The Thermo Scientific Apreo Scanning Electron Microscope (SEM) features a revolutionary compound lens design combined with electrostatic and magnetic immersion technology to yield unprecedented resolution and signal selection. This makes the Apreo SEM the platform of choice for research on nanoparticles, catalysts, powders and nanodevices, without compromising on magnetic sample performance.

The Apreo SEM benefits from unique in-lens backscatter detection, which provides excellent materials contrast, even at tilt, short working distance, or on sensitive samples. The novel compound lens further improves contrast with energy filtering and adds charge filtering for imaging of insulating samples. The optional low-vacuum mode now has a 500 Pa maximum chamber  pressure for imaging even the most demanding  insulators.

With all these advantages, including the compound final lens, advanced detection and flexible sample handling, the performance and versatility of the Apreo SEM can meet your research challenges for many years to come.

Key Features

All-round resolution

All-around performance at nanometer or sub-nanometer resolution on materials ranging from nanoparticles, powders, catalysts and nanodevices to bulk magnetic samples.

Backscatter detection

Backscattered electron (BSE) detection for materials contrast is always available, even at low voltage and beam currents, at any tilt angle, on beam sensitive samples and at TV-rate imaging.

Supports multiple detectors

A superior analytics platform provided by high beam currents and a small spot size. The chamber supports three energy-dispersive X-ray spectroscopy (EDS) detectors, coplanar EDS & electron backscatter diffraction (EBSD), and low vacuum optimized for analytics.

Easy sample handling

Easy sample handling and navigation with the multi-purpose sample holder and Thermo Scientific Nav-Cam+ Camera.

Unparalleled detector flexibility

Obtain the contrast or signal intensity that matters most by combining information from individual detector segments.

Low-vacuum mode

The widest range of charge mitigation strategies, including a low-vacuum mode with a chamber pressure of up to 500 Pa to enable imaging and analytics of any sample.

Advanced user guidance

Expert results for new users through advanced user guidance, presets and undo functionality.


Specifications

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Apreo S

Apreo C

Resolution

  • 1.0 nm at 1 kV
  • 0.8 nm at 1 kV (beam decel.)
  • 1.0 nm at 1 kV, 10 mm working distance (beam decel.)
  • 1.3 nm at 1 kV
  • 1.0 nm at 1 kV (beam decel.)

Standard detectors

  • ETD, T1, T2, T3, IR-CCD, Nav-Cam+
  • ETD, T1, T2, IR-CCD, Nav-Cam+

Optional detectors

  • DBS, LVD, DBS-GAD, STEM 3+, RGB-CLD, EDS, EBSD, WDS, Raman, EBIC, etc.

Landing energy range

  • 20 eV – 30 keV

Stage bias (beam deceleration)

  • -4000 V to +600 V standard with every system

Low vacuum mode

  • Optional: 10 – 500 Pa chamber pressure

Stage

  • 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.

Maximum beam current

  • 400 nA

Standard sample holder

  • Multi-purpose holder, uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples and two pre-tilted row-bar holders (38° and 90°) and does not require tools to mount a sample

Chamber

  • 340 mm inside width, 12 ports, three simultaneous EDS detectors possible, two at 180°, coplanar EDS/EBSD orthogonal to the tilt axis of the stage
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Palladium nanoparticles in cerium oxide matrix imaged with Apreo SEM.
Palladium nanoparticles in CeO2 matrix. Sample courtesy of Dr. Alessandro Lavacchi, CNR ICCOM.
The Apreo provides materials researchers with the maximum amount of information from their samples. It exposes the size and shape of sample features, even when very small.
Palladium nanoparticles in cerium oxide matrix imaged with Apreo SEM.
Palladium nanoparticles in CeO2 matrix. Sample courtesy of Dr. Alessandro Lavacchi, CNR ICCOM.
The Apreo provides materials researchers with the maximum amount of information from their samples. It exposes the size and shape of sample features, even when very small.

Applications

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Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

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Quality Control
 

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

 

ColorSEM

Using live EDS (energy dispersive X-ray spectroscopy) with live quantification, ColorSEM Technology transforms SEM imaging into a color technique. Any user can now acquire elemental data continuously for more complete information than ever before.

Learn more ›

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

ColorSEM

Using live EDS (energy dispersive X-ray spectroscopy) with live quantification, ColorSEM Technology transforms SEM imaging into a color technique. Any user can now acquire elemental data continuously for more complete information than ever before.

Learn more ›

Energy Dispersive Spectroscopy

Energy dispersive spectroscopy (EDS) collects detailed elemental information along with electron microscopy images, providing critical compositional context for EM observations. With EDS, chemical composition can be determined from quick, holistic surface scans down to individual atoms.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›


Contact us

Electron microscopy services

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

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