Resources and documentation on multi-ion species plasma FIB SEM

Find out how Thermo Scientific Helios Hydra PFIB-SEMs can help solve your toughest challenges in failure analysis and materials research. Our resources page provides everything from comprehensive overviews to in-depth tutorials and publications on techniques, technologies, and more.

Helios 5+ and Helios Hydra 5+ PFIB-SEM datasheet

The next level in comprehensive sample preparation technology

Watch the live launch of the Thermo Scientific Helios 5+ PFIB-SEMs


Helios Hydra PFIB-SEM videos and infographics

Simplifying failure analysis with plasma FIB

Why do I need multiple ion species?


Helios Hydra PFIB-SEM datasheets

Explore detailed specifications of the Helios Hydra 5 PFIB-SEM and the new Helios Hydra 5+ PFIB-SEM for semiconductor, materials science, and life sciences applications.

Helios Hydra 5+ PFIB-SEM for semiconductor

The Helios 5+ PFIB-SEM is here—our turbocharged plasma-FIB platforms for comprehensive sample preparation with advanced capabilities for semiconductors and with dedicated applications enhancements for all failure analysis needs: large-volume analysis, TEM sample preparation, and device deprocessing.

Hydra Bio Plasma-FIB for life sciences

The Thermo Scientific Hydra Bio Plasma-FIB is a focused ion beam scanning electron microscope (FIB-SEM) designed for volumetric imaging of frozen-hydrated and resin-embedded biological samples. The Hydra Bio Plasma-FIB also features proven automation and cryo-technologies for versatile cryo-electron tomography lamella preparation.

Helios Hydra PFIB-SEM webinars

Discover in-depth video coverage of Helios Hydra PFIB-SEM applications and techniques, from semiconductor advanced packaging to materials research and development.

Helios 5+ PFIB-SEM launch webinar

Large-volume analysis, delayering, and TEM preparation have taken a huge leap forward with the Helios 5+ platforms, designed to accelerate and automate every need. Discover extreme milling, with up to 4x more throughput, damage-free delayering with 100eV inspection, and much more.

The advantages of multi-ion species plasma-fib milling

Watch our webinar to learn how the Thermo Scientific Helios Hydra PFIB-SEM’s selectable-species FIB enables highly efficient sample preparation across a wide variety of materials and length scales, from precise TEM sample preparation to the creation of large-volume, high-quality SEM data sets.

TEM sample preparation and imaging techniques for advanced power devices

SiC and GaN semiconductors enable higher voltage, current, and frequency in power and RF devices. But their wafer fabrication is challenging, affecting yield and costs. Besides traditional defect identification, a new challenge is locating and characterizing crystalline dislocations in substrates.


Helios Hydra PFIB-SEM publications

Browse our library of white papers, application notes, case studies, and journal publications to see how Helios Hydra PFIB-SEM systems are used to make breakthroughs in the real world of microelectronics, battery research, and biology.

Impact of ion type on FIB cut face quality

Large-area automated sample preparation with Spin Mill Method

Case study: Australian Center for Microscopy and Microanalysis

Flexible application of multispecies plasma-FIB in failure analysis workflows

Here we demonstrate sample preparation for workflows involving electrical failure analysis (EFA) and localization, cross-sectional and volume analysis using scanning electron microscopy (SEM), as well as lamella preparation for transmission electron microscopy for physical failure analysis (PFA).

2D and 3D metrology and failure analysis for high bandwidth memory package by Xe and Ar Plasma-FIB

This paper explores the use of plasma-FIB (PFIB)/SEM techniques in 2D and 3D regimes, introducing diagonal serial sectioning at package scales for PFA and metrology. A high bandwidth memory (HBM) package case study demonstrates both 2D and 3D analysis, applicable to broader 3D packaging.

For Research Use Only. Not for use in diagnostic procedures.