XPS Microprobe | ESCALAB QXi | X-Ray Photoelectron Spectroscopy | XPS Analysis

ESCALAB QXi XPS Microprobe for X-ray photoelectron spectroscopy

Increase analytical performance and flexibility with the Thermo Scientific ESCALAB QXi X-Ray Photoelectron Spectroscopy (XPS) Microprobe, which combines high spectral sensitivity and resolution with quantitative imaging and multi-technique capabilities.

The ESCALAB QXi XPS Microprobe is an expandable and optimized multi-technique instrument with exceptional flexibility and configurability. The system offers excellent XPS performance both for high-resolution spectroscopy and XPS imaging. The optional dual monochromator allows automated switching to a higher energy Ag X-ray source for HAXPES studies.

With its extreme sensitivity, the system can produce high-quality spectra in seconds. And with its unique dual detector system, it delivers superb XPS imaging with excellent spatial resolution. System control, data acquisition, processing, and reporting are seamlessly integrated in powerful Thermo Scientific Avantage Software. The advanced technology, driven by intuitive software, helps ensure world-class results and productivity.

Beyond XPS, the ESCALAB QXi XPS Microprobe is a multi-technique system as standard, with included ion scattering spectroscopy (ISS) and reflected electron energy loss spectroscopy (REELS). The system can also be tailored to your research with included ISS and REELS, and the option to add HAXPES, AES, UPS, Raman and IPES. The system architecture also accommodates a range of sample preparation options and allows integration with other vacuum hardware. The ESCALAB QXi XPS Microprobe is the surface analysis instrument to meet the most demanding research requirements.

ESCALAB QXi XPS microprobe features

Monochromated XPS analysis and HAXPES

The twin-crystal, micro-focusing monochromator has a 500 mm Rowland circle, uses an Al anode (or a dual Al and Ag anode with the dual monochromator option for automated switching from XPS to HAXPES), and allows you to select any sample spot size ranging from 200 µm to 900 µm.

Spectroscopy imaging

The lens and analyzer system on the ESCALAB QXi XPS Microprobe is optimized for both spectroscopy and parallel imaging. The single analyzer path means that the same instrument parameters (e.g., pass energy) can be used for both modes. The system is fitted with two detector systems: one optimized for spectroscopy and one for parallel imaging, consisting of a pair of channel plates and a continuous position-sensitive detector.

Charge neutralization in XPS analysis

An electron source, co-axial with the analyzer input lens, is used for charge compensation when analyzing non-conducting samples with the monochromatic X-ray source, while a second flood source produces both low-energy ions to assist in providing effective charge compensation and low-energy electrons when the magnetic lens is not in use.

XPS ion gun

The ESCALAB QXi XPS Microprobe has two options for rapid, high-resolution depth profiling: the standard EX06 ion gun, which is optimized for monatomic ion sputtering and ion scattering spectroscopy, and the optional monatomic and gas cluster ion source, the Thermo Scientific MAGCIS Dual Beam Ion Source, which is capable of monatomic ion profiling, cluster ion profiling, and ion scattering spectroscopy.

Avantage Software

All analytical functions are controlled from Thermo Scientific Avantage Software, meaning that the entire analysis process can be performed remotely, if required. Avantage Software includes Knowledge View, a comprehensive source of tutorials and reference material that guide users through analysis.

XPS sample handling and alignment

All axes of movement on the sample stage are controlled by Avantage Software. With the auto-exchange system, samples can be exchanged from the preparation chamber to the load-lock automatically for a continuous sample flow. A high-resolution digital video camera is fitted to the instrument and is accurately aligned with the analysis position. XPS parallel imaging can also be used to locate features for analysis.

Multi-technique capabilities

The ESCALAB QXi XPS Microprobe includes ISS and REELS, which complement XPS, as standard. Additional analytical options, including UPS, AES, HAXPES, Raman, and IPES, can be added to provide a tailored solution to meet your experimental needs.

XPS instrument alignment and calibration

A calibration sample block, which has samples of copper, silver, and gold, is supplied for assessing sensitivity, setting the linearity of the analyzer energy scale, calibrating the ion source, aligning the X-ray monochromator, and determining the transmission function of the analyzer.

Vacuum system

The analysis chamber is constructed from 5 mm-thick mu-metal to maximize the efficiency of the magnetic shielding, and the chamber is pumped using both a turbomolecular pump and a titanium sublimation pump, allowing the analysis chamber to achieve a vacuum better than 5 x 10^-10 mbar.

XPS sample preparation chambers

The standard Preploc chamber, which is a combined sample entry lock and preparation chamber, has ports that accommodate a variety of sample preparation devices, such as heating and cooling probes, ion guns, high-pressure gas cells, sample parking, and gas admission.

ESCALAB QXi XPS Microprobe specifications

Monochromated X-ray source	Micro-focused Al K-Alpha source or optional micro-focused, auto-switching, dual-anode Al K-Alpha and Ag L-Alpha source
Analyzer	180°, double-focusing, bi-polar hemispherical analyzer with dual detector system for spectroscopy and imaging
Ion source	Monatomic EX06 ion source supplied as standard; option for MAGCIS dual-mode ion source
Vacuum system	Two turbo molecular pumps for entry and analysis chambers, with rotary pumps or oil-free backing pumps; auto-firing, 3-filament titanium sublimation pump for analysis chamber
Sample stage	5-axis sample stage with sample heating and cooling capabilities Optional fully automated sample exchange from load-lock parking post to analysis chamber
Included standard analysis techniques	X-ray photoelectron spectroscopy (XPS) Reflected electron energy loss spectroscopy (REELS) Ion scattering spectroscopy (ISS)
Optional analysis techniques	UV lamp for UV photoelectron spectroscopy (UPS) Automated dual monochromated X-ray source for XPS and HAXPES Non-monochromated X-ray source for HAXPES Field emission electron source for Auger electron spectroscopy (AES) and SEM Inverse photoemission spectroscopy (IPES)
Optional accessories	Glove box, vacuum transfer vessel, EX03 broad beam ion source, platter camera

XPS analysis resources

ESCALAB QXi XPS Microprobe webinar

On-demand webinar: New ESCALAB QXi XPS applications demonstration

Watch this webinar to:

Learn how you can perform fully automated multi-technique surface analysis from a wide range of sample types, including metals, polymers, oxides, and battery materials
See the ESCALAB QXi Microprobe in action