Circuit edit technology provides rapid prototyping of small design corrections at various points in the IC manufacturing process: after first silicon debug; for performance enhancements during yield ramp; to create a small number of functioning chips for beta developers; and to resolve reliability issues. Circuit edit engineers mill the chip to the site of the suspected defect, and then remove or deposit conductors or insulators in precise geometries-allowing IC manufacturers to validate design changes without re-spinning masks and processing additional wafers.

Technology


Technology


Industry


Applications

Life Sciences

 

Materials Science

 

Semiconductors


Techniques

Life Sciences

 

Materials Science

 

Semiconductors


Krios Rx Cryo-TEM

  • Industry leading productivity and ease of use
  • Fixed 300 kV voltage for SPA only
  • Pharma-dedicated service package for guaranteed reliability

Krios G4 Cryo-TEM

  • Improved ergonomics
  • Fits more easily into new and existing labs
  • Maximized productivity and automation
  • Best image quality for high-resolution 3D reconstruction

Spectra 300 TEM

  • Highest-resolution structural and chemical information at the atomic level
  • Flexible high-tension range from 30-300 kV
  • Three lens condenser system

Spectra 200 TEM

  • High-resolution and contrast imaging for accelerating voltages from 30-200 kV
  • Symmetric S-TWIN/X-TWIN objective lens with wide-gap pole piece design of 5.4 mm
  • Sub-Angstrom STEM imaging resolution from 60 kV-200 kV

Glacios Cryo-TEM

  • Flexible Accelerating Voltage 80-200 kV
  • Industry-leading Autoloader for cryogenic sample manipulation
  • Small footprint
  • Enhanced ease-of-use

Talos Arctica TEM

  • Increased data acquisition speed
  • High data with robotic sample handling & automated loading
  • Unattended platform operation and automated data acquisition
  • Low cost of ownership with remote diagnostics and preventive service

Metrios AX TEM

  • Automation options to support quality, consistency, metrology, and reduced OPEX
  • Leverages machine learning for superior autofunctions and feature recognition
  • Workflows for both in-situ and ex-situ lamella preparation

Themis ETEM

  • Precise control and knowledge of sample temperature
  • Improved sample stability, navigation, and assisted sample drift correction in x, y, and z axes
  • Advancing high-quality imaging and movie acquisition functions

Talos L120C TEM

  • Increased stability
  • 4k × 4K Ceta CMOS camera
  • TEM magnification range from 25–650 kX
  • Flexible EDS analysis reveals chemical information

Talos F200i TEM

  • High-quality S/TEM images and accurate EDS
  • Available with dual EDS technology
  • Best all-round in situ capabilities
  • Large field-of-view imaging at high speed

Talos F200S TEM

  • Precise chemical composition data
  • High performance imaging and precise compositional analysis for dynamic microscopy
  • Features Velox Software for fast and easy acquisition and analysis of multimodal data

Talos F200X TEM

  • High resolution/throughput in STEM imaging and chemical analysis
  • Add application-specific in situ sample holders for dynamic experiments
  • Features Velox Software for fast and easy acquisition and analysis of multimodal data

Talos F200C TEM

  • Flexible EDS analysis reveals chemical information
  • High-contrast, high-quality TEM and STEM imaging
  • Ceta 16 Mpixel CMOS camera provides large field of view and high read-out speed

ExSolve WTP DualBeam

  • Can prepare site-specific, 20 nm thick lamellae on whole wafers up to 300 mm in diameter
  • Addresses needs requiring automated, high-throughput sampling at advanced technology nodes

Helios G4 EXL DualBeam

  • Precise control and knowledge of sample temperature
  • Improved sample stability, navigation, and assisted sample drift correction in x, y, and z axes
  • Advancing high-quality imaging and movie acquisition functions

Helios 5 DualBeam

  • Fully automated, high-quality, ultra-thin TEM sample preparation
  • High throughput, high resolution subsurface and 3D characterization
  • Rapid nanoprototyping capabilities

Helios 5 PFIB DualBeam

  • Gallium-free STEM and TEM sample preparation
  • Multi-modal subsurface and 3D information
  • Next-generation 2.5 μA xenon plasma FIB column

Helios G4 PFIB DualBeam

  • Gallium-free STEM and TEM sample preparation
  • Multi-modal subsurface and 3D information
  • Next-generation 2.5 μA xenon plasma FIB column

Helios 5 Laser PFIB System

  • Fast, millimeter-scale cross sections
  • Statistically relevant deep subsurface and 3D data analysis
  • Shares all capabilities of the Helios 5 PFIB platform

