presence of unexpected materials that act as contamination, such as titanium oxide (displayed in pink) and fragments of silica (displayed in yellow)

Advantages of SEM EDS analysis with ChemiSEM Technology

Always On

Say goodbye to moving between SEM imaging and EDS analysis for each sample. ChemiSEM™ continuously collects the EDS signal during SEM imaging, capturing a full EDS spectrum at every point in the image.

Faster Data Acquisition

Access elemental information faster than ever before with innovative data segmentation techniques based on machine learning and ultrafast signal processing. Seamlessly integrated with SEM, ChemiSEM™ streamlines the entire process.

Reliable Results

Enjoy accurate qualification and quantification across a wide range of operating conditions, including beam energy, sample size, and working distance. ChemiSEM™ ensures consistent and dependable outcomes.

Complete Information

See the big picture with comprehensive micro-scale elemental composition. Immediate color results highlight defects or imperfections that might have been missed with conventional techniques.

Multi-Data Viewing

Get a complete characterization of your sample at a glance with simultaneous viewing of Secondary Electron Detector (SED) and elemental information in a single frame.

Simplified Operation

ChemiSEM™ makes elemental information accessible to everyone. Its intuitive user interface allows easy access to compositional results, enabling more scientists and engineers to utilize your facilities effectively.

Phase analysis with ChemiSEM Technology

Introducing ChemiPhase, the game-changing feature in ChemiSEM that's revolutionizing phase analysis. Imagine pinpointing unique material phases effortlessly. With ChemiPhase's advanced big data approach, detecting statistically significant spectra within your datacube is a breeze.

Complex materials analysis

Characterizing diverse phases has never been easier. ChemiPhase, the unbiased statistical engine, leaves no room for error, avoiding unexpected element misses due to overlaps or intensities.

Experience the Benefits:

  • Automated Brilliance: Say goodbye to user bias. ChemiPhase handles the heavy lifting without prior element identification.
  • Pixel-Perfect Precision: Identify major and minor components down to a single pixel, free from peak overlaps.
  • Speed and Reliability: Achieve phase determination in under a minute, even from minimal X-ray data (just 10 counts per pixel).
  • Reduced Complexity: Navigate with confidence using image-spectrum pairs for each distinct phase, while spectra are optimized automatically.

Elevate your material analysis game with ChemiPhase!

Thermo Scientific SEM instruments featuring ChemiSEM Technology:

Discover the capabilities of ChemiSEM™ Technology with our cutting-edge products

Axia ChemiSEM
Prisma ChemiSEM
Apreo 2 SEM
Quattro ESEM

ChemiSEM Technology is always on and enables any user to acquire elemental data—you will have more access to complete information than ever before. See just a few examples of the utility of simultaneous EDS and SEM analysis in the videos below.

Elemental information in the blink of an eye

This video is taken on the Thermo Scientific Prisma E SEM equipped with a 30 mm2 EDS detector. We demonstrate the speed of ChemiSEM Technology with composition automatically identified (AutoID) and easy selection of elements of interest.

Highlight contrast that would otherwise go unnoticed

ChemiSEM Technology is always on – you no longer have to switch applications when you need elemental information; instead live results are shown in the SEM user interface. This video highlights several forms of elemental information (point and area).

Reliable results

Elemental information is useless when it is not reliable. This video shows how ChemiSEM Technology is capable of dealing with X-ray peak overlap and deconvolution – making sure that your elemental information is correct and relevant, even in live color imaging.


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Quality control and failure analysis using electron microscopy

Quality control and failure analysis

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

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Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.



Battery Research

Battery development is enabled by multi-scale analysis with microCT, SEM and TEM, Raman spectroscopy, XPS, and digital 3D visualization and analysis. Learn how this approach provides the structural and chemical information needed to build better batteries.

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Polymers Research

Polymer microstructure dictates the material’s bulk characteristics and performance. Electron microscopy enables comprehensive microscale analysis of polymer morphology and composition for R&D and quality control applications.

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Metals Research

Effective production of metals requires precise control of inclusions and precipitates. Our automated tools can perform a variety of tasks critical for metal analysis including; nanoparticle counting, EDS chemical analysis and TEM sample preparation.

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Micro-traces of crime scene evidence can be analyzed and compared using electron microscopy as part of a forensic investigation. Compatible samples include glass and paint fragments, tool marks, drugs, explosives, and GSR (gunshot residue).

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Oil and Gas

As the demand for oil and gas continues, there is an ongoing need for efficient and effective extraction of hydrocarbons. Thermo Fisher Scientific offers a range of microscopy and spectroscopy solutions for a variety of petroleum science applications.

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Geological Research

Geoscience relies on consistent and accurate multi-scale observation of features within rock samples. SEM-EDS, combined with automation software, enables direct, large-scale analysis of texture and mineral composition for petrology and mineralogy research.

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Automotive Materials Testing

Every component in a modern vehicle is designed for safety, efficiency, and performance. Detailed characterization of automotive materials with electron microscopy and spectroscopy informs critical process decisions, product improvements, and new materials.

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Fibers and Filters

The diameter, morphology and density of synthetic fibers are key parameters that determine the lifetime and functionality of a filter. Scanning electron microscopy (SEM) is the ideal technique for quickly and easily investigating these features.

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Axia ChemiSEM

  • Live quantitative elemental mapping
  • High fidelity scanning electron microscopy imaging
  • Flexible and easy to use, even for novice users
  • Easy maintenance
Thermo Scientific Prisma E scanning electron microscope (SEM)

Prisma E SEM

  • Entry-level SEM with excellent image quality
  • Easy and quick sample loading and navigation for multiple samples
  • Compatible with a wide range of materials thanks to dedicated vacuum modes
Thermo Scientific Quattro E scanning electron microscope (SEM)

Quattro ESEM

  • Ultra-versatile high-resolution FEG SEM with unique environmental capability (ESEM)
  • Observe all information from all samples with simultaneous SE and BSE imaging in every mode of operation
Thermo Scientific Apreo 2 scanning electron microscope (SEM)

Apreo 2 SEM

  • High-performance SEM for all-round nanometer or sub-nanometer resolution
  • In-column T1 backscatter detector for sensitive, TV-rate materials contrast
  • Excellent performance at long working distance (10 mm)

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Contact us

Ready to revolutionize your materials characterization? Contact us now to learn more about ChemiSEM™ Technology and explore how it can elevate your research and analysis to new heights.

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Electron microscopy services for
the materials science

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.