Scios 3 FIB-SEM Applications

A basic application of FIB-SEM instruments is creating cross-sections, a fundamental application providing insights into materials' microstructure. By selectively removing material with FIB, hidden structures beneath the sample surface can be further examined with SEM or EDS, revealing details about structural properties, composition, and failure mechanisms.

Key factors for achieving high-quality cross-section preparation include the FIB column's ability to efficiently focus ions for fast and clean cuts. Complex or non-uniform samples may pose challenges, but the "rocking mill" technique, a software feature in all Thermo Scientific DualBeam systems, can aid in producing smooth surfaces without the need for additional hardware. Furthermore, fully automated preparation of multi-site cross-sections with multi-modal data acquisition is enabled by Thermo Scientific Auto Cross Section Software, streamlining operator and tool efficiency.

Three-dimensional characterization is often required to better understand the structure and properties of a sample. The Scios 3 FIB-SEM with optional Thermo Scientific Auto Slice & View 5 Software allows for high-quality, fully automated acquisition of multi-modal 3D datasets, including, among others, BSE imaging for maximum materials contrast, energy dispersive spectroscopy (EDS) for compositional information, and electron backscatter diffraction (EBSD) to acquire microstructural and crystallographic information. Combined with Thermo Scientific Avizo Software, it delivers a unique workflow solution for high-resolution, advanced 3D characterization and analysis at the nanometer scale.

The Scios 3 FIB-SEM with Thermo Scientific AutoTEM 5 Software excels in automated TEM sample preparation, offering fast and precise preparation of high-quality, site-specific TEM samples. Its advanced milling and low-energy polishing techniques help ensure that samples are of very high quality, with minimal surface damage and optimal structural integrity. This capability is essential for researchers and engineers who require detailed and accurate TEM samples for their studies. The system's ability to produce high-quality TEM samples quickly and efficiently makes it an indispensable tool for advanced research.