On this page:

XPS depth profiling for thin films, coatings, and multi-layer structures

The Thermo Scientific Hypulse Surface Analysis System supplements traditional ion-beam methods with femtosecond laser ablation (fs-LA) technology to offer outstanding X-ray photoelectron spectroscopy (XPS) depth profiling capabilities for thin films, coatings, and multi-layer structures. Fs-LA XPS depth profiling provides even more accurate, efficient, and versatile analysis from the surface to interfaces deep with the sample. This helps you optimize fabrication and the properties of technologically important materials and devices, develop new multi-functional materials, and gain a deeper understanding of material failures.


Unlock new depths of material analysis with femtosecond laser ablation XPS

Fs-LA XPS delivers accurate, reliable surface and interface analysis without the risk of chemical damage to the sample. With this cutting-edge technique, you can quickly, efficiently, and precisely measure technologically important materials and devices to better understand their structure.

Designed for precision and accuracy, the Hypulse System allows you to explore the intricate layers of diverse materials while preserving their chemistry during the analysis. Whether you are in the electronics, metallurgy, or surface coatings industries, it provides fast, detailed, and accurate analysis.

Get the eBook

Learn more about the Hypulse System and review case studies.

Get the eBook

Revolutionizing XPS depth profiling for materials science

Accurate and efficient chemical analysis is essential for materials science research labs, academic institutions, and industries such as semiconductor manufacturing, polymer engineering, coating development, and the development of new multifunctional materials. Traditional ion gun-based methods for X-ray photoelectron spectroscopy depth profiling can have issues with certain materials, which results in data that is not completely representative of the sample.

Webinar: Explore damage-free XPS depth profiling with the Hypulse System

Watch on demand to learn how the Hypulse System combines femtosecond laser ablation with ion beam milling to help you analyze materials without chemical damage.


Hypulse Surface Analysis System benefits

Achieve more accurate analysis

By combining monatomic ion beam etching, cluster ion beam etching, and fs-LA depth profiling, the Hypulse System can provide accurate results for more materials than was previously possible.

Enhance productivity

Fs-LA depth profiling can perform multiple profiles on a material in the time that one sample can be processed using ion beam profiling.

Gain a more comprehensive understanding of materials

The Hypulse System can help you practically measure depth profiles that extend beyond 10 µm into the sample. Buried layers that would take significant time to discover using ion beam profiling can be accessed more easily through fs-laser ablation depth profiling.

Optimize your research for different types of materials

Rather than choosing between cluster ions or monatomic ions, the Hypulse System’s laser settings can be tuned to the material, making it easier to profile complex composite samples.


Hypulse Surface Analysis System features

Integrated fs-laser ablation system

The Hypulse System is built around a fully integrated 1,030 nm fs-laser system and high-quality optical components. The laser is focused on the analysis position and can be attenuated through Thermo Scientific Avantage Software. The instrument is a class 1 laser system, so no special laser requirements are necessary for the laboratory.

MAGCIS ion source

To complement the fs-LA system, the Thermo Scientific MAGCIS Dual Beam Ion Source for XPS Instruments is included as standard. Automatic source optimization and gas handling ensure excellent performance and experimental reproducibility.

High-performance surface analysis

The Hypulse System is a high-performing XPS  instrument and includes additional analytical techniques such as REELS and ISS to help you get the most information from your samples.

XPS insulator analysis

The patented dual-beam flood source couples low-energy ion beams with very low-energy electrons (less than 1 eV) to prevent sample charging during analysis, which eliminates the need for charge referencing and makes analyzing data from insulating samples easy and reliable.

Optional XPS sample holders

Expand your possibilities with available specialist sample holders for angle-resolved XPS, sample bias measurements, sample heating, or inert transfer from a glove box.

Avantage Software

Instrument control, data processing, and reporting are all controlled by Avantage Software. The software includes Knowledge View, a comprehensive source of tutorials and reference material that guides you through analysis.

Correlative XPS imaging and surface analysis workflow

Correlate XPS data with SEM images through the correlative imaging and surface analysis (CISA) workflow using Thermo Scientific Maps Software.