Helios Hydra DualBeam

  • 4 fast switchable ion species (Xe, Ar, O, N) for optimized PFIB processing of a widest range of materials
  • Ga-free TEM sample preparation
  • Extreme high resolution SEM imaging

Aquilos 2 Cryo-FIB

  • Automation enables production of multiple lamellas
  • Target and extract your structure of interest with lift-out nano-manipulator
  • 3D visualization for high-resolution tomography

Scios 2 DualBeam

  • Full support of magnetic and non-conductive samples
  • High throughput subsurface and 3D characterization
  • Advanced ease of use and automation capabilities

Axia ChemiSEM

  • Live quantitative elemental mapping
  • High fidelity scanning electron microscopy imaging
  • Flexible and easy to use, even for novice users
  • Easy maintenance

Verios 5 XHR SEM

  • Monochromated SEM for sub-nanometer resolution over the full 1 keV to 30 keV energy range
  • Easy access to beam landing energies as low as 20 eV
  • Excellent stability with piezo stage as standard

Quattro ESEM

  • Ultra-versatile high-resolution FEG SEM with unique environmental capability (ESEM)
  • Observe all information from all samples with simultaneous SE and BSE imaging in every mode of operation

Prisma E SEM

  • Entry-level SEM with excellent image quality
  • Easy and quick sample loading and navigation for multiple samples
  • Compatible with a wide range of materials thanks to dedicated vacuum modes

Apreo 2 SEM

  • High-performance SEM for all-round nanometer or sub-nanometer resolution
  • In-column T1 backscatter detector for sensitive, TV-rate materials contrast
  • Excellent performance at long working distance (10 mm)

VolumeScope 2 SEM

  • Isotropic 3D data from large volumes
  • High contrast and resolution in high and low vacuum modes
  • Simple switch between normal SEM use and serial block-face imaging

Phenom Pharos Desktop SEM

  • FEG source with 2 up to 15 kV acceleration voltage range
  • <2.5 nm (SE) and <4.0 nm (BSE) resolution @ 15 kV; up to 1,000,000x magnification
  • Optional fully integrated EDS and SE detector

Phenom XL G2 Desktop SEM

  • For large samples (100x100 mm) and ideal for automation
  • <10 nm resolution and up to 200,000x magnification; 4.8 kV up to 20 kV acceleration voltage
  • Optional fully integrated EDS and BSE detector

Phenom ProX Desktop SEM

  • High performance desktop SEM with integrated EDS detector
  • Resolution <8 nm (SE) and <10 nm (BSE); magnification up to 150,000x
  • Optional SE detector

Phenom Pro Desktop SEM

  • High performance desktop SEM
  • Resolution <8 nm (SE) and <10 nm (BSE); magnification up to 150,000x
  • Optional SE detector

Phenom Pure Desktop SEM

  • Entry level desktop SEM
  • Resolution <25 nm; magnification up to 65,000x
  • Longlife CeB6 source

Phenom Perception GSR Desktop SEM

  • Dedicated automated GSR desktop SEM
  • Resolution <10 nm; magnification up to 200,000x
  • Longlife CeB6 source

Phenom ParticleX AM Desktop SEM

  • Versatile desktop SEM with automation software for Additive Manufacturing
  • Resolution <10 nm; magnification up to 200,000x
  • Optional SE detector

Phenom ParticleX TC Desktop SEM

  • Versatile desktop SEM with automation software for Technical Cleanliness
  • Resolution <10 nm; magnification up to 200,000x
  • Optional SE detector

Phenom ParticleX Steel Desktop SEM

  • SEM and EDS integrated
  • Ease of use
  • Sub-micrometer inclusions

ELITE System

  • Completely non-destructive
  • Quickly identifies defective component on assembly board for accurate dispositioning
  • Localizes defect in x-y with micrometer accuracy, with depth location accurate to 20 µm

Hyperion II System

  • Atomic Force Probing
  • Localize transistor faults
  • Integrated PicoCurrent (CAFM)

nProber IV System

  • Localize transistor and BEOL faults
  • Thermal nanoprobing (-40°C to 150°C)
  • Semi-automated operation

Meridian S System

  • Fault Diagnostic with Active Probe Technology
  • Static laser stimulation (SLS / OBIRCH) and photon emission options
  • Supports both micro-probing and probe card device stimulation

Meridian WS-DP System

  • High-sensitivity, low-noise, low-voltage photon emission detection with broadband DBX or InGaAs camera systems
  • Multi-wavelength laser scanning microscope for scan chain analysis, frequency mapping, transistor probing and isolation of faults

Meridian 7 System

  • Dynamic Optical Fault Isolation for 10nm node and below
  • High resolution visible and Infrared light
  • High-yield sample preparation to 5μm widely available

