Scanning electron microscopes that bring research and engineering challenges into focus

No matter what you want to achieve, our scanning electron microscopes (SEMs) provide exceptional power and precision at your fingertips—whether you’re new to the technique or you have decades of experience. They also go beyond the microscope by creating synergy between several techniques, where elemental, particle, or structural analyses are seamlessly integrated into the instruments to add a new dimension to your research. 

Next-level SEM imaging and analysis

 

Conduct a greater quantity of different sample analyses and techniques—with higher quality. Our systems push the boundaries of traditional SEM technology in terms of the high resolution and crystal-clear image quality you can expect.

Reliable scanning electron microscopy results

Be more confident in your analyses with efficient, smart, dedicated technologies that deliver consistently reliable results that you can trust—at high speed. Now you can analyze and interpret data more efficiently and turn this into meaningful and actionable insights.

Greater efficiency and productivity


Our SEMs are easy to use, automating a variety of both routine and complex tasks. This not only helps to boost your productivity and save valuable time, it also enables a greater number of users to get more from the microscope.


Multi-purpose scanning electron microscopes

If you need a general research SEM microscope that does all the heavy lifting for you by providing outstanding magnification with minimal manual intervention, you’re in the right place. The type of model best suited to your needs will depend on the samples you’re working with. Rest assured; we have a solution to meet your requirements.

 


Thermo Scientific Phenom Pure, Pro(X) G6 Desktop SEM

These all-round desktop SEMs are economical, easy-to-use, and they deliver high-quality images within minutes.

 


Thermo Scientific Phenom XL G2 Desktop SEM

Analyze large samples for extensive and high-throughput analysis with average time-to-image of just 60 seconds.

 

Thermo Scientific Axia ChemiSEM System

This SEM with fully integrated EDS capability and an increased level of automation improves your throughput with better results and minimum effort.

Sample size
  • Up to 25 mm diameter (optional 32 mm)

 

  • Up to 100x100 mm (up to 36 samples)

 

  • Up to 138 mm diameter (larger samples possible with limited stage travel or rotation)
Source type Cerium hexaboride (CeB6) source Cerium hexaboride (CeB6) source Tungsten (W) source
Max. resolution  <15 nm for Pure and ≤ 6 nm for Pro(X) <10 nm 3 nm
Detectors / signals
  • Backscattered electron detector (standard)
  • Energy-dispersive X-ray (EDS) detector (standard)
  • Everhart-Thornley (ETD) SE detector (optional)

 

 

 

 

  • Backscattered electron detector (standard)
  • Energy-dispersive X-ray (EDS) detector (optional)
  • Everhart-Thornley (ETD) SE detector (optional)

 

 

 

 

  • Everhart-Thornley (ETD) SE detector (standard)
  • Retractable backscattered electron detector (standard)
  • Energy-dispersive X-ray (EDS) detector (standard)
  • Low-vacuum SE detector (LVD) (standard on LoVac model)
  • Cathodoluminescence (CL) detector (optional)
Software options & accessories
  • ChemiSEM Technology
  • Phenom Programming Interface (PPI) and Phenom Process Automation (PPA)
  • ProSuite Software
  • Maps 3 Software
  • Avizo Software
  • Avizo Trueput Software
  • ChemiSEM Technology
  • Phenom Programming Interface (PPI) and Phenom Process Automation (PPA)
  • ProSuite Software
  • Maps 3 Software
  • Avizo Software
  • Avizo Trueput Software
  • Perception Software
  • ChemiSEM Technology
  • ChemiView Software
  • Maps 3 Software
  • AutoScript 4 Software
  • Avizo Software
  • Avizo Trueput Software
  • Perception Software

 

 

Footprint 92.5 (w) x 305.6 (d) x 343.5 (h)mm, 
57.5 kg
93 (w) x 293 (d) x 290 (h) mm, 
82 kg
895 (w) x 775 (d) x 1624 (h) mm,
405 kg
 

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High-resolution scanning electron microscopes

These powerful scanning electron microscopes deliver nanometer-level resolution (even sub-nanometer in some cases) for a wide range of sample types including insulators and sensitive or magnetic samples. Best of all, you can achieve this with minimal effort thanks to automated and reliable alignments in addition to the integrated detectors and software that broaden your analytical horizons.

 

Thermo Scientific Phenom Pharos G2 Desktop FEG-SEM 

The world’s first desktop SEM with a field emission gun (FEG), giving you optimal image quality in a small-footprint system.

 


Thermo Scientific Apreo ChemiSEM System

 

This outstanding SEM with integrated EDS and EBSD brings you all-round nanometer resolution at analytical working distance (10 mm).

 


Thermo Scientific Verios 5 XHR SEM


Our highest-performance SEM is ideal for characterization of nanomaterials with sub-nanometer resolution and high material contrast.

