Thermo Scientific™

Meridian™ V System for Semiconductors

Optimized dynamic LSM platform

  • Performance optical path for best imaging
  • Architecture supports automated test equipment (ATE) docking and back-side (B/S) analysis
  • Mobility for the lab; high power cooling options

Best-in-class performance

  • Laser voltage probing (LVP) and laser voltage imaging (LVI) for timing and functional analysis
  • Dynamic laser simulation (DLS) for critical path analysis
  • Powerful and easy-to-use Sierra Software GUI

Dynamic electrical fault isolation

  • Transistor- and cell-level fault localization
  • Isolate design-process marginalities
  • Based on Ruby optics

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Configuration & Features

Highest performance solid immersion lens (SIL) and imaging

  • Optimized monochromatic optical path
  • "Point & Click" high numerical aperture (NA) SIL (3.1, 2.9NA)
  • Polarization-optimized imaging
  • High performance 1320nm LVI and LVP
  • Low frequency and high bandwidth options
  • High resolution 1064nm LVx option

Performance confocal LSM

  • Static and dynamic laser stimulation; SLS Lock-in
  • Dual wavelength near infrared (NIR system) (1064, 1320/1340)


  • Sierra software suite
  • Based on Ruby optics

EM Services for Semiconductors

Whether you are based in San Jose or Shanghai, our strategically located spare part warehouses allow field service engineers to immediately access the parts needed to keep your system running optimally

Find out about service ›


Manuals & protocols