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Materials Science
Secondary Ion Mass Spectrometry
SIMS spectroscopy with focused ion beam milling for light- and trace-element analysis in FIB SEM instruments.
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Analytical characterization of light elements, like lithium, is exceedingly challenging, if not impossible, using common techniques such as energy-dispersive X-ray spectroscopy (EDS). This is also true for high-resolution material analysis of samples with very low elemental concentrations. A SIMS (secondary ion mass spectrometry) detector enables sensitive surface analysis for many industrial and research applications. The technique provides detailed elemental and isotopic information about the sample and is capable of depth profiling analysis.
SEM image of a lithium battery cathode cross-section (left) and corresponding SIMS map showing the lithium distribution (right).
Secondary ion mass spectroscopy (SIMS) is possible on DualBeam (FIB-SEM) tools as ionized particles are generated by the FIB milling process; because these particles come from a very shallow depth it is considered a surface analysis technique. Modern SIMS detectors are compact and well suited for measuring all elements of the periodic table as well as their various isotopes. The key benefits of added SIMS analysis on FIB-SEM instrumentation include:
- Detection and mapping of all elements of the periodic table, including light elements such as hydrogen, lithium, boron, and carbon in difficult samples such as low-carbon steels
- Excellent depth and lateral resolution, which is essential for 3D analytical characterization
- High-sensitivity elemental analysis capable of detecting concentrations on the parts-per-million (ppm) level
- High mass resolution
- Surface composition information
- Separation and analysis of all isotopes and analytical characterization of their spatial distribution
3D SIMS technology
3D SIMS technology integrates TOF-SIMS detectors into our Auto Slice & View 5 Software, providing an automated and seamless approach to multi-modal, large-volume data collection. This innovation marks a significant advancement in SIMS capabilities, offering numerous benefits:
Automated large volume SIMS analysis
Achieve detailed and extensive analysis with fewer artifacts, enhancing data accuracy and reliability.
3D SIMS imaging of uneven surfaces
Particularly beneficial for analyzing particle materials, such as battery electrodes, enabling comprehensive characterization.
Optimized geometry for SIMS
Automated functions and image matching for pre-alignment before capturing 3D SIMS data, along with stage rotation and tilting at optimized positions to ensure precision.
Seamless operation
SIMS data acquisition is fully integrated into Auto Slice & View 5 Software, ensuring a smooth and efficient user experience.
With these advancements, 3D SIMS offers outstanding capabilities for researchers and industry professionals, enabling more detailed and accurate analysis of complex materials.
On-demand webinar: Overview and applications of SIMS on DualBeam systems
Watch our recorded webinar to learn about the integration of a ToF-SIMS detector on a DualBeam system and discover its applications for materials science research using Ga+ FIB or multi-ion species Plasma FIB (Xe+, Ar+, O+).
Left: Ion beam image of BAM-L200, a certified reference material, at 30 kV and 1.1 pA. The area marked in red has been scanned with SIMS to collect the aluminum signal. Right: Aluminum TOF-SIMS signal (vertically integrated) showing the W8 (38 nm) and P8–P4 bands, left to right.
Cross-section of a lithium battery cathode with polyvinylidene fluoride (PVDF) binder material. While it is challenging for EDS to map the fluoride distribution it can be efficiently imaged using SIMS mapping (right image).
SIMS enables the simultaneous detection of light and low-concentration elements along with heavy elements.
Documents
On-demand webinar: Overview and applications of SIMS on DualBeam systems
Watch our recorded webinar to learn about the integration of a ToF-SIMS detector on a DualBeam system and discover its applications for materials science research using Ga+ FIB or multi-ion species Plasma FIB (Xe+, Ar+, O+).
Left: Ion beam image of BAM-L200, a certified reference material, at 30 kV and 1.1 pA. The area marked in red has been scanned with SIMS to collect the aluminum signal. Right: Aluminum TOF-SIMS signal (vertically integrated) showing the W8 (38 nm) and P8–P4 bands, left to right.
Cross-section of a lithium battery cathode with polyvinylidene fluoride (PVDF) binder material. While it is challenging for EDS to map the fluoride distribution it can be efficiently imaged using SIMS mapping (right image).
SIMS enables the simultaneous detection of light and low-concentration elements along with heavy elements.
Documents
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