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Semiconductor circuit edit and circuit prototyping

Accelerating product development and time-to-market are critical as missing a technology window, or falling behind, can be extremely costly. As design and integration complexity rise with each new technology node, circuit edit tools are strategically important for managing costs, avoiding schedule delays, and optimizing product performance and functionality.

With the right tools, workflows and techniques, circuit editing can help companies  reduce mask spins, rapidly prototype, and support customer design in schedules.

Designed specifically for complex semiconductor circuit editing, the Thermo Scientific Centrios and Centrios HX Circuit Edit Systems provide industry leading precision, control, and performance for the semiconductor devices of today and tomorrow.

Centrios HX Circuit Edit System

The Centrios HX Circuit Edit System is designed for the most advanced front and backside edit capabilities with unparalleled editing control, precision, and stability.

Featuring the new Thermo Scientific Celta Focused Ion Beam (FIB) Column, the Centrios HX System delivers high resolution at low beam currents and low landing energies, allowing you to perform edits accurately and with minimum circuit damage. Using an innovative dual-nozzle gas-delivery system with the broadest portfolio of chemistries, and the latest FIB technology, the Centrios HX System enables industry leading high-precision etching and fast, efficient editing.

Introducing the Thermo Scientific Centrios HX Circuit Edit System

Enable working device prototypes and speed up product development cycles with the Centrios HX Circut Edit System.

Centrios Circuit Edit System

The Centrios Circuit Edit System utilizes the field-proven Thermo Scientific Tomahawk WDR Ion Column, providing strong performance and cost of ownership. The Centrios System enables precise front and backside editing, rapid prototyping, and silicon debug and repair for today’s established process nodes.

Key Features

Imaging and milling resolution

Centrios System – High resolution at low beam currents for effective, safe edits using the field-proven Thermo Scientific Tomahawk WDR FIB Column.

Centrios HX System – 25% higher resolution at 4X lower beam currents for effective, safe edits using the new Thermo Scientific Celta FIB Column with the latest beam profile improvements.

Enhanced milling precision and control

Planarity/uniformity, delayering/etch stopping, and high-acuity creation of high-aspect-ratio vias using a simultaneous dual-nozzle gas delivery system and proprietary gas chemistry portfolio.

Dedicated circuit edit platform

Designed specifically for circuit editing, the Centrios and Centrios HX Circuit Edit Systems integrate key components, such as gas chemistry delivery, enabling optimized manual and automated applications.

Low cost of operation

Thermo Scientific NEXS CAD Software for navigation and Thermo Scientific iFAST Software customize automation for improve efficiency and ease of use.


Formatvorlage für Produkttabellen-Spezifikationen

Specifications

 

Centrios System

Centrios HX System

Ion column

  • Thermo Scientific Tomahawk WDR Ion Column,
    gallium liquid metal, 1000 hour lifetime
  • Thermo Scientific Celta FIB Column

Image resolution

  • 3.5 nm @ 30 kV
  • 2.5nm @ 30 kV

Beam current

  • 1.2 pA – 65 nA
  • 50 nA maximum current

Stage

  • 5-axes motorized eucentric
    • X, Y motion 100 mm
    • Tilt -10° to 60°
    • Rotation 360°
 

End-point detection

  • Simultaneous SE/specimen current
 

Resources


circuit-edit-480x260

Fundamentals of Circuit Edit eBook

While circuit editing is a well-established technique, it can be especially difficult for those who are new to it. To help you get started, we asked our circuit edit customers what they wish they had known when they started doing FIB circuit edit and collected their feedback, as well as input from our team of experts, in our new eBook: Fundamentals of Circuit Edit. The eBook includes:

  • A definition of circuit edit
  • An overview of focused ion beams
  • Circuit edit tips from experienced practitioners
  • Descriptions of key circuit edit tools and solutions

Download eBook


circuit-edit-480x260

Fundamentals of Circuit Edit eBook

While circuit editing is a well-established technique, it can be especially difficult for those who are new to it. To help you get started, we asked our circuit edit customers what they wish they had known when they started doing FIB circuit edit and collected their feedback, as well as input from our team of experts, in our new eBook: Fundamentals of Circuit Edit. The eBook includes:

  • A definition of circuit edit
  • An overview of focused ion beams
  • Circuit edit tips from experienced practitioners
  • Descriptions of key circuit edit tools and solutions

Download eBook

Applications

pathfinding_thumb_274x180_144dpi

Pathfinding und Entwicklung von Halbleitern

Fortschrittliche Elektronenmikroskopie, fokussierter Ionenstrahl und zugehörige Analyseverfahren zur Identifizierung umsetzbarer Lösungen und Designmethoden für die Herstellung von leistungsstarken Halbleiterbauelementen.

Fehleranalyse von Halbleitern

Fehleranalyse von Halbleitern

Durch immer komplexere Strukturen von Halbleiterbauelementen können sich an mehr Stellen folgenschwere Mängel verbergen. Mit unseren Arbeitsabläufen der nächsten Generation können Sie auch kleinste Probleme in der Elektrik lokalisieren und charakterisieren, die sich auf die Ausbeute, Leistung und Zuverlässigkeit auswirken.


Techniques

Schaltungsbearbeitung

Fortschrittliche, eigens für diese Aufgabe betriebene Lösungen zur Schaltungsbearbeitung und für das Nanoprototyping, die neuartige Gaszuführsysteme mit einem breiten Portfolio an chemischen Eigenschaften und FIB-Technologie (fokussierter Ionenstrahl) kombinieren, bieten unvergleichliche Kontrolle und Präzision für die Entwicklung von Halbleiterbauelementen.

Weitere Informationen ›

Schaltungsbearbeitung

Fortschrittliche, eigens für diese Aufgabe betriebene Lösungen zur Schaltungsbearbeitung und für das Nanoprototyping, die neuartige Gaszuführsysteme mit einem breiten Portfolio an chemischen Eigenschaften und FIB-Technologie (fokussierter Ionenstrahl) kombinieren, bieten unvergleichliche Kontrolle und Präzision für die Entwicklung von Halbleiterbauelementen.

Weitere Informationen ›

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Contact us

Electron microscopy services for
semiconductors

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

Learn more ›

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