Scios 3 FIB-SEM Features

The innovative NICol electron column provides the foundation of the  Scios 3 FIB-SEM's high-resolution imaging and detection capabilities. It offers excellent nanoscale details, using a wide range of working conditions, whether operating at 30 keV in STEM mode to access structural information or at lower energies to obtain charge-free, detailed information from the surface. Fast, accurate, and reproducible results are obtained thanks to unique NICol column design with full auto alignments.

Exceptional in-lens Trinity Detection Technology is designed for simultaneous acquisition of angular and energy-selective SE and BSE imaging. Fast access to extremely detailed nanoscale information is provided, not only top-down, but also on tilted specimens or cross sections. Optional below-the-lens detectors and electron beam- deceleration mode help ensure fast and easy simultaneous collection of all signals to reveal the smallest features in material surfaces or cross-sections.

The Scios 3 FIB-SEM introduces a dedicated application for fully automated cross-section analysis, enabling high-quality, multi-modal subsurface characterization with precise targeting of the region of interest. This solution is designed to streamline workflows, reduce user intervention, and help ensure consistent, high-quality results in high-throughput environments.

The latest technological innovations of the Scios 3 FIB-SEM, in combination with the comprehensive, intuitive Thermo Scientific AutoTEM 5 Software and our application expertise, allow for fast and easy preparation of site- specific HR-S/TEM samples for a wide range of materials. To achieve high-quality results, final polishing with low-energy ions is required to minimize surface damage on the sample. Thermo Scientific DualBeam Technology not only delivers high-resolution imaging and milling at high voltages, but also has excellent low-voltage performance, helping you create high-quality TEM lamella.

The intuitive user interface simplifies operation and reduces the learning curve. This design improvement increases productivity by enabling you to quickly master the system and focus on your research objectives. The user-friendly interface helps ensure that even those with minimal experience can operate the system efficiently, making it accessible to a broader range of users. It offers user guidance, making it easy for novice users to be productive quickly. In addition, features such as “undo” and “redo” encourage greater experimentation with peace of mind. This ease of use is crucial for maximizing the system's potential and achieving optimal results.

The flexible DualBeam configuration can be tailored to meet specific application needs. This flexibility allows you to configure the system according to your requirements, ensuring that it can handle a wide range of tasks. The DualBeam configuration enhances the system's versatility, making it suitable for various applications, from surface and subsurface imaging to advanced analytical 3D characterization and sample preparation. This adaptability is essential for researchers and engineers who need a system that can accommodate diverse and evolving needs.

Designed for the most challenging electron microscopy tasks in materials science, the Scios 3 FIB-SEM can be equipped with the μHeater holder, a fully integrated, extremely fast, MEMS-based heating stage for sample characterization in closer to real-world working conditions. The 110 mm stage tilts up to 90˚ and provides a long, eucentric working distance for great flexibility. The Scios 3S FIB-SEM has an optional low-vacuum mode and easily accommodates a wide range of sample types and data collection. It combines expanded deposition and etching capabilities with the Thermo Scientific MultiChem Gas Delivery System, enhanced sample flexibility, and control to create a versatile high-performance FIB-SEM instrument, all backed by our expert application and service support.