The Thermo Scientific Helios Hydra DualBeam (focused ion beam scanning electron microscope, FIB-SEM) delivers four different ion species as the primary beam, allowing you to choose the ions that provide the best results for your samples and use cases, such as STEM and TEM sample preparation and 3D materials characterization.

Switching between argon, nitrogen, oxygen and xenon is easy and can be done in under ten minutes without sacrificing performance. This unprecedented flexibility significantly expands the potential application space of FIB and enables research of ion-sample interactions to optimize existing use cases.

The Thermo Scientific Helios Hydra DualBeam combines the new, innovative multi-ion-species plasma FIB (PFIB) column with the monochromated Thermo Scientific Elstar SEM Column to provide advanced focused ion- and electron-beam performance. Intuitive software and an unprecedented level of automation and ease-of-use allow observation and analysis of relevant subsurface volumes.

Key Features

Broad application space

Unique ion source delivers four quickly switchable ion species: xenon, argon, oxygen, or nitrogen.

High throughput and quality

High-throughput, high-quality, and statistically relevant 3D characterization, cross sectioning and micromachining using the next-generation 2.5 μA plasma FIB column.

Multi-modal subsurface and 3D information

Access to high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional Thermo Scientific Auto Slice & View 4 (AS&V4) Software.

High-quality sample preparation

High-quality gallium-free TEM sample preparation with xenon or argon thanks to the guided TEM sample preparation workflow and the PFIB's superior performance (at all operating conditions).

Sub-nanometer performance

Finest details using the best-in-class Elstar Electron Column with high-current UC+ monochromator technology, enabling sub-nanometer performance at low energies.

Complete sample information

Sharp, refined and charge-free contrast obtained from up to six integrated in-column and below-the-lens detectors.

Electron and ion beam-induced deposition and etching

Most advanced capabilities for electron and ion beam-induced deposition and etching on DualBeam systems with optional MultiChem or GIS Gas Delivery Systems.

Precise sample navigation

Tailored to individual application needs thanks to the high-flexibility 110-mm stage and optional in-chamber Thermo Scientific Nav-Cam Camera.

Artifact-free imaging

Based on integrated sample cleanliness management and dedicated imaging modes such as SmartScan and DCFI.


Specifications

Style Sheet for Products Table Specifications
  Helios Hydra CX Helios Hydra UX
Detectors
  • Elstar Column in-lens SE/BSE detector (TLD-SE, TLD-BSE)
  • Elstar Column in-column SE/BSE detector (ICD)*
  • Everhart-Thornley SE detector (ETD)
  • IR camera for viewing sample/column
  • High-performance in-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE)
  • In-chamber Thermo Scientific NavCam Sample Navigation Camera*
  • Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS)*
  • Integrated beam current measurement 
  • Elstar Column in-lens SE/BSE detector (TLD-SE, TLD-BSE)
  • Elstar Column in-column SE/BSE detector (ICD)*
  • Everhart-Thornley SE detector (ETD)
  • IR camera for viewing sample/column
  • High performance In-Chamber Electron and Ion Detector (ICE), for secondary ions (SI) and electrons (SE)
  • In-chamber Thermo Scientific NavCam Sample Navigation Camera*
  • Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS)*
  • Integrated beam current measurement
Stage and sample

Flexible, five-axis motorized stage:

  • XY range: 110 mm
  • Z range: 65 mm
  • Rotation: 360° (endless)
  • Tilt range: -38° to +90°
  • XY repeatability: 3 μm
  • Max sample height: Clearance 85 mm to eucentric point
  • Max sample weight at 0° tilt: 2 kg (including sample holder)
  • Max sample size: 110 mm with full rotation (larger samples possible with limited rotation)
  • Compucentric rotation and tilt

High-precision, five-axis motorized stage with Piezo-driven XYR axis

  • XY range: 150 mm
  • Z range: 10 mm
  • Rotation: 360° (endless)
  • Tilt range: -38° to +60°
  • XY repeatability: 1 μm
  • Max sample height: Clearance 55 mm to eucentric point
  • Max sample weight at 0° tilt: 500 g (including sample holder)
  • Max sample size: 150 mm with full rotation (larger samples possible with limited rotation)
  • Compucentric rotation and tilt
Electron beam resolution
  • At optimum WD:
    • 0.7 nm at 1 kV
    • 1.0 nm at 500 V (ICD)
  • At coincident point:
    • 0.6 nm at 15 kV
    • 1.2 nm at 1 kV
Electron beam parameter space
  • Electron beam current range: 0.8 pA to 100 nA at all accelerating voltages
  • Accelerating voltage range: 350 V – 30 kV
  • Landing energy range: 20* eV – 30 keV
  • Maximum horizontal field width: 2.3 mm at 4 mm WD
Ion optics

High-performance PFIB column with unique inductively coupled plasma (ICP) source supporting four ion species with fast switching capability

  • Ion species (primary ion beam): Xe, Ar, O, N
  • Switching time <10 minutes, only software operation
  • Ion beam current range: 1.5 pA to 2.5 µA
  • Accelerating voltage range: 2 kV - 30 kV
  • Maximum horizontal field width: 0.9 mm at beam coincidence point 

Xe Ion beam resolution at coincident point

  • <20 nm at 30 kV using preferred statistical method
  • <10 nm at 30 kV using selective edge method
Chamber
  • E- and I-beam coincidence point at analytical WD (4 mm SEM)
  • Ports: 21
  • Inside width: 379 mm
  • Integrated plasma cleaner
Style Sheet for Techniques (LONG VERSION) and Media Gallery Tab
3D reconstruction of an automotive oil filter casing.
3D reconstruction of an automotive oil filter casing (polymer/glass fiber composite) acquired with a Helios Hydra CX DualBeam using O+ focused ion beam and AS&V4 Software for automated serial sectioning. Horizontal field width is 350 µm.
HR S/TEM image of a high-quality GaAs lamella.
High-resolution STEM image of a high-quality GaAs lamella prepared with the Helios Hydra UX DualBeam using Ar FIB for the final polishing.