Meridian IV System

  • High sensitivity extended-wavelength DBX photon emission detection
  • Standard InGaAs photon emission detection
  • Laser Scanning Microscope with multiple wavelength options

Taipan G2+ Circuit Edit System

  • Imaging and milling resolution to meet 10nm node specifications
  • Superb etch selectivity and deposition control for conductors and insulators
  • Excellent navigation and ion beam placement accuracy

Centrios Circuit Edit System

  • Superior image / milling resolution
  • Enhanced milling precision and control
  • Built on the Thermo Scientific Helios DualBeam platform

MK.4TE ESD and Latch-Up Test System

  • Rapid-relay-based operations—up to 2304 channels
  • Advanced device preconditioning with six separate vector drive levels
  • Fully compliant Latch-Up stimulus and device biasing

Orion3 Electrostatic Discharge Tester

  • Charged device model testing
  • Dual high resolution color cameras
  • Test densities to less than 0.4mm pitch

Celestron Test System

  • Wafer and package level TLP testing
  • High current TLP pulse generato
  • Can be interfaced with semiautomatic probers
  • Intuitive software for control and report generation

Pegasus ESD Test System

  • Testing per the latest industry standards
  • True system level ESD 150pF/330Ω network
  • 2 pin connection via wafer probes to any device

HeliScan microCT

  • Advanced helical scanning and iterative reconstruction technology
  • High resolution x-ray source (below 400 nm)
  • Process, analyze, and visualize samples

Nexsa

  • Tilt Module for ARXPS measurements
  • Dual-mode ion source for expanded depth profiling capabilities
  • Insulator analysis

K-Alpha

  • Selectable area spectroscopy
  • Micro-focused monochromator
  • High-resolution chemical state spectroscopy

ESCALAB Xi+

  • High sensitivity spectroscopy
  • XPS with non-monochromatic X-rays
  • 180° hemispherical energy analyzer

Vitrobot System

  • Fully Automated Sample vitrification
  • Blotting Device
  • Semi-Automated Grid Transfer
  • High Sample Throughput

Amira Software

  • Support for multi-data/view/channel
  • Interactive high-quality visualization
  • Machine Learning-based segmentation
  • Intuitive recipe creation

Auto Slice and View 4.0 Software

  • Automated serial sectioning for DualBeam
  • Multi-modal data acquisition (SEM, EDS, EBSD)
  • On-the-fly editing capabilities
  • Edge based cut placement

AutoScript 4 Software

  • improved reproducibility and accuracy
  • Unattended, high throughput imaging and patterning
  • Supported by Python 3.5-based scripting environment

AutoTEM 5 Software

  • Fully automated in situ S/TEM sample preparation
  • Support of top-down, planar and inverted geometry
  • Highly configurable workflow
  • Easy to use, intuitive user interface

Avizo Software

  • Support for multi-data/multi-view, multi-channel, time series, very large data
  • Advanced multi-mode 2D/3D automatic registration
  • Artifact reduction algorithms

EPU 2 Software

  • Microscope-embedded solution for single particle acquisition
  • Optimized for high-throughput particle collection
  • Compatible with film, CCD cameras, and direct electron detectors

Ifast Software

  • Macro recorder for faster recipe creating
  • Runner for unattended overnight operation
  • Alignment tools: Image recognition and edge finding

Inspect 3D Software

  • Image processing tools and filters for cross-correlation
  • Feature tracking for image alignment
  • Algebraic reconstruction technique for iterative projection comparison

Maps Software

  • Acquire high resolution images over large areas
  • Easily find regions of interest
  • Automate image acquisition process

NEXS Software

  • Auto-syncs position/magnification between NEXS and Circuit Edit system for a more seamless user experience
  • Connects to most Thermo Scientific tools used for EFA, PFA and Circuit Edit space

Pergeos Software

  • Support for multi-data/multi-view, multi-channel, time series, very large data
  • Two-Phase Flow Simulation
  • Dual Energy Computed Tomography (DECT)

Tomography 4.0 Software

  • On-the-fly Reconstruction Algorithm
  • Fully Automatic TEM and STEM Acquisition
  • One-Time Calibration
  • Easy workflow from data to structure

Velox Software

  • An experiments panel on the left side of the processing window.
  • Live quantitative mapping
  • Interactive detector layout interface for reproducible experiment control & set-up

3D Reconstruction

  • Intuitive user interface, maximum employability
  • Intuitive fully automated user interface
  • Based on 'shape from shading' technology, no stage tilt required

