Metrios 6 (S)TEM

Increased productivity and data integrity

Fast elemental analysis

3D NAND memory cell EDS map using the Ultra-X detector.
GAA transistor “forksheet” structure EDS map produced by the Ultra-X detector.

Recipe-free automation for (S)TEM metrology

Fully automated (S)TEM imaging

Technical highlights for Metrios 6 (S)TEM

Yield Ramp and Metrology

Yield Ramp and Metrology

Physical and Chemical Characterization

Physical and elemental characterization

Memory Device Metrology and Analysis

Memory device metrology and analysis