Thermo Scientific™


Related applications:

Industrial Mass Spectrometry

Delivering Triple Quadrupole Technology, the Thermo Scientific™ iCAP™ TQs ICP-MS is a high-performance ICP-MS for ultratrace quantification of trace elements in a variety of challenging matrices related to the semiconductor industry. Harness the superior interference removal capabilities of triple quadrupole technology without compromising detection power with this sensitive, easy-to-use, bench-top instrument.

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Experience the benefits of ultratrace analysis and expand your laboratory’s application portfolio, safe in the knowledge that your operators can quickly adopt triple quadrupole ICP-MS through the use of the Thermo Scientific™ Qtegra™ Intelligent Scientific Data Solution™ (ISDS) Software.

The Thermo Scientific iCAP TQs ICP-MS delivers enhanced interference removal capabilities for improved detection of elemental impurities in the most challenging of matrices. With a small footprint and unique ease-of-use through streamlined workflows and automated method development, the iCAP TQs ICP-MS is the ideal inspection tool for at-line quality control to ensure consistency of critical manufacturing processes and improve semiconductor wafer fabrication yields.

Push the boundaries of detection with triple quadrupole ICP-MS performance and ease-of-use with the iCAP TQs ICP-MS:

  • Powerful triple quadrupole technology for improved interference removal and right first time analysis.
  • Ultralow detection, even in challenging matrices.
  • Easy and fast setup using the unique Reaction Finder method development assistant.
  • Reliable instrument operation through integrated reaction gas handling features.
  • Dry fore-vacuum pump for clean room environments.