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Thermo Scientific™
Accuros FIB-SEM
Optimize HDD manufacturing with Accuros FIB-SEM with high-throughput, automated cross-section SEM metrology designed for HAMR process control and fab integration.
Catalog number ACCUROS-FIB-SEM
Price (JPY)
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Precise cross-sectional SEM metrology is essential for process development and manufacturing in the hard disk drive (HDD) industry, especially with the emergence of heat-assisted magnetic recording (HAMR). The Thermo Scientific Accuros FIB-SEM provides fast, fully automated, and precise metrology directly in the fab to support high-volume production readiness. With in-line wafer processing, fab host connectivity, and tool matching, the Accuros FIB-SEM is designed for seamless integration into HDD production environments.
Key features
- Precise cut placement with closed loop feedback using Osprey FIB and Elstar UC+ SEM with accurate SEM metrology.
- New automation software available for wafer navigation, cross-sectional SEM metrology, and slice and view.
- Thermo Scientific MultiChem™ Gas Delivery System provides advanced capabilities for electron and ion beaminduced deposition.
- Standard dual-load port EFEM allows automated handling of 150 mm and 200 mm HDD wafers.
- New high-precision, low-maintenance stage with X, Y, Z, R, T movement.
- Optional OCR for reading wafer ID.
- Tool readiness automated alignments.
- Optical microscope with bright-field and dark-field modes for navigation.
Specifications
Resolution1.0 nm @ 15 kV
TypePFIB Wafer DualBeam
Unit SizeEach