Thermo Scientific™

Helios 5 PFIB CXe DualBeam

Catalog number: HELIOS5PFIBCXE
Thermo Scientific™

Helios 5 PFIB CXe DualBeam

Catalog number: HELIOS5PFIBCXE
Thermo Scientific™ Helios 5 PFIB CXe delivers unmatched capabilities for large volume 3D characterization, Ga+free sample preparation and precise micromachining. Helios 5 PFIB CXe is part of the fifth generation of the industry-leading Helios DualBeam™ family. It combines the new PFIB column and the monochromated Thermo Scientific Elstar™ SEM column to deliver the most advanced focused ion and electron beam performance. Intuitive software and an unprecedented level of automation and ease-of-use provide observation and analysis of relevant subsurface volumes by scientists and engineers.
 
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HELIOS5PFIBCXE
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Key Benefits
  • Highest quality Ga+ free TEM and APT sample preparation thanks to the new PFIB column enabling 500 V Xe+ final polishing and delivering superior performance at all operating conditions
  • Fastest and easiest, automated, multisite in situ and ex situ TEM sample preparation and cross-sectioning using optional AutoTEM 5 Software
  • Highest throughput and quality statistically relevant 3D characterization, cross-sectioning and micromachining using next generation 2.5 µA Xenon Plasma FIB column (PFIB)
  • Access high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional Auto Slice & View 4 (AS&V4) Software
  • Shortest time to nanoscale information for users with any experience level with SmartAlign and FLASH technologies
  • Reveal the finest details using best-in-class Elstar Electron Column with high-current UC+ monochromator technology, enabling sub-nanometer performance at low energies
  • The most complete sample information with sharp, refined, and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors
  • Most advanced capabilities for electron and ion beam induced deposition and etching on FIB/SEM systems with optional MultiChem or GIS Gas Delivery Systems
  • Precise sample navigation tailored to individual application needs thanks to the high flexibility 110 mm stage and optional in-chamber Nav-Cam Camera
  • Artifact-free imaging based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan and DCFI Modes

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