Search
Materials Science
Nanoscale Prototyping
Nano prototyping FIB-SEM tools that accelerate your research and development.
48ab - Applications/Échantillons/Produits/Ressources/Nous contacter
As technology continues to miniaturize, the demand for nanoscale devices and structures is ever increasing. The challenge of converting the latest ideas and designs into valuable assets only continues to grow, and significant technical and financial barriers need to be overcome for successful prototyping of nanoscale devices.
Standard nanofabrication batch processes involve the combined use of different machines for each pattern layer. These instruments might include a spin coater for resist application, a lithography tool, wet chemistry for resist development, a plasma cleaner, and deposition or etching equipment for pattern transfer. The use of so many distinct tools results in a costly and time-consuming prototyping process. As researchers push nanotechnology towards smaller dimensions, these established procedures and recipes often no longer keep pace with the demands of rapid development.
A reliable nanoprototyping technique would feature dedicated strategies for the execution of pattern designs. This would include the ability to observe the patterning process live and to immediately image the resulting structures with high resolution, offering unique control over the patterning process. This would also provide an immediate feedback loop for the observer, accelerating their development process. This is why DualBeam (focused ion beam – scanning electron microscopy, or FIB-SEM) technology is ideally suited for nanoprototyping applications. The SEM provides high-resolution imaging as the FIB accurately adds or removes material at the nanometer scale via milling or chemical deposition.
Thermo Fisher Scientific offers a smart and efficient way of turning nanoscale designs into reality. Our DualBeam instruments feature unique precision stages and are combined with state-of-the-art software and patterning engines. Together, these produce a robust prototyping workflow that enables you to quickly design, create, and inspect micro- and nanoscale functional prototype devices.
Left: Electromigration structure created with NanoBuilder Software. Right: Close up of a single channel. Critical dimensions as low as 10 nm are possible.
Style Sheet for Komodo Tabs
A split-ring oscillator pattern milled directly with a focused ion beam. The FIB used a vector scanning method in order to optimize milling direction for each part of the pattern.
A nano-fluidic system made with a multi-layered pattern in NanoBuilder Software. Each layer may consist of a deposition or milling sequence to selectively add or remove material.
Secondary electron image of a honeycomb structure milled into a silicon substrate using a focused ion beam.
A split-ring oscillator pattern milled directly with a focused ion beam. The FIB used a vector scanning method in order to optimize milling direction for each part of the pattern.
A nano-fluidic system made with a multi-layered pattern in NanoBuilder Software. Each layer may consist of a deposition or milling sequence to selectively add or remove material.
Secondary electron image of a honeycomb structure milled into a silicon substrate using a focused ion beam.
Fundamental Materials Research
Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.
Recherche sur les batteries
Le développement de batteries est possible grâce à une analyse multi-échelle avec la microCT, la SEM et la TEM, la spectroscopie Raman, la XPS ainsi que la visualisation et l’analyse 3D numériques. Découvrez comment cette approche fournit les informations structurelles et chimiques nécessaires à l’amélioration des batteries.
Recherche sur les métaux
La production efficace de métaux nécessite un contrôle précis des inclusions et des précipités. Nos outils automatisés peuvent effectuer toute une série de tâches essentielles à l’analyse des métaux, notamment le comptage des nanoparticules, l’analyse chimique par EDS et la préparation des échantillons par TEM.
Recherche dans le domaine de la catalyse
Les catalyseurs sont essentiels pour la majorité des processus industriels modernes. Leur efficacité dépend de la composition microscopique et de la morphologie des particules catalytiques ; l’EM avec l’EDS est parfaitement adaptée à l’étude de ces propriétés.
Nanoparticules
Les matériaux possèdent des propriétés fondamentalement différentes à l’échelle nanométrique par rapport à l’échelle macroscopique. Pour les étudier, les instruments de S/TEM peuvent être associés à la spectroscopie à rayons X à dispersion d’énergie pour obtenir des données de résolution à l’échelle du nanomètre, voire inférieure au nanomètre.
Style Sheet for Instrument Cards Original
Style Sheet to change H2 style to p with em-h2-header class
Style Sheet for Support and Service footer
Style Sheet for Fonts
Style Sheet for Cards
Electron microscopy services for
the materials science
To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.
