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Materials Science
Nanoscale Prototyping
Nano prototyping FIB-SEM tools that accelerate your research and development.
As technology continues to miniaturize, the demand for nanoscale devices and structures is ever increasing. The challenge of converting the latest ideas and designs into valuable assets only continues to grow, and significant technical and financial barriers need to be overcome for successful prototyping of nanoscale devices.
Standard nanofabrication batch processes involve the combined use of different machines for each pattern layer. These instruments might include a spin coater for resist application, a lithography tool, wet chemistry for resist development, a plasma cleaner, and deposition or etching equipment for pattern transfer. The use of so many distinct tools results in a costly and time-consuming prototyping process. As researchers push nanotechnology towards smaller dimensions, these established procedures and recipes often no longer keep pace with the demands of rapid development.
A reliable nanoprototyping technique would feature dedicated strategies for the execution of pattern designs. This would include the ability to observe the patterning process live and to immediately image the resulting structures with high resolution, offering unique control over the patterning process. This would also provide an immediate feedback loop for the observer, accelerating their development process. This is why DualBeam (focused ion beam – scanning electron microscopy, or FIB-SEM) technology is ideally suited for nanoprototyping applications. The SEM provides high-resolution imaging as the FIB accurately adds or removes material at the nanometer scale via milling or chemical deposition.
Thermo Fisher Scientific offers a smart and efficient way of turning nanoscale designs into reality. Our DualBeam instruments feature unique precision stages and are combined with state-of-the-art software and patterning engines. Together, these produce a robust prototyping workflow that enables you to quickly design, create, and inspect micro- and nanoscale functional prototype devices.
Left: Electromigration structure created with NanoBuilder Software. Right: Close up of a single channel. Critical dimensions as low as 10 nm are possible.
Style Sheet for Komodo Tabs
A split-ring oscillator pattern milled directly with a focused ion beam. The FIB used a vector scanning method in order to optimize milling direction for each part of the pattern.
A nano-fluidic system made with a multi-layered pattern in NanoBuilder Software. Each layer may consist of a deposition or milling sequence to selectively add or remove material.
Secondary electron image of a honeycomb structure milled into a silicon substrate using a focused ion beam.
A split-ring oscillator pattern milled directly with a focused ion beam. The FIB used a vector scanning method in order to optimize milling direction for each part of the pattern.
A nano-fluidic system made with a multi-layered pattern in NanoBuilder Software. Each layer may consist of a deposition or milling sequence to selectively add or remove material.
Secondary electron image of a honeycomb structure milled into a silicon substrate using a focused ion beam.
기초 재료 연구
새로운 물질은 물리적 및 화학적 특성을 최대한 제어하기 위해 점점 더 작은 규모로 연구되고 있습니다. 전자현미경은 연구자들에게 마이크로에서 나노 범위에 이르는 광범위한 물질 특성의 핵심이 되는 유용한 정보를 제공합니다.
Style Sheet for Cards
배터리 연구
배터리 개발은 microCT, SEM 및 TEM, Raman 분광법, XPS 및 디지털 3D 시각화 및 분석을 통한 멀티 스케일(multi-scale) 분석에 의해 이루어질 수 있습니다. 이 접근 방식이 더 나은 배터리를 만드는 데 필요한 구조 및 화학 정보를 제공하는 방법에 대해 알아보십시오.
금속 연구
금속을 효과적으로 생산하려면 함유물 및 침전물에 대한 정밀한 제어가 필요합니다. 당사의 자동화 도구를 사용하여 나노 입자 계수, EDS 화학 물질 분석 및 TEM 시료 준비 등 금속 분석에 필수적인 다양한 작업을 수행할 수 있습니다.
촉매 연구
촉매는 대부분의 현대적인 산업 공정에 있어 대단히 중요합니다. 그 효율은 촉매 입자의 미세 조성 및 형태학에 따라 달라집니다. EDS와 EM은 이러한 속성 연구에 매우 적합합니다.
나노입자
재료는 큰 규모 단위보다 나노 단위에서 근본적으로 다른 특성을 드러냅니다. 이를 연구하기 위해, S/TEM 기기를 에너지 분산형 X선 분광법과 결합하여 나노미터 미만의 분해능 데이터를 얻을 수 있습니다.
기기 카드 원본 스타일시트
Style Sheet to change H2 style to p with em-h2-header class