XPS Analysis | Hypulse System | Femtosecond Laser

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XPS depth profiling for thin films, coatings, and multi-layer structures

The Thermo Scientiﬁc Hypulse Surface Analysis System supplements traditional ion-beam methods with femtosecond laser ablation (fs-LA) technology to oﬀer outstanding X-ray photoelectron spectroscopy (XPS) depth proﬁling capabilities for thin ﬁlms, coatings, and multi-layer structures. Fs-LA XPS depth proﬁling provides even more accurate, eﬃcient, and versatile analysis from the surface to interfaces deep with the sample. This helps you optimize fabrication and the properties of technologically important materials and devices, develop new multi-functional materials, and gain a deeper understanding of material failures.

Unlock new depths of material analysis with femtosecond laser ablation XPS

Fs-LA XPS delivers accurate, reliable surface and interface analysis without the risk of chemical damage to the sample. With this cutting-edge technique, you can quickly, eﬃciently, and precisely measure technologically important materials and devices to better understand their structure.

Designed for precision and accuracy, the Hypulse System allows you to explore the intricate layers of diverse materials while preserving their chemistry during the analysis. Whether you are in the electronics, metallurgy, or surface coatings industries, it provides fast, detailed, and accurate analysis.

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Revolutionizing XPS depth proﬁling for materials science

Accurate and eﬃcient chemical analysis is essential for materials science research labs, academic institutions, and industries such as semiconductor manufacturing, polymer engineering, coating development, and the development of new multifunctional materials. Traditional ion gun-based methods for X-ray photoelectron spectroscopy depth proﬁling can have issues with certain materials, which results in data that is not completely representative of the sample.

Hypulse Surface Analysis System benefits

Achieve more accurate analysis

By combining monatomic ion beam etching, cluster ion beam etching, and fs-LA depth proﬁling, the Hypulse System can provide accurate results for more materials than was previously possible.

Enhance productivity

Fs-LA depth proﬁling can perform multiple proﬁles on a material in the time that one sample can be processed using ion beam proﬁling.

Gain a more comprehensive understanding of materials

The Hypulse System can help you practically measure depth proﬁles that extend beyond 10 µm into the sample. Buried layers that would take signiﬁcant time to discover using ion beam proﬁling can be accessed more easily through fs-laser ablation depth proﬁling.

Optimize your research for diﬀerent types of materials

Rather than choosing between cluster ions or monatomic ions, the Hypulse System’s laser settings can be tuned to the material, making it easier to proﬁle complex composite samples.

Hypulse Surface Analysis System features

Integrated fs-laser ablation system

The Hypulse System is built around a fully integrated 1,030 nm fs-laser system and high-quality optical components. The laser is focused on the analysis position and can be attenuated through Thermo Scientific Avantage Software. The instrument is a class 1 laser system, so no special laser requirements are necessary for the laboratory.

MAGCIS ion source

To complement the fs-LA system, the Thermo Scientific MAGCIS Dual Beam Ion Source for XPS Instruments is included as standard. Automatic source optimization and gas handling ensure excellent performance and experimental reproducibility.

High-performance surface analysis

The Hypulse System is a high-performing XPS instrument and includes additional analytical techniques such as REELS and ISS to help you get the most information from your samples.

XPS insulator analysis

The patented dual-beam flood source couples low-energy ion beams with very low-energy electrons (less than 1 eV) to prevent sample charging during analysis, which eliminates the need for charge referencing and makes analyzing data from insulating samples easy and reliable.

Optional XPS sample holders

Expand your possibilities with available specialist sample holders for angle-resolved XPS, sample bias measurements, sample heating, or inert transfer from a glove box.

Avantage Software

Instrument control, data processing, and reporting are all controlled by Avantage Software. The software includes Knowledge View, a comprehensive source of tutorials and reference material that guides you through analysis.

Correlative XPS imaging and surface analysis workﬂow

Correlate XPS data with SEM images through the correlative imaging and surface analysis (CISA) workﬂow using Thermo Scientiﬁc Maps Software.

Hypulse Surface Analysis System speciﬁcations

Analyzer type	180º, double-focusing, hemispherical analyzer with 128-channel detector
X-ray source	Monochromated, micro-focused, low-power Al K-alpha X-ray source
X-ray spot size	10 to 400 µm (adjustable in 5 µm steps)
Laser ablation system	Fully integrated 1,030 nm pulsed fs-laser source Tunable pulse energy up to 1 mJ Computer-controlled attenuation to ensure optimum ablation conditions Beam imaging module for system calibration and alignment
Ion depth profiling	MAGCIS dual-mode ion source
Additional included analytical methods	Bi-polar analyzer power supply and helium gas input for ion source for ISS (ion scattering spectroscopy) High-voltage upgrade to electron flood source for REELS (reflection electron energy loss spectroscopy)
Maximum sample area	60 x 60 mm
Maximum sample thickness	20 mm
Vacuum system	Two turbo molecular pumps with automated titanium sublimation pump and backing pump
Optional accessories	UV photoelectron spectroscopy (UPS) Sample tilt module NX sample heating module Sample bias module Vacuum transfer module