Focused ion beam scanning electron microscopy resources for the Scios 3 FIB-SEM

Learn how the Thermo Scientific Scios 3 FIB-SEM, along with related software and hardware, can support your work with these eBooks, datasheets, and more.


Webinar: Introducing the Scios 3 FIB-SEM

Automated workflows and analytic capabilities for efficient sample preparation and analysis


Watch on demand to see how the Scios 3 FIB-SEM can help you accelerate your materials characterization workflow with innovative features and technologies, including:

  • Automation that increases efficiency for routine tasks and elevates quality control and failure analysis.
  • Workflows that remove the complexity of FIB milling and optimize tool use.
  • Outstanding cross-sectioning, sample preparation, and 3D analysis.
  • High-resolution imaging and the flexibility to analyze a variety of materials.

Scios 3 FIB-SEM datasheets

µHeater datasheet

AutoTEM 5 Software datasheet

Auto Slice & View 5 Software datasheet

μPolisher datasheet


Scios 3 FIB-SEM application notes

Scios 3 FIB-SEM application note


Scios 3 FIB-SEM case study

Scios 3 FIB-SEM case study

For Research Use Only. Not for use in diagnostic procedures.