Metrios 6S (S)TEM

The Metrios 6S (S)TEM is a new-generation, fully automated instrument that enables high-volume TEM metrology. The Metrios 6S (S)TEM features newly designed hardware and machine-learning-based capabilities. As part of the AutoLab Solution, SEMI standard compliant TEM grid handling and host connection are seamlessly integrated, allowing automated TEM grid transfer from the Helios 6 HXS FIB-SEM and continuous data connectivity with the lab MES system. Along with Smart Automation software, this combination provides improved TEM metrology productivity and recipe-free automation for scalable lab operations and resource optimization.

The new Metrios EFEM (Equipment Front End Module) is an innovative TEM lamella handling system designed for the Metrios 6S (S)TEM as part of the AutoLab Solution. It provides an automated, operator-free solution for high-throughput loading and unloading of TEM lamella, seamlessly integrating with automated materials handling systems (AMHS) via overhead tracks (OHT) or autonomous mobile robots (AMR). In this workflow, samples are delivered to the Helios 6 HXS (S)TEM for creation of lamellas, which are then transferred to the Metrios 6S (S)TEM for high-precision metrology data collection.

Automated data connectivity facilitates seamless SEMI standard communication between your manufacturing execution system (MES) and the Metrios 6S (S)TEM’s workflow control software, including interfacing with the OHT or AMR material handling system. If the Helios 6HXS and the Metrios 6S (S)TEMs are not connected to the MES system, they can be linked directly for workflow data connectivity. The workflow control software is used to create and schedule imaging jobs for the Metrios 6S (S)TEM. These jobs are then executed in the Metrios 6S (S)TEM’s application software. This enables a streamlined workflow with enhanced data connectivity and automated processing.

The Metrios 6S (S)TEM offers sophisticated, automated metrology, delivering precise nanoscale measurements through automated image acquisition and analysis, essential for semiconductor manufacturing. Its Smart Automation software significantly reduces set-up time for new processes and sample types, ensuring ease of use and scalability by leveraging advanced machine-learning algorithms. The instrument’s flexibility allows operation in both full-auto and semi-auto modes, adapting to specific lab needs and accommodating a wide range of challenging semiconductor device types. For model training, a new web-based segmenter and object detection algorithm accelerate the time to build robust Al models. For additional flexibility, conventional recipe-based automation is also available.