Metrios 6S (S)TEM

The Metrios 6S (S)TEM is a new-generation, fully automated instrument that enables high-volume TEM metrology. The Metrios 6S (S)TEM features newly designed hardware and machine-learning-based capabilities. As part of the Vulcan Automated Lab, SEMI standard compliant TEM grid handling and host connection are seamlessly integrated, allowing automated TEM grid transfer from the Thermo Scientific Helios 6 HXS FIB-SEM and continuous data connectivity with the lab MES system. Along with Smart Automation software, this combination provides improved TEM metrology productivity and recipe-free automation for scalable lab operations and resource optimization.

The new Metrios EFEM (Equipment Front End Module) is an innovative TEM grid handling system designed for the Metrios 6S (S)TEM as part of the Vulcan Automated Lab. It provides an automated, operator-free solution for high-throughput loading and unloading of TEM grids, seamlessly integrating with automated materials handling systems (AMHS) via overhead tracks (OHT) or autonomous mobile robots (AMR). In this workflow, samples are delivered to the Helios 6 HXS (S)TEM for creation of lamellas, which are then transferred to the Metrios 6S (S)TEM for high-precision metrology data collection.

Automated data connectivity facilitates seamless SEMI standard communication between your manufacturing execution system (MES) and the Metrios 6S (S)TEM’s workflow control software, including interfacing with the OHT or AMR material handling system. If the Helios 6 HXS and the Metrios 6S (S)TEMs are not connected to the MES system, they can be linked directly for workflow data connectivity. The workflow control software is used to create and schedule imaging jobs for the Metrios 6S (S)TEM. These jobs are then executed in the Metrios 6S (S)TEM’s application software. This enables a streamlined workflow with enhanced data connectivity and automated processing.

The Metrios 6S (S)TEM offers sophisticated, automated metrology, delivering precise nanoscale measurements through automated image acquisition and analysis, essential for semiconductor manufacturing. Its Smart Automation software significantly reduces set-up time for new processes and sample types, ensuring ease of use and scalability by leveraging advanced machine-learning algorithms. The instrument’s flexibility allows operation in both full-auto and semi-auto modes, adapting to specific lab needs and accommodating a wide range of challenging semiconductor device types. For model training, a new web-based segmenter and object detection algorithm accelerate the time to build robust Al models. For additional flexibility, conventional recipe-based automation is also available.

Thermo Scientific Perform Services will empower your success for the lifetime of your system. Simplify your budget and maximize availability with the extraordinary value and predictable cost of ownership provided by Thermo Fisher Scientific.

• Gain access to technical support and factory expertise with telephone support and RAPID remote diagnostics
• Keep systems in peak condition with the latest software updates, including licenses and installation
• Get Thermo Scientific quality parts expedited to your site from strategic global inventories
• Ensure a rapid response with priority access to Thermo Fisher Scientific engineers
• Experience optimized system function with regular preventive maintenance

Most of the Thermo Scientific Perform Service packages offer software updates and continuous access to Thermo Scientific RAPID remote service and telephone support, ensuring that our technical experts' assistance is always at your disposal. Options for consumables coverage, extended service hours, and targeted uptime can provide additional business-critical support.

At Thermo Fisher Scientific, our digital capabilities allow us to be more agile and proactive in how we support your instrument. Leveraging data and remote technologies enables us to expand our service reach, deliver an accelerated response, and optimize your system’s uptime and performance.

Our worldwide team of 1,000 service professionals is ready to assist you with technical issues or other service inquiries. Their goal is to expediently resolve any issue that might arise with your instrument.