The Thermo Scientific Phenom ProX Desktop Scanning Electron Microscope (SEM) is based on the 5th generation Phenom desktop SEM platform and is a high-performance SEM for imaging and EDS analysis. With the Phenom ProX Desktop SEM, sample structures can be physically examined and their elemental composition determined. In addition to point analysis, the optional elemental mapping and line scan software allows further analysis of the distribution of elements.

Key Features

Guided data analysis

The EID software package guides novice and expert EDS users through data acquisition and analysis. The step-by-step guided process aids the user to collect all EDS data in an organized and structured workflow. 

Intuitive to use

The Phenom SEM microscopes are intuitive to use, fast to create results and built to high-quality standards. The Phenom ProX combines best in class imaging with powerful EDS analysis. 

Better resolution

The Phenom ProX G5 Desktop SEM offers high-brightness images with up to 8 nm resolution, and an even better user experience to address a wider range of applications, including samples that are very sensitive to beam damage. 


Specifications

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Light optical magnification
  • 20–134x
Electron optical magnification range
  • 80–150,000x
Resolution
  • ≤ 8 nm SED and ≤ 10 nm BSD
Digital zoom
  • Max. 12x
Light optical navigation camera
  • Color
Acceleration voltages
  • Default: 5 kV, 10 kV and 15 kV
  • Advanced mode: adjustable range between 4.8 kV and 15 kV imaging and analysis mode
  • 20 kV optional
Vacuum modes
  • High vacuum mode
  • Charge reduction mode (low vacuum mode)
Detector
  • Backscattered electron detector (standard)
  • Energy-dispersive X-ray detector (standard)
  • Secondary electron detector (optional)
Sample size
  • Up to 25 mm diameter (optional 32 mm)
Sample height
  • Up to 35 mm (optional 100 mm)
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Testimonial from Professor Sir Colin Humphreys, University of Cambridge.

Testimonial from Professor Sir Colin Humphreys, University of Cambridge.

Applications

Process Control_Thumb_274x180_144DPI

Process Control
 

Modern industry demands high throughput with superior quality, a balance that is maintained through robust process control. SEM and TEM tools with dedicated automation software provide rapid, multi-scale information for process monitoring and improvement.

 

Quality Control_Thumb_274x180_144DPI

Quality Control
 

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

 

Fundamental Materials Research_R&D_Thumb_274x180_144DPI

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

EDS Elemental Analysis

EDS provides vital compositional information to electron microscope observations. In particular, our unique Super-X and Dual-X Detector Systems add options for enhanced throughput and/or sensitivity, allowing you to optimize data acquisition to meet your research priorities.

Learn more ›

3D EDS Tomography

Modern materials research is increasingly reliant on nanoscale analysis in three dimensions. 3D characterization, including compositional data for full chemical and structural context, is possible with 3D EM and energy dispersive X-ray spectroscopy.

Learn more ›

Atomic-Scale Elemental Mapping with EDS

Atomic-resolution EDS provides unparalleled chemical context for materials analysis by differentiating the elemental identity of individual atoms. When combined with high-resolution TEM, it is possible to observe the precise organization of atoms in a sample.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

In Situ experimentation

Direct, real-time observation of microstructural changes with electron microscopy is necessary to understand the underlying principles of dynamic processes such as recrystallization, grain growth, and phase transformation during heating, cooling, and wetting.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

EDS Elemental Analysis

EDS provides vital compositional information to electron microscope observations. In particular, our unique Super-X and Dual-X Detector Systems add options for enhanced throughput and/or sensitivity, allowing you to optimize data acquisition to meet your research priorities.

Learn more ›

3D EDS Tomography

Modern materials research is increasingly reliant on nanoscale analysis in three dimensions. 3D characterization, including compositional data for full chemical and structural context, is possible with 3D EM and energy dispersive X-ray spectroscopy.

Learn more ›

Atomic-Scale Elemental Mapping with EDS

Atomic-resolution EDS provides unparalleled chemical context for materials analysis by differentiating the elemental identity of individual atoms. When combined with high-resolution TEM, it is possible to observe the precise organization of atoms in a sample.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

In Situ experimentation

Direct, real-time observation of microstructural changes with electron microscopy is necessary to understand the underlying principles of dynamic processes such as recrystallization, grain growth, and phase transformation during heating, cooling, and wetting.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

Documents

Datasheets


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To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

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