 

Sample size
  • Up to 25 mm diameter (optional 35 mm and 100 mm available)

 

 

  • Up to 122 mm diameter (larger samples possible with limited stage travel or rotation)

 

 

  • Up to 100 mm (UC version) or 150 mm (HP version) diameter (larger samples possible with limited stage travel or rotation)
Source type Schottky field emission source (FEG) Schottky field emission source (FEG) Schottky field emission source (FEG)
Max. resolution  <2.0 nm 0.7 nm 0.6 nm
Detectors / signals
  • Backscattered electron detector (standard)
  • Energy-dispersive X-ray (EDS) detector (standard)
  • Everhart-Thornley (ETD) SE detector (optional)
  • STEM detector (optional)

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

  • Everhart-Thornley (ETD) SE detector (standard) 
  • Energy-dispersive X-ray (EDS) detector (standard) 
  • T1 lower in-lens detector (standard) 
  • T2 upper in-lens detector (standard) 
  • T3 in-column detector (optional) 
  • Retractable backscattered electron detector (optional) 
  • Low-vacuum SE detector (LVD) (optional) 
  • Low-vacuum gaseous analytical backscattered electron detector (optional) 
  • Electron backscatter diffraction (EBSD) detector (optional) 
  • Cathodoluminescence (CL) detector (optional) 
  • Retractable STEM detector (optional)
  • In-lens SE/BSE detector (TLD) (standard)
  • In-lens SE/BSE detector (ICD) (standard)
  • In-lens BSE detector (MD) (standard)
  • Everhart-Thorley SE detector (ETD) (standard)
  • Retractable backscattered electron detector (optional)
  • Retractable STEM detector (optional)

 

 

 

 

 

 

 

 

 

 

 

Software options & accessories
  • ChemiSEM Technology
  • Phenom Programming Interface (PPI) and Phenom Process Automation (PPA)
  • ProSuite Software
  • Maps 3 Software
  • Avizo Software
  • Avizo Trueput Software
  • ChemiSEM Technology
  • ChemiView Software
  • xTalView Software
  • Maps 3 Software
  • AutoScript 4 Software
  • Avizo Software
  • Avizo Trueput Software

 

  • Maps 3 Software
  • AutoScript 4 Software
  • Avizo Software
  • Avizo Trueput Software

 

 

 

 

Footprint 92.5 (w) 305.6 (d) 343.5 (h) mm, 
84 kg
890 (w) x 1368 (d) x 1874 (h) mm, 770 kg 940 (w) x 1260 (d) x 1948 (h) mm, 895 kg
 

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Variable pressure scanning electron microscopes

Observing and analyzing samples in their natural or hydrated state without requiring extensive preparation or altering their characteristics has traditionally been a challenge—but not with our environmental SEMs. They give you full control over the chamber pressure, unlocking the potential to study material interactions under relevant conditions in real time. Now you can conduct dynamic, in situ experiments at high resolution, without introducing artifact in your materials—and with minimal sample preparation.

 


Thermo Scientific Prisma E SEM

An ideal SEM for industrial research and development with environmental scanning electron microscopy capability.

Thermo Scientific Quattro ESEM
Helps you analyze a wide range of samples and comes with a variety of cooling and heating stages for in situ experiments.

Sample size
  • Up to 122 mm diameter
  • Up to 122 mm diameter (larger samples possible with limited stage travel or rotation)
Source type Tungsten (W) source Schottky field emission source (FEG)
Max. resolution  3 nm 0.8 nm
Detectors / signals
  • Everhart-Thornley (ETD) SE detector (standard)
  • Low-vacuum SE detector (LVD) (standard)
  • Gaseous SED (GSED) (standard)
  • Retractable backscattered electron detector (optional)
  • Energy-dispersive X-ray (EDS) detector (optional)
  • Low-vacuum gaseous analytical backscattered electron detector (optional)
  • Cathodoluminescence (CL) detector (optional)
  • Retractable STEM detector (optional)
  • WetSTEM detector (optional)
  • Everhart-Thornley (ETD) SE detector (standard)
  • Low-vacuum SE detector (LVD) (standard)
  • Gaseous SED (GSED) (standard)
  • Retractable backscattered electron detector (optional)
  • Low-vacuum gaseous analytical backscattered electron detector (optional)
  • Cathodoluminescence (CL) detector (optional)
  • In-lens SE/BSE detector (ICD) (optional)
  • Retractable STEM detector (optional)
  • WetSTEM detector (Quattro S ESEM only)
Software options & accessories
  • ColorSEM Technology
  • Maps 3 Software
  • AutoScript 4 Software
  • Avizo Software
  • Avizo Trueput Software
  • Maps 3 Software
  • AutoScript 4 Software
  • Avizo Software
  • Avizo Trueput Software

 

Footprint 890 (w) x 1268 (d) x 1640 (h) mm,
550 kg
890 (w) x 1368 (d) x 1768 (h) mm,
800 kg
 

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Automation solutions for scanning electron microscopes

With these powerful, quality-control workhorses, you simply put the samples into the system and receive a concise, industrial-standard report out, powered by our integrated Thermo Scientific Perception Software. Each of our Thermo Scientific Phenom ParticleX Desktop SEMs is custom designed for a range of challenging materials, including additive manufacturing powders, industrial cleanliness, steel (both during and post-production), battery cathode powder, and gunpowder residue.

Battery - Phenom ParticleX Battery Desktop SEM

Additive Manufacturing - Phenom ParticleX Additive Manufacturing Desktop SEM

Gunshot Residue – Phenom ParticleX GSR Desktop SEM

Technical Cleanliness - Phenom ParticleX TC Desktop SEM

Steel - Phenom ParticleX Steel Desktop SEM

For Research Use Only. Not for use in diagnostic procedures.