Search Thermo Fisher Scientific
Thermo Scientific™
SURF-CAL™ Particle Size Standards
Catalog number: PD-047
Thermo Scientific™
SURF-CAL™ Particle Size Standards
Catalog number: PD-047
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
Catalog Number
PD-047
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.047 μm
Price (USD)
| Additive | None |
| Concentration | 3 x 108 particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS) |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.004µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.047 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.047 μm
Price (USD)
| Additive | None |
| Concentration | 1 x 10¹° particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS). |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.004µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.047 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.064 μm
Price (USD)
| Additive | None |
| Concentration | 3 x 108 particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.003µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.064 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.064 μm
Price (USD)
| Additive | None |
| Concentration | 1 x 10¹° particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS). |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.003µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.064 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.083 μm
Price (USD)
| Additive | None |
| Concentration | 3 x 108 particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS) |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.004µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.083 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.083 μm
Price (USD)
| Additive | None |
| Concentration | 1 x 10¹° particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS). |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.004µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.083 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.092 μm
Price (USD)
| Additive | None |
| Concentration | 3 x 108 particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS) |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.004µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.092 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.092 μm
Price (USD)
| Additive | None |
| Concentration | 1 x 10¹° particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS). |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.004µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.092 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.100 μm
Price (USD)
| Additive | None |
| Concentration | 3 x 108 particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS) |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.003µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.100 μm |
| Unit Size | Each |
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.100 μm
Price (USD)
| Additive | None |
| Concentration | 1 x 10¹° particles/mL |
| Contents | Polystyrene microspheres in deionized, filtered water |
| Description | Particles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS). |
| Color | White or Colorless |
| For Use With (Application) | SSIS Calibration and Maintenance |
| Material | Polystyrene |
| Product Type | Size Standard Particles |
| Includes | Certificate of Calibration and Traceability to NIST |
| Particle Density | 1.05g/cm³ |
| Quantity | 50 mL |
| Refractive Index | 1.59 at 589nm (25°C) |
| Size Distribution | 0.003µm |
| Stability | Product stable for a minimum of 12 months |
| Diameter (Metric) | 0.100 μm |
| Unit Size | Each |
Showing 10 of 35Show more
| Catalog Number | Specifications | Unit Size | Concentration | Diameter (Metric) | Price (USD) | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PD-047 | Each | 3 x 108 particles/mL | 0.047 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-047B | Each | 1 x 10¹° particles/mL | 0.047 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-064 | Each | 3 x 108 particles/mL | 0.064 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-064B | Each | 1 x 10¹° particles/mL | 0.064 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-083 | Each | 3 x 108 particles/mL | 0.083 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-083B | Each | 1 x 10¹° particles/mL | 0.083 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-092 | Each | 3 x 108 particles/mL | 0.092 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-092B | Each | 1 x 10¹° particles/mL | 0.092 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-100 | Each | 3 x 108 particles/mL | 0.100 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| PD-100B | Each | 1 x 10¹° particles/mL | 0.100 μm | Request A Quote | |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| |||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.
- Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
- By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
- You can also assess the performance of your SSIS at critical stages in the manufacturing process.
- All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.
Note:
Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.
Contents & Storage
Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.