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The Thermo Scientific Prisma E Scanning Electron Microscope (SEM) combines a wide array of imaging and analytical modalities with advanced automation to offer the most complete solution of any instrument in its class. It is ideal for industrial research and development, quality control, and failure analysis applications that require high resolution, sample flexibility and an easy-to-use operator interface. The Prisma E SEM succeeds the highly successful Thermo Scientific Quanta SEM.

The unique combination of accessible all-round performance, a large set of accessories, and the most intuitive elemental analysis with Thermo Scientific ColorSEM Technology make the Prisma E SEM the go-to SEM for micro-scale imaging and analysis in any industry or field.

Key Features

Elemental information at your fingertips

Live composition-based image coloring for intuitive elemental analysis with optional ColorSEM Technology and integrated energy-dispersive X-ray spectroscopy (EDS). Speed up your work and obtain the most complete sample information with always-on analysis.

Excellent image quality

Excellent image quality at low kV and low vacuum thanks to flexible vacuum modes, including through-the-lens differential pumping. Simultaneous secondary electron (SE) and backscattered electron (BSE) imaging in every mode of operation.

Minimize sample preparation time

Low vacuum and ESEM capability enable charge-free imaging and analysis of nonconductive and/or hydrated specimens.

In-situ study of materials in their natural state

With the Prisma E SEM's environmental SEM (ESEM) mode, samples can be imaged even if they are hot, dirty, outgassing or wet.

Excellent analytical capabilities

Excellent analytical capabilities with a chamber that allows 3 simultaneous EDS detectors, EDS ports that are 180° opposite, wavelength-dispersive spectroscopy (WDS), coplanar EDS/EBSD and high-quality charge-free EDS and EBSD in low vacuum.

Easy to use

Easy to use, intuitive software with user guidance and undo functionality makes highly effective operation possible for novice users, while enabling experts to do their work faster and with fewer mouse clicks.


Specifications

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Resolution

  • 3.0 nm at 30 kV in high vacuum, low vacuum and ESEM
  • 7.0 nm at 3 kV (BSED, beam decel.)

Standard detectors

  • ETD, low-vacuum SED (LVD), gaseous SED for ESEM mode (GSED), IR camera

Optional detectors

  • Thermo Scientific Nav-Cam+ Camera, DBS, DBS-GAD, ESEM-GAD, STEM 3+, WetSTEM, RGB-CLD, EDS, EBSD, WDS, Raman, EBIC, etc.

ColorSEM Technology (optional)

  • Live quantitative SEM image coloring is available based on energy-dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps and accurate Noran quantification are included.

Stage bias (beam deceleration, optional)

  • -4,000 V to +50 V

Low vacuum mode

  • Up to 2,600 Pa (H2O) or 4,000 Pa (N2)

Stage

  • 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.

Standard sample holder

  • Standard multi-sample SEM holder uniquely mounts directly
  • onto the stage, hosts up to 18 standard stubs (⌀ 12 mm), does
  • not require tools to mount a sample

Chamber

  • 340 mm inside width, 12 ports, three simultaneous EDS detectors possible, two at 180°, coplanar EDS/EBSD orthogonal to the tilt axis of the stage

In situ accessories (optional)

  • Software controlled -20°C to +60°C Peltier cold stage
  • Software controlled 1,000°C low vacuum/ESEM heating stage
  • Software controlled 1,100°C high vacuum heating stage
  • Software controlled 1,400°C low vacuum/ESEM heating stage
  • Integrated gas injection: up to 2 units (other accessories may limit number of gas injection systems (GIS) available) for beam-induced deposition of the following materials:
    • Platinum
    • Tungsten
    • Carbon
  • Manipulators
  • Cryo-stage
  • Electrical probing / multi-probing stations

Software options

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Resources

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.

Goldrush. This mixture of particles contains gold (large area on the left), copper (smallest particles) and a Al/Si/Mg alloy (the bigger particles). The mixture is heated to higher and higher temperatures. At a certain point, gold starts diffusing across the metal surfaces, thereby completely changing their appearance. The experiment is performed using the High Vacuum Heating Stage mounted on a Prisma E SEM.

