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Transmission Electron Microscopy Resources

What is transmission electron microscopy?

Transmission electron microscopy (TEM) provides critical insights across industries and disciplines, allowing you to view materials and samples at sub-nanometer, or even atomic, resolution.

 

TEM examines samples by transmitting a beam of electrons through a very thin specimen, imaging the internal structure and fine details of the sample, such as atomic arrangements and crystal structures. Advances in hardware and software have made this vital tool more accessible and versatile than ever before, capable of providing multiple analyses in one instrument, including scanning transmission electron microscopy, energy-dispersive X-ray spectroscopy, electron-energy loss spectroscopy, and more.

 

Learn about transmission electron microscopy, and the capabilities of Thermo Scientific TEM instrumentation, with our informational resources.

TEM resource highlights

Remarkable X-CFEG for the Talos (S)TEM

Brochure: Talos 12 TEM for the life sciences

Imaging and analyzing nanoparticles in an easy way

Latest advances in automated TEM metrology and failure analysis of semiconductor structures

Celebrating 30+ years of TEM sample preparation innovation

Transmission electron microscopy blogs

Transmission electron microscopy webinars and videos

TEM webinars

Ingredients for high-quality STEM EELS data acquisition

Watch this webinar to learn how to best optimize the Thermo Scientific Spectra (S)TEM, with its ultra-high-brightness cold-FEG source (X- CFEG), for EELS data collection, especially in the case of a very large collection angle and/or short camera length, where optics quality becomes very important.

TEM sample preparation by focused ion beam milling without gallium

In this webinar, we discuss the mechanisms of ion-material interaction to help you come as close to a damage-free sample as possible.

Automated particle size analysis with TEM

Learn how to run your TEM 24/7 in an unattended fashion while significantly improving the repeatability of nanoscale particle analysis. Remove repetitive manual analysis and operator bias while also acquiring statistics quickly.

Learn about 4D STEM

These educational courses and hands-on sessions are designed to provide a comprehensive and practical understanding of 4D STEM, ranging from the fundamentals to advanced techniques and applications. Whether you’re new to 4D STEM or looking to enhance your skills, this series will help you learn how to optimize your acquisition settings for techniques like phase and orientation mapping, strain field measurement, and even spatial resolution improvement.

Accelerating S/TEM defect analysis and metrology efficiency

In this webinar, we explore the implementation of a new interactive workflow driven by machine learning-based "Smart Automation" technology, which accelerates time to S/TEM results on novel semiconductor devices while reducing operator burden. We dive into how an interactive automated approach enhances the flexibility of Smart Automation to better handle your dynamic requests and how it expands the coverage of various sample types, complementing a fully automated workflow.

Semiconductor TEM Fundamentals Elemental Analysis

In this webinar, we present examples of such analysis, explain the basic characteristics of energy dispersive X-ray spectroscopy (EDS) and electron energy loss spectroscopy (EELS), and we highlight how these methods offer complementary data. Following from their basic characteristics, we examine how EDS and EELS can be optimized to achieve the best output from each of them.

Automated STEM-EDS Metrology and Characterization of DRAM Capacitors

In this webinar, we present a scanning transmission electron microscopy (S/TEM) based, energy dispersive X-ray spectroscopy (EDS) metrology method enabled by the Thermo Scientific Metrios 6 (S)TEM and its new Ultra-X EDS detector. The Ultra-X EDS detector provides a 4.45 srad solid angle, delivering at least 2ᵡ greater data collection efficiency than the previous generations of detectors. High-quality analytical information and fast EDS data collection is provided through improved sensitivity, efficiency, and throughput capabilities.

Sample preparation and TEM imaging techniques for advanced power devices

This webinar utilizes real-world use cases to discuss defects in devices and crystalline dislocations in substrates, cross-section and TEM lamella focused ion beam sample preparation, and the performance advantages of ion sources other than Ga+. We also dive into the complexities and crucial requirements associated with S/TEM analysis

Semiconductor Transmission Electron Microscopy Fundamentals

This webinar series covers the fundamentals of transmission electron microscopy (TEM) and scanning transmission emission microscopy, specifically how they relate to semiconductors. Topics covered include TEM imaging, elemental analysis, S/TEM vs TEM, TEM metrology, and other TEM applications for semiconductor production and analysis.

Automating TEM Metrology

In this on-demand SPARK Webinar, we discuss the advanced automation capabilities of the Thermo Scientific Metrios AX TEM. We explore the critical roles that artificial intelligence (AI) and machine learning (ML) play, and we share learnings to help you automate your TEM sample prep processes. We also show the TEM metrology output on gate-all-around structures.

Introducing the ultimate (S)TEM platform for advanced semiconductor applications

Advanced semiconductor researchers and developers need atomic scale characterization capabilities to perform fast, repeatable, and damage-free analysis.

TEM videos

For Research Use Only. Not for use in diagnostic procedures.