Thermo Scientific™

SURF-CAL™ Particle Size Standards

Catalog number: PD-047
Thermo Scientific™

SURF-CAL™ Particle Size Standards

Catalog number: PD-047
Simplify the preparation of calibration wafers with Thermo Scientific™ SURF-CAL™ Particle Size Standards, for calibration and maintenance of Scanning Surface Inspection Systems (SSIS). Available particle sizes correspond to the calibration point sizes required by instrument manufacturers.
 
Catalog Number
PD-047
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.047 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.047 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.047 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.047 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.064 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.064 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.064 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.064 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.083 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.083 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.083 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.083 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.092 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.092 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.092 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.092 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
3 x 108 particles/mL
Diameter (Metric)
0.100 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.100 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Catalog Number
Unit Size
Each
Concentration
1 x 10¹° particles/mL
Diameter (Metric)
0.100 μm
Price (USD)
Full specifications
AdditiveNone
Diameter (Metric)0.100 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Showing 10 of 35Show more
Catalog NumberSpecificationsUnit SizeConcentrationDiameter (Metric)Price (USD)
PD-047Full specifications
Each3 x 108 particles/mL0.047 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.047 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-047BFull specifications
Each1 x 10¹° particles/mL0.047 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.047 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-064Full specifications
Each3 x 108 particles/mL0.064 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.064 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-064BFull specifications
Each1 x 10¹° particles/mL0.064 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.064 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-083Full specifications
Each3 x 108 particles/mL0.083 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.083 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-083BFull specifications
Each1 x 10¹° particles/mL0.083 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.083 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-092Full specifications
Each3 x 108 particles/mL0.092 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.092 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-092BFull specifications
Each1 x 10¹° particles/mL0.092 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.092 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.004µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-100Full specifications
Each3 x 108 particles/mL0.100 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.100 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration3 x 108 particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles for calibration and maintenance of Scanning Surface Inspection Systems (SSIS)
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
PD-100BFull specifications
Each1 x 10¹° particles/mL0.100 μmRequest A Quote
AdditiveNone
Diameter (Metric)0.100 μm
For Use With (Application)SSIS Calibration and Maintenance
Product TypeSize Standard Particles
Concentration1 x 10¹° particles/mL
ContentsPolystyrene microspheres in deionized, filtered water
DescriptionParticles For calibration and maintenance of Scanning Surface Inspection Systems (SSIS).
IncludesCertificate of Calibration and Traceability to NIST
MaterialPolystyrene
Particle Density1.05g/cm³
Quantity50 mL
Refractive Index1.59 at 589nm (25°C)
Size Distribution0.003µm
StabilityProduct stable for a minimum of 12 months
Unit SizeEach
Showing 10 of 35Show more
Thermo Fisher Scientific™, along with the Semiconductor Industry and SEMI, have established specific particle sizes to be used when calibrating Scanning Surface Inspection Systems. Working with instrument manufacturers, we created the SURF-CAL™ product line to meet SEMI standard guidelines.
  • Available sizes are considered to be critical sizing nodes as defined by the International Technology Roadmap for Semiconductors (ITRS).
  • By depositing SURF-CAL™ NIST™ traceable polystyrene latex spheres (PSL) on specially selected wafers, you can perform periodic calibration checks and compare your scanner with scanners at other locations.
  • You can also assess the performance of your SSIS at critical stages in the manufacturing process.
  • All products are suspended in deionized, filtered water in 50mL bottles at a concentration of 3 × 108 particles per mL.

Note:

Products PD1100 and smaller are also available at 1010 particles per mL for applications using the aid of a Differential Mobility Analyzer (DMA) or other size exclusionary techniques.

Contents & Storage

Unless otherwise stated, refrigerate (2° to 8°C) product when not in use but do not freeze. Store upright and keep bottle tightly sealed. Mix product with gentle inversion by hand or vortex mixer.

Figures

Frequently asked questions (FAQs)

Citations & References