Hypulse Surface Analysis System specifications

Analyzer type
  • 180º, double-focusing, hemispherical analyzer with 128-channel detector
X-ray source
  • Monochromated, micro-focused, low-power Al K-alpha X-ray source
X-ray spot size
  • 10 to 400 µm (adjustable in 5 µm steps)
Laser ablation system
  • Fully integrated 1,030 nm pulsed fs-laser source
  • Tunable pulse energy up to 1 mJ
  • Computer-controlled attenuation to ensure optimum ablation conditions
  • Beam imaging module for system calibration and alignment
Ion depth profiling
  • MAGCIS dual-mode ion source
Additional included analytical methods
  • Bi-polar analyzer power supply and helium gas input for ion source for ISS (ion scattering spectroscopy)
  • High-voltage upgrade to electron flood source for REELS (reflection electron energy loss spectroscopy)
Maximum sample area
  • 60 x 60 mm
Maximum sample thickness
  • 20 mm

Vacuum system

  • Two turbo molecular pumps with automated titanium sublimation pump and backing pump
Optional accessories
  • UV photoelectron spectroscopy (UPS)
  • Sample tilt module
  • NX sample heating module
  • Sample bias module
  • Vacuum transfer module

Frequently asked questions about the Hypulse Surface Analysis System

The Thermo Scientific Hypulse Surface Analysis System is a fully automated X-ray photoelectron spectroscopy (XPS) instrument that includes a femtosecond laser for enhanced material removal and depth profiling. Complimenting the instrument’s ion beam milling capabilities, femtosecond laser ablation expands the materials and sample types that can be analyzed with XPS. This broadens the unique insights that can be obtained with XPS, supporting the analysis of thin films, interfaces, coatings, and buried layers.

XPS depth profiling analyzes the composition and properties of a material from the surface down to the interior of the sample, detecting interfaces or changes in the bulk. This is done by first analyzing the sample surface with XPS, and then removing the analyzed material. The newly exposed sample area is then  analyzed, and the process is repeated. The data collected at each level is processed and combined into a compositional plot that shows how the sample changes with increasing depth. XPS depth profiling reveals how materials behave under different conditions, and these insights can help optimize material performance for various applications.

Traditionally, material removal in XPS instruments is performed by either a monoatomic or gas cluster ion beam. Both of these have their limitations, however, and can potentially cause issues such as preferential sputtering or other chemical and structural changes, which can distort results for sensitive samples.

 

Femtosecond laser ablation (fs-LA) utilizes ultrafast laser pulses to remove material from a sample surface while minimizing the processes that cause chemical damage to the remaining material. This enables precise and controlled removal of material layers, helping to ensure that data collection is representative of the material’s composition. This also makes experiments much faster compared to ion sputtering, so that deeper measurements are more practical to obtain. fs-LA XPS provides highly accurate and detailed analysis for a wide range of materials, making it a powerful tool for surface analysis.

The Hypulse Surface Analysis System features multiple analytical techniques in addition to XPS, including reflected electron energy loss spectroscopy (REELS) and ion scattering spectroscopy (ISS), as well as optional UV photoelectron spectroscopy (UPS). Furthermore, a tilting sample holder can be added for angle-resolved XPS (ARXPS) studies, which are useful for the investigation of certain samples, such as ultra-thin films. Overall, this multi-technique capability provides comprehensive insights into the surface chemistry and structure of a wide variety of materials.

A number of complex materials, from metallurgical and solar-cell samples to polymers, have been analyzed with the damage-free, high-resolution depth profiling of fs-LA XPS.  Specifically, our Hypulse Surface Analysis System brochure highlights several real-world examples, showing how the instrument has been used to analyze nitrided, PVD-coated steels, perovskite solar cells, and multi-layered paint samples.


XPS analysis resources

Hypulse Surface Analysis System documentation

XPS Depth Profiling of Lithium Metal Anodes for Batteries Using Femtosecond Laser Ablation


 

Reproducible XPS depth profiling of a TaN film on Si using femtosecond laser ablation


 

Calibrating ablation rates for femtosecond-laser XPS depth profiling with the Hypulse Surface Analysis System

Hypulse Surface Analysis System


 

The evolution of XPS depth profiling

XPS depth profiling of coated nitrided steel using femtosecond laser ablation

XPS depth profiling of advanced solar cells with femtosecond laser ablation

Polymer analysis using femtosecond-laser-ablation depth profiling

Exploring the surface in depth with XPS analysis

Hypulse Surface Analysis System videos

For Research Use Only. Not for use in diagnostic procedures.