Webinar: Scanning electron microscopy: selecting the right technology for your needs

This on-demand webinar has been designed to help you decide which SEM best meets your unique needs. We present an overview of Thermo Fisher Scientific SEM technology for multi-user research labs and focus on how these wide-ranging solutions deliver performance, versatility, in situ dynamics and faster time to results. Watch this webinar if you are interested in:

  • How the needs for different microanalysis modalities are met (EDX, EBSD, WDS, CL, etc.).
  • How samples are characterized in their natural state without the need for sample preparation.
  • How new advanced automation allows researchers to save time and increase productivity.

Goldrush. This mixture of particles contains gold (large area on the left), copper (smallest particles) and a Al/Si/Mg alloy (the bigger particles). The mixture is heated to higher and higher temperatures. At a certain point, gold starts diffusing across the metal surfaces, thereby completely changing their appearance. The experiment is performed using the High Vacuum Heating Stage mounted on a Prisma E SEM.

Applications

Process control using electron microscopy

Process control using electron microscopy

Modern industry demands high throughput with superior quality, a balance that is maintained through robust process control. SEM and TEM tools with dedicated automation software provide rapid, multi-scale information for process monitoring and improvement.

 

Quality control and failure analysis using electron microscopy

Quality control and failure analysis

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

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Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

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Semiconductor Pathfinding and Development

Advanced electron microscopy, focused ion beam, and associated analytical techniques for identifying viable solutions and design methods for the fabrication of high-performance semiconductor devices.

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Yield Ramp and Metrology

We offer advanced analytical capabilities for defect analysis, metrology, and process control, designed to help increase productivity and improve yield across a range of semiconductor applications and devices.

Semiconductor Failure Analysis

Semiconductor Failure Analysis

Increasingly complex semiconductor device structures result in more places for failure-inducing defects to hide. Our next-generation workflows help you localize and characterize subtle electrical issues that affect yield, performance, and reliability.

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Physical and Chemical Characterization

Ongoing consumer demand drives the creation of smaller, faster, and cheaper electronic devices. Their production relies on high-productivity instruments and workflows that image, analyze, and characterize a broad range of semiconductor and display devices.


Techniques

ChemiSEM

Using live EDS (energy dispersive X-ray spectroscopy) with live quantification, ChemiSEM Technology transforms SEM imaging into a color technique. Any user can now acquire elemental data continuously for more complete information than ever before.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Environmental SEM (ESEM)

Environmental SEM allows materials to be imaged in their native state. This is ideally suited for academic and industrial researchers who need to test and analyze samples that are wet, dirty, reactive, outgassing or otherwise not vacuum compatible.

Learn more ›

Particle analysis

Particle analysis plays a vital role in nanomaterials research and quality control. The nanometer-scale resolution and superior imaging of electron microscopy can be combined with specialized software for rapid characterization of powders and particles.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Semiconductor Analysis and Imaging

Thermo Fisher Scientific offers scanning electron microscopes for every function of a semiconductor lab, from general imaging tasks to advanced failure analysis techniques requiring precise voltage-contrast measurements.

Learn more ›

ChemiSEM

Using live EDS (energy dispersive X-ray spectroscopy) with live quantification, ChemiSEM Technology transforms SEM imaging into a color technique. Any user can now acquire elemental data continuously for more complete information than ever before.

Learn more ›

Imaging Hot Samples

Studying materials in real-world conditions often involves working at high temperatures. The behavior of materials as they recrystallize, melt, deform, or react in the presence of heat can be studied in situ with scanning electron microscopy or DualBeam tools.

Learn more ›

Environmental SEM (ESEM)

Environmental SEM allows materials to be imaged in their native state. This is ideally suited for academic and industrial researchers who need to test and analyze samples that are wet, dirty, reactive, outgassing or otherwise not vacuum compatible.

Learn more ›

Particle analysis

Particle analysis plays a vital role in nanomaterials research and quality control. The nanometer-scale resolution and superior imaging of electron microscopy can be combined with specialized software for rapid characterization of powders and particles.

Learn more ›

Cathodoluminescence

Cathodoluminescence (CL) describes the emission of light from a material when it is excited by an electron beam. This signal, captured by a specialized CL detector, carries information on the sample’s composition, crystal defects, or photonic properties.

Learn more ›

Semiconductor Analysis and Imaging

Thermo Fisher Scientific offers scanning electron microscopes for every function of a semiconductor lab, from general imaging tasks to advanced failure analysis techniques requiring precise voltage-contrast measurements.

Learn more ›

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Contact us

Electron microscopy services

To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

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