AsbestoMetric

  • Automated tool for image acquisition, fiber detection and reporting
  • Assisted EDX analysis with fiber revisiting
  • ISO standard report on asbestos analysis

Elemental Mapping

  • Fast and reliable information on the distribution of elements within the sample or the selected line
  • Easily exported and reported results

FiberMetric

  • Save time by automated measurements
  • Fast and automated collection of all statistical data
  • View and measure micro and nano fibers with unmatched accuracy

Nanobuilder

  • CAD-based prototyping
  • Fully automated job execution, stage navigation, milling, and deposition
  • Automated alignment and drift control

ParticleMetric

  • Integrated software in ProSuite for online and offline analysis
  • Correlating particle features such as diameter, circularity, aspect ratio and convexity
  • Creating image datasets with Automated Image Mapping

Phenom Programming Interface

  • Customize your SEM to fit your workflow
  • Increase efficiency and save time with automated processes
  • Control imaging settings and stage navigation

PoroMetric

  • Correlate pore features such as area, aspect ratio, major and minor axis
  • Acquire images directly from the Desktop SEM
  • Statistical data with high-quality images

ProSuite

  • Automated collection of images
  • Real-time remote control
  • Standard applications included: Automated Image Mapping + Remote User Interface

Quartz PCI/CFR

  • SEM imaging traceability compliant with 21 CFR Part 11
  • Compatible with the Phenom XL and Phenom Pro desktop SEMs
  • Windows 10 64-bit operating system support

μHeater

  • Ultra-fast heating solution for in situ high resolution imaging
  • Fully integrated
  • Temperatures up to 1200 °C

μPolisher

  • Potential to enable large number of novel, unexplored applications
  • Very low energy milling
  • Small spot size for precise local surface treatment

Selectris and Selectris X Imaging Filters

  • Designed for high stability and atomic resolution imaging
  • Straightforward operation
  • Paired with the latest generation Thermo Scientific Falcon 4 Direct Electron Detector

Ceta D Camera

  • Optimum performance at any high tension (20–300 kV)
  • Compatible with post-column filters and spectrometers
  • Movie acquisition for dynamic studies

Falcon 4 Detector

  • Leading detective quantum efficiency
  • 10x shorter exposure time than its predecessor
  • Fully embedded in Thermo Scientific software
  • Built in data management

Charge Reduction Sample Holder

  • Up to 8 times higher magnification
  • Faster sample preparation
  • Non conductive samples can be imaged in their natural state

Electrical Feedthrough Sample Holder

  • Connect electrical probes to the sample for in situ measurements
  • Sample can be height adjusted from 0–25 mm manually
  • Measurements of probe currents

Eucentric Sample Holder

  • Eucentric tilting and compucentric rotation on a desktop SEM
  • Fast time-to-image with sample loading < 1 minute
  • Real-time 3D sample visualization module

Filter Inserts

  • Filter residue analysis and asbestos analysis
  • Available in two models which support 47 mm (1.85 inch) and 25 mm (1 inch) filters
  • Use on Phenom Desktop SEM

Metallurgical Sample Holder

  • Designed to support resin-mounted samples
  • Preferred solution for metallurgy and when working with inserts
  • Sample size up to 32 mm diameter and 30 mm height

Micro Tool Sample Holder

  • Quick and fast clamping
  • Tilting and rotation allow for easy sample positioning
  • No extra tooling required for sample loading

Motorized Tilt & Rotation Sample Holder

  • Tilt range -10° to +45°
  • Continuous 360° compucentric rotation
  • Controlled by dedicated Motion Control ProSuite application

Nebula Particle Disperser

  • Standard method for uniform dry powder dispersion
  • Avoids particle clusters
  • Used with Phenom Desktop SEM

Resin Mount Inserts

  • A unique sample holder concept
  • Available in 3 models for supporting standard sized samples of 25 mm (~1 inch), 32 mm (~1 ¼ inch) and 40 mm (~1 ½ inch) diameter

Standard Sample Holder

  • Compact stage allowing analysis of samples of up to 100 mm x 100 mm
  • Can be extended with 3 types of resin or metallurgical mount inserts
  • Used with Phenom Desktop SEM

Sample Holder Inserts

  • Faster cross-sectional imaging of coatings and multilayer samples
  • Easy clamping without the need for screws or extra tools
  • Eliminates the need for screws and tools to clamp the sample

 Download datasheet

Tensile Sample Holder

  • Determine batch quality
  • Determine manufacturing consistencys
  • Aid the design process

Temperature Controlled Sample Holder

  • Temperature range -25 °C to +50 °C
  • Temperature accuracy ±1.5 °C
  • Temperature display resolution 0.1 °C

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