Through the combination of atom-sized electron probes with high current and highly sensitive X-ray detectors, routine atomic-resolution spectroscopy is now possible with electron microscopes. Energy-dispersive X-ray spectroscopy (EDS, also abbreviated EDX or XEDS) can identify a wide range of elements due to their unique X-ray signals and is ideally suited for the differentiation of individual atoms. With this information, researchers can characterize and modify their materials at the atomic scale, providing unparalleled insight into the behavior of nanomaterials and particles.

As shown in the yttrium titanate examples on this page, individual atomic positions can be distinguished by their unambiguous chemical signal. The individual atomic columns are not only visible, but distinct from their neighbors due to their high contrast; even mixed and pure columns can be differentiated. Additionally, the EDS signal even makes it possible to detect light elements, which have been notoriously difficult to observe at these resolutions.

Such robust, high-quality results are only possible with Thermo Fisher Scientific’s unique ChemiSTEM Technology and the multi-SSD design of the Dual-X/Super-X Detection Systems. With both improved signal generation and detection, the low probe currents required for atomic-scale spatial resolution no longer pose a barrier to X-ray spectrum collection and analysis.

Y2Ti2O7 atomic elemental mapping with EDS analysis.
Atomic chemical mapping of Y2Ti2O7 in the [110] projection obtained with ChemiSTEM Technology and a probe Cs-corrector at 200 kV acceleration voltage. The maps have a size of 64 x 64 pixels with a mapping time of 306 s. A probe current of 76 pA was used. EDS maps of filtered data using 3-pixel averaging are shown. A model of the structure in [110] projection indicates that three different occupancies are present; pure yttrium, pure titanium, and 50:50 mixed Y/Ti columns.


Fundamental Materials Research_R&D_Thumb_274x180_144DPI

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.



Battery Research

Battery development is enabled by multi-scale analysis with microCT, SEM and TEM, Raman spectroscopy, XPS, and digital 3D visualization and analysis. Learn how this approach provides the structural and chemical information needed to build better batteries.

Learn more ›

Oil and Gas

As the demand for oil and gas continues, there is an ongoing need for efficient and effective extraction of hydrocarbons. Thermo Fisher Scientific offers a range of microscopy and spectroscopy solutions for a variety of petroleum science applications.

Learn more ›

Metals Research

Effective production of metals requires precise control of inclusions and precipitates. Our automated tools can perform a variety of tasks critical for metal analysis including; nanoparticle counting, EDS chemical analysis and TEM sample preparation.

Learn more ›


Materials have fundamentally different properties at the nanoscale than at the macroscale. To study them, S/TEM instrumentation can be combined with energy dispersive X-ray spectroscopy to obtain nanometer, or even sub-nanometer, resolution data.

Learn more ›

Polymers Research

Polymer microstructure dictates the material’s bulk characteristics and performance. Electron microscopy enables comprehensive microscale analysis of polymer morphology and composition for R&D and quality control applications.

Learn more ›

Geological Research

Geoscience relies on consistent and accurate multi-scale observation of features within rock samples. SEM-EDS, combined with automation software, enables direct, large-scale analysis of texture and mineral composition for petrology and mineralogy research.

Learn more ›

Automotive Materials Testing

Every component in a modern vehicle is designed for safety, efficiency, and performance. Detailed characterization of automotive materials with electron microscopy and spectroscopy informs critical process decisions, product improvements, and new materials.

Learn more ›

Catalysis Research

Catalysts are critical for a majority of modern industrial processes. Their efficiency depends on the microscopic composition and morphology of the catalytic particles; EM with EDS is ideally suited for studying these properties.

Learn more ›


Style Sheet for Instrument Cards Original

Spectra 300

  • Highest-resolution structural and chemical information at the atomic level
  • Flexible high-tension range from 30-300 kV
  • Three lens condenser system

Spectra 200

  • High-resolution and contrast imaging for accelerating voltages from 30-200 kV
  • Symmetric S-TWIN/X-TWIN objective lens with wide-gap pole piece design of 5.4 mm
  • Sub-Angstrom STEM imaging resolution from 60 kV-200 kV

Talos F200X TEM

  • High resolution and throughput in STEM imaging and chemical analysis
  • Add application-specific in situ sample holders for dynamic experiments
  • Features Velox Software for fast and easy acquisition and analysis of multimodal data

Talos F200C TEM

  • Flexible EDS analysis reveals chemical information
  • High-contrast, high-quality TEM and STEM imaging
  • Ceta 16 Mpixel CMOS camera provides large field of view and high read-out speed

Talos F200S TEM

  • Precise chemical composition data
  • High performance imaging and precise compositional analysis for dynamic microscopy
  • Features Velox Software for fast and easy acquisition and analysis of multimodal data

Talos F200i TEM

  • High-quality S/TEM images and accurate EDS
  • Available with dual EDS technology
  • Best all-round in situ capabilities
  • Large field-of-view imaging at high speed

Talos L120C

  • Increased stability
  • Multiple auto-functions
  • Quick sample exchange with robust vacuum system
  • High-quality cryo-imaging
Style Sheet for Media Gallery Tabs

Contact us

Style Sheet for Support and Service footer
Style Sheet for Fonts
Style Sheet for Cards

Electron microscopy services for
the materials science

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

Learn more ›