3D reconstruction of an automotive oil filter casing, acquired with the Helios Hydra DualBeam and Auto Slice & View 4 Software for automated serial sectioning. Horizontal field width = 350 µm.

Introducing&#x20;the&#x20;Helios&#x20;Hydra&#x20;DualBeam

Introducing the Helios Hydra DualBeam

Do you often struggle to prepare high-quality, ultra-low-damage S/TEM samples? Are you trying to uncover the highest quality subsurface information from the most challenging samples?

Register below to watch our recorded webinar and learn more about how the Helios Hydra DualBeam delivers four different ions as the primary beam, allowing you to choose the ion species that provide the best S/TEM sample prep and 3D material characterization.

Register now

3D reconstruction of an automotive oil filter casing.
3D reconstruction of an automotive oil filter casing (polymer/glass fiber composite) acquired with a Helios Hydra CX DualBeam using O+ focused ion beam and AS&V4 Software for automated serial sectioning. Horizontal field width is 350 µm.
HR S/TEM image of a high-quality GaAs lamella.
High-resolution STEM image of a high-quality GaAs lamella prepared with the Helios Hydra UX DualBeam using Ar FIB for the final polishing.

3D reconstruction of an automotive oil filter casing, acquired with the Helios Hydra DualBeam and Auto Slice & View 4 Software for automated serial sectioning. Horizontal field width = 350 µm.

Introducing&#x20;the&#x20;Helios&#x20;Hydra&#x20;DualBeam

Introducing the Helios Hydra DualBeam

Do you often struggle to prepare high-quality, ultra-low-damage S/TEM samples? Are you trying to uncover the highest quality subsurface information from the most challenging samples?

Register below to watch our recorded webinar and learn more about how the Helios Hydra DualBeam delivers four different ions as the primary beam, allowing you to choose the ion species that provide the best S/TEM sample prep and 3D material characterization.

Register now

Applications

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Process Control
 

Modern industry demands high throughput with superior quality, a balance that is maintained through robust process control. SEM and TEM tools with dedicated automation software provide rapid, multi-scale information for process monitoring and improvement.

 

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Quality Control
 

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

 

Fundamental&#x20;Materials&#x20;Research_R&amp;D_Thumb_274x180_144DPI

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

 

3D Materials Characterization

Development of materials often requires multi-scale 3D characterization. DualBeam instruments enable serial sectioning of large volumes and subsequent SEM imaging at nanometer scale, which can be processed into high-quality 3D reconstructions of the sample.

Learn more ›

S/TEM Sample Preparation

DualBeam microscopes enable the preparation of high-quality, ultra-thin samples for S/TEM analysis. Thanks to advanced automation, users with any experience level can obtain expert-level results for a wide range of materials.

Learn more ›

APT Sample Preparation

Atom probe tomography (APT) provides atomic-resolution 3D compositional analysis of materials. Focused ion beam (FIB) microscopy is an essential technique for high-quality, orientation, and site-specific sample preparation for APT characterization.

Learn more ›

Cross-sectioning

Cross sectioning provides extra insight by revealing sub-surface information. DualBeam instruments feature superior focused ion beam columns for high-quality cross sectioning. With automation, unattended high-throughput processing of samples is possible.

Learn more ›

In Situ experimentation

Direct, real-time observation of microstructural changes with electron microscopy is necessary to understand the underlying principles of dynamic processes such as recrystallization, grain growth, and phase transformation during heating, cooling, and wetting.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

3D Materials Characterization

Development of materials often requires multi-scale 3D characterization. DualBeam instruments enable serial sectioning of large volumes and subsequent SEM imaging at nanometer scale, which can be processed into high-quality 3D reconstructions of the sample.

Learn more ›

S/TEM Sample Preparation

DualBeam microscopes enable the preparation of high-quality, ultra-thin samples for S/TEM analysis. Thanks to advanced automation, users with any experience level can obtain expert-level results for a wide range of materials.

Learn more ›

APT Sample Preparation

Atom probe tomography (APT) provides atomic-resolution 3D compositional analysis of materials. Focused ion beam (FIB) microscopy is an essential technique for high-quality, orientation, and site-specific sample preparation for APT characterization.

Learn more ›

Cross-sectioning

Cross sectioning provides extra insight by revealing sub-surface information. DualBeam instruments feature superior focused ion beam columns for high-quality cross sectioning. With automation, unattended high-throughput processing of samples is possible.

Learn more ›

In Situ experimentation

Direct, real-time observation of microstructural changes with electron microscopy is necessary to understand the underlying principles of dynamic processes such as recrystallization, grain growth, and phase transformation during heating, cooling, and wetting.

Learn more ›

Multi-scale analysis

Novel materials must be analyzed at ever higher resolution while retaining the larger context of the sample. Multi-scale analysis allows for the correlation of various imaging tools and modalities such as X-ray microCT, DualBeam, Laser PFIB, SEM and TEM.

Learn more ›

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To ensure optimal system performance, we provide you access to a world-class network of field service experts, technical support, and certified spare